scholarly journals A Three Dimensional Calculation of Electron Energy Loss in a Variable Parameter Free-Electron Laser

1980 ◽  
Author(s):  
A. Luccio ◽  
C. Pellegrini
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Free Electron ◽  
Free Electron Laser ◽  
Three Dimensional ◽  
Variable Parameter ◽  
Electron Energy Loss

scholarly journals Electron energy-loss spectroscopic tomography of FexCo(3−x)O4 impregnated Co3O4 mesoporous particles: unraveling the chemical information in three dimensions

The Analyst ◽  
2016 ◽  
Vol 141 (16) ◽  
pp. 4968-4972 ◽  
Author(s):  
L. Yedra ◽  
A. Eljarrat ◽  
R. Arenal ◽  
L. López-Conesa ◽  
E. Pellicer ◽  
...  
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Three Dimensional ◽  
Three Dimensions ◽  
Chemical Information ◽  
Electron Energy Loss ◽  
Mesoporous Particles

Electron energy-loss spectroscopy-spectrum image (EELS-SI) tomography is a powerful tool to investigate the three dimensional chemical configuration in nanostructures.

Scanning Confocal Electron Energy-Loss Microscopy Using Valence-Loss Signals

2013 ◽  
Vol 19 (4) ◽  
pp. 1036-1049 ◽  
Author(s):  
Huolin L. Xin ◽  
Christian Dwyer ◽  
David A. Muller ◽  
Haimei Zheng ◽  
Peter Ercius
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Tomography ◽  
Semiconductor Industry ◽  
Core Loss ◽  
Three Dimensional ◽  
Chromatic Aberration ◽  
Chemical Information ◽  
Tilt Series ◽  
Electron Energy Loss

AbstractFinding a faster alternative to tilt-series electron tomography is critical for rapidly evolving fields such as the semiconductor industry, where failure analysis could greatly benefit from higher throughput. We present a theoretical and experimental evaluation of scanning confocal electron energy-loss microscopy (SCEELM) using valence-loss signals, which is a promising technique for the reliable reconstruction of materials with sub-10-nm resolution. Such a confocal geometry transfers information from the focused portion of the electron beam and enables rapid three-dimensional (3D) reconstruction by depth sectioning. SCEELM can minimize or eliminate the missing-information cone and the elongation problem that are associated with other depth-sectioning image techniques in a transmission electron microscope. Valence-loss SCEELM data acquisition is an order of magnitude faster and requires little postprocessing compared with tilt-series electron tomography. With postspecimen chromatic aberration (Cc) correction, SCEELM signals can be acquired in parallel in the direction of energy dispersion with the aid of a physical pinhole. This increases the efficiency by 10×–100×, and can provide 3D resolved chemical information for multiple core-loss signals simultaneously.

Elemental mapping with a parallel-detection Electron Energy-Loss Spectrometer

1989 ◽  
Vol 47 ◽  
pp. 672-673
Author(s):  
Ondrej L. Krivanek ◽  
Chris E. Meyer ◽  
Marcel Tencé
Keyword(s):  
Electron Microscope ◽  
Energy Loss ◽  
Electron Energy ◽  
Three Dimensional ◽  
Three Dimensions ◽  
Image Point ◽  
Two Dimensional ◽  
Parallel Detection ◽  
Electron Energy Loss Spectrometer ◽  
Electron Energy Loss

Elemental maps, that is images showing the concentration of different elements in a sample, can be obtained in an electron microscope equipped with an electron energy-loss spectrometer (EELS) by acquiring and processing data in three dimensions: spatial coordinates x and y, and the energy loss ΔE. Since the electron detector is necessarily at most a two-dimensional one, acquiring all the required data at the same time is not possible. Instead, one can either use an imaging electron spectrometer and acquire a series of whole images at one energy at a time, or use a small probe in a scanning-transmission electron microscope (STEM), and acquire the data image-point by image-point. With a serial-detection spectrometer the data at each image-point must be recorded sequentially, while with a parallel-detection spectrometer a whole spectrum can be recorded at the same time.The two approaches are illustrated schematically in figure 1. The individual sampling points in the three- dimensional volume have been called voxels (by analogy with two-dimensional pixels).

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