Thin-Film Density Determination of Tantalum, Tantalum Oxides, and Xerogels by Multiple Radiation Energy Dispersive X-Ray Reflectivity

1999 ◽  
Author(s):  
D. Windover ◽  
S. L. Lee
Keyword(s):  
Thin Film ◽  
Radiation Energy ◽  
Energy Dispersive ◽  
X Ray ◽  
Film Density ◽  
Density Determination

Determining Thin Film Density by Energy-Dispersive X-Ray Reflectivity: Application to a Spin-on-Glass Dielectric

1995 ◽  
Vol 405 ◽  
Author(s):  
W. E. Wallace ◽  
W. L. Wu
Keyword(s):  
Thin Film ◽  
Critical Angle ◽  
Energy Dispersive ◽  
Ion Scattering ◽  
Reflectivity Measurement ◽  
X Ray ◽  
Film Density ◽  
Novel Method ◽  
Improved Accuracy

AbstractA novel method for determining thin film density by energy dispersive x-ray reflectivity is demonstrated for a polymer-derived spin-on-glass dielectric intended for microelectronics applications. The effects of sample misalignment limit the accuracy of x-ray reflectivity as typically practiced. These effects may be properly accounted for by measuring the critical angle for reflection at many different x-ray wavelengths simultaneously. From this measurement, thin film density can be ascertained with much improved accuracy. The results of the x-ray reflectivity measurement are compared to those derived from MeV ion scattering.

scholarly journals Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation

2015 ◽  
Vol 16 (2) ◽  
pp. 025007 ◽  
Author(s):  
Irene Prencipe ◽  
David Dellasega ◽  
Alessandro Zani ◽  
Daniele Rizzo ◽  
Matteo Passoni
Keyword(s):  
Thin Film ◽  
Energy Dispersive ◽  
X Ray ◽  
Film Density ◽  
Nanostructured Thin Film ◽  
Density Evaluation

Determination of polarity in noncentrosymmetric layer/substrate systems

1999 ◽  
Vol 32 (5) ◽  
pp. 854-858 ◽  
Author(s):  
Dirk C. Meyer ◽  
Kurt Richter ◽  
Hans-Georg Krane ◽  
Wolfgang Morgenroth ◽  
Peter Paufler
Keyword(s):  
Thin Film ◽  
Gaas Substrate ◽  
Energy Dispersive ◽  
Energy Spectra ◽  
Routine Procedure ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Energy-dispersive anomalous X-ray scattering has been used for the determination of the polarity of a noncentrosymmetric layer/substrate system. The method was applied to an epitaxically grown (Ga,In)P layer on a (001) GaAs substrate as an example to show its applicability as a routine procedure for noncentrosymmetric thin-film systems. In the simplest case, four energy spectra of various orders of the 111 reflections were sufficient to identify polarity, without the need for intensity corrections.

Determining Thin Film Density by Energy-Dispersive X-Ray Reflectivity: Application to a Spin-On-Glass Dielectric

1995 ◽  
Vol 406 ◽  
Author(s):  
W. E. Wallace ◽  
W. L. Wu
Keyword(s):  
Thin Film ◽  
Critical Angle ◽  
Energy Dispersive ◽  
Ion Scattering ◽  
Reflectivity Measurement ◽  
X Ray ◽  
Film Density ◽  
Novel Method ◽  
Improved Accuracy

AbstractA novel method for determining thin film density by energy dispersive x-ray reflectivity is demonstrated for a polymer-derived spin-on-glass dielectric intended for microelectronics applications. The effects of sample misalignment limit the accuracy of x-ray reflectivity as typically practiced. These effects may be properly accounted for by measuring the critical angle for reflection at many different x-ray wavelengths simultaneously. From this measurement, thin film density can be ascertained with much improved accuracy. The results of the x-ray reflectivity measurement are compared to those derived from MeV ion scattering.

Determination of the polymeric thin film thickness by energy dispersive X-ray fluorescence and multivariate analysis

2020 ◽  
Vol 167 ◽  
pp. 105818 ◽  
Author(s):  
Eduardo de Almeida ◽  
Fábio L. Melquiades ◽  
João P.R. Marques ◽  
Eva Marguí ◽  
Hudson W.P. de Carvalho
Keyword(s):  
Thin Film ◽  
Multivariate Analysis ◽  
Film Thickness ◽  
Energy Dispersive ◽  
Thin Film Thickness ◽  
X Ray ◽  
Polymeric Thin Film

Preparation And elemental analysis of ancient fibers

1987 ◽  
Vol 45 ◽  
pp. 410-411
Author(s):  
Allen Angel ◽  
Kathryn A. Jakes
Keyword(s):  
Cross Sections ◽  
Physical Structure ◽  
Energy Dispersive ◽  
Archaeological Sites ◽  
X Ray ◽  
Long Term Storage ◽  
Backscattered Electron ◽  
Electron Imaging

Fabrics recovered from archaeological sites often are so badly degraded that fiber identification based on physical morphology is difficult. Although diagenetic changes may be viewed as destructive to factors necessary for the discernment of fiber information, changes occurring during any stage of a fiber's lifetime leave a record within the fiber's chemical and physical structure. These alterations may offer valuable clues to understanding the conditions of the fiber's growth, fiber preparation and fabric processing technology and conditions of burial or long term storage (1).Energy dispersive spectrometry has been reported to be suitable for determination of mordant treatment on historic fibers (2,3) and has been used to characterize metal wrapping of combination yarns (4,5). In this study, a technique is developed which provides fractured cross sections of fibers for x-ray analysis and elemental mapping. In addition, backscattered electron imaging (BSI) and energy dispersive x-ray microanalysis (EDS) are utilized to correlate elements to their distribution in fibers.

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