scholarly journals ''In-situ'' electron microscope investigation of the nucleation and growth of sputtered thin films. Annual technical progress report V

1973 ◽  
Author(s):  
T.E. Hutchinson ◽  
J. Maa ◽  
J. Lee
Keyword(s):  
Thin Films ◽  
Electron Microscope ◽  
Technical Progress ◽  
Nucleation And Growth ◽  
Progress Report ◽  
Electron Microscope Investigation ◽  
Microscope Investigation

In Situ Electron Microscope Investigations of the Growth and Structure of Thin Films

1968 ◽  
Vol 26 ◽  
pp. 376-377
Author(s):  
Thos. E. Hutchinson
Keyword(s):  
Thin Films ◽  
Electron Microscope ◽  
Nucleation And Growth ◽  
Time Sequence ◽  
Experimental Chamber ◽  
Growth Mechanisms ◽  
Sequence Of Events ◽  
Atom Clusters ◽  
Film Nucleation

Few areas of investigation have benefited more from the use of the electron microscope than thin films. This is most strikingly demonstrated by the state of knowledge of the structure and growth mechanisms prior to and subsequent to electron microscope investigations.The use of the electron microscope as an experimental chamber in which both growth and observation take place simultaneously, has been responsible primarily for the broad quasi-quantitative view of the process of formation of thin films we now hold. The great advantage of the in situ experimental arrangement lies in its ability to examine in detail the time sequence of events occuring during thin film nucleation and growth. Each stage in the process of formation of thin films has been examined, and although questions still remain as to the exact mechanisms involved, the general features are well characterized. These are nucleation of ad-atom clusters on the substrate, growth of the atom clusters both laterally and perpendicular to the substrate, coalescence of the nuclei into larger sub-units and finally, elimination of channels between the extended islands.

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