Characterization of polysilicon films by Raman spectroscopy and transmission electron microscopy: A comparative study
2003 ◽
Vol 87
(8)
◽
pp. 1329-1338
◽
1996 ◽
Vol 35
(Part 1, No. 4A)
◽
pp. 2102-2107
◽
2021 ◽