Final Report - Long life radio frequency surface plasma source

2018 ◽  
Author(s):  
Vadim Dudnikov ◽  
Keyword(s):  
Radio Frequency ◽  
Plasma Source ◽  
Final Report ◽  
Surface Plasma ◽  
Long Life

Surface plasma source with saddle antenna radio frequency plasma generator

2012 ◽  
Vol 83 (2) ◽  
pp. 02A712 ◽  
Author(s):  
V. Dudnikov ◽  
R. P. Johnson ◽  
S. Murray ◽  
T. Pennisi ◽  
C. Piller ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Plasma Generator ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Surface Plasma ◽  
Frequency Plasma

SURFACE PLASMA SOURCE OF HYDROGEN ATOMS WITH AN ENERGY OF HUNDREDS eV

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-479-C7-480 ◽  
Author(s):  
V. G. Dudnikov ◽  
G. I. Fiksel'
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
Hydrogen Atoms

Nitrogen doping of molecular beam epitaxially grown CdTe with a radio-frequency plasma source

1994 ◽  
Vol 138 (1-4) ◽  
pp. 443-447 ◽  
Author(s):  
K.A. Dhese ◽  
D.E. Ashenford ◽  
J.E. Nicholls ◽  
P. Devine ◽  
B. Lunn ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Nitrogen Doping ◽  
Molecular Beam ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Evaluation of a simple method for chopping Penning surface-plasma source H− beams

1996 ◽  
Author(s):  
H. Vernon Smith ◽  
Paul Allison ◽  
J. David Schneider ◽  
James E. Stelzer ◽  
Ralph R. Stevens
Keyword(s):  
Plasma Source ◽  
Surface Plasma ◽  
Simple Method

CVD of hard DLC films in a radio frequency inductively coupled plasma source

2001 ◽  
Vol 390 (1-2) ◽  
pp. 98-103 ◽  
Author(s):  
S.J Yu ◽  
Z.F Ding ◽  
J Xu ◽  
J.L Zhang ◽  
T.C Ma
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Inductively Coupled
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