Anatomy of the Berkeley Sensor & Actuator Center (BSAC): The NSF Industry/University Cooperative Research Center on MEMS
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2002 ◽
Vol 67
(555)
◽
pp. 171-176
◽
2004 ◽
Vol 264-268
◽
pp. 1329-1332
2012 ◽
pp. 135-146
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