scholarly journals Solid state laser driver for Extreme Ultraviolet Lithography. Revision 1

1994 ◽  
Author(s):  
L.E. Zapata ◽  
J. Honig ◽  
P. Reichert ◽  
L.A. Hackel
2015 ◽  
Vol 52 (8) ◽  
pp. 080005
Author(s):  
肖凯博 Xiao Kaibo ◽  
袁晓东 Yuan Xiaodong ◽  
蒋新颖 Jiang Xinying ◽  
严雄伟 Yan Xiongwei ◽  
王振国 Wang Zhenguo ◽  
...  

2013 ◽  
Vol 25 (5) ◽  
pp. 1147-1151 ◽  
Author(s):  
程晓锋 Cheng Xiaofeng ◽  
王洪彬 Wang Hongbin ◽  
苗心向 Miao Xinxiang ◽  
秦朗 Qin Lang ◽  
叶亚云 Ye Yayun ◽  
...  

2015 ◽  
Vol 52 (4) ◽  
pp. 040001
Author(s):  
肖凯博 Xiao kaibo ◽  
袁晓东 Yuan Xiaodong ◽  
蒋新颖 Jiang Xinying ◽  
严雄伟 Yan Xiongwei ◽  
王振国 Wang Zhenguo ◽  
...  

1992 ◽  
Author(s):  
Masanobu Yamanaka ◽  
Kenta Naito ◽  
Masahiro Nakatsuka ◽  
Sadao Nakai

1999 ◽  
Vol 17 (3) ◽  
pp. 427-435 ◽  
Author(s):  
N.G. BASOV ◽  
Yu.M. POPOV ◽  
V.V. BEZOTOSNY ◽  
Kh.Kh. KUMYKOV

2D arrays of laser diodes were developed and investigated under QCW operating conditions. Output power and energy density up to 1 kW/cm2 and 0.45 J/cm2 (at pulse duration 0.5 ms) were measured at the wavelength 810 nm. The spectral composition of radiation, shape of the output pulses, and far-field and near-field radiation zones were examined under various pumping parameters. The kinetics of the temperature profiles in monolithic QCW AlGaAs/GaAs linear bars and 2D arrays, emitting at the wavelength 810 nm was modeled numerically. Quasi-CW and CW operation under various pump parameters were considered as a function of a heat sink design. A calculation model was used to interpret the experimental dependences of the output parameters of the arrays on the pump conditions for application in the solid-state laser driver project. The limit of total power conversion efficiency of diode lasers was analyzed in respect of the threshold current density, series resistance and external differential quantum efficiency. The estimated maximum value of 75% was obtained for the present technological level of the diode lasers production. The corresponding limit of the output optical power density of 2D laser array was defined around 10 kW/cm2.


1995 ◽  
Author(s):  
Christopher D. Marshall ◽  
Stephen A. Payne ◽  
Mark A. Emanuel ◽  
Larry K. Smith ◽  
Howard T. Powell ◽  
...  

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