Low-Temperature Processing for Atomically Precise Dopant Incorporation with CMOS Integration.
Keyword(s):
2008 ◽
Vol 5
(1)
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pp. 29-36
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2006 ◽
Vol 118
(1-2)
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pp. 105-109
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2017 ◽
Vol 13
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pp. 232-240
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Keyword(s):
2019 ◽
Vol 81
(2)
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pp. 250-256
2013 ◽
Vol 50
(3)
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pp. 226-230