Traditionally, x-ray microprobes, scanning electron microscopes and similar electron microbeam instruments have been designed and built in much the same manner as transmission electron microscopes; that is, as single purpose instruments with provisions for a miltiplicity of attachments to increase their scope. Electron optically these instruments are nearly identical, the only differences being in mechanical restrictions necessary to accommodate spectrometers, specimen stages, light optics, etc. Hence, it appears desirable to modularize an electron microbeam system to provide a variety of instruments, each sharing a common foundation. This then allows the user to convert an instrument from one configuration to another at minimum expense without sacrificing performance and also to readily construct specialized instruments from standard parts. Other advantages of modular construction, both from the builders' and users' standpoint have been discussed previously.