Investigation of Electron Impact Processes Relevant to Visible Lasers

1977 ◽  
Author(s):  
M. John ◽  
W. Boness ◽  
H. A. Hyman
Keyword(s):  
Electron Impact ◽  
Impact Processes ◽  
Visible Lasers

A Kinetic Model for Low-Pressure RF Discharge Etching of Silicon Using SF6

1987 ◽  
Vol 98 ◽  
Author(s):  
Arit P. Paranjpe ◽  
George Kychakoff ◽  
Sidney A. Self
Keyword(s):  
Boltzmann Equation ◽  
Electron Impact ◽  
Etch Rate ◽  
Electron Number Density ◽  
Kinetics Model ◽  
Rf Discharge ◽  
Number Density ◽  
Electron Number ◽  
The Boltzmann Equation ◽  
Impact Processes

ABSTRACTThe variation of etch rate with power, pressure and flow is studied using a coupled electron and chemical kinetics model. The electron kinetics model involves a solution of the electron continuity and current continuity equations in conjunction with the Boltzmann equation. The temporal variation of the electric field, electron energy distribution function (EEDF) and electron number density in the bulk of an RF discharge, is calculated using measured current waveforms, and calculated species concentrations. Electron generation through electron-impact ionization, is balanced by attachment and diffusion losses. A time-dependent solution of the Boltzmann equation is employed to investigate the problem of non-equilibrium, between the EEDF and the instantaneous field. Rates for electron impact processes are calculated using the EEDF.Rate equations for the different species are solved to obtain steady state species concentrations. Radicals and ions produced by electron-impact processes are lost through neutral recombination, ion-ion neutralization, diffusion to reactor surfaces and flow losses. The calculated ion number densities far exceed the electron number density. A transport model that considers the diffusion of etchant species to the wafer and subsequent reaction, is used to compute the etch rate.

scholarly journals Electron impact processes in nitrogen rich atmospheres of the outer solar system

2010 ◽  
Vol 204 ◽  
pp. 012003 ◽  
Author(s):  
P V Johnson ◽  
J A Young ◽  
C P Malone ◽  
M A Khakoo ◽  
X Liu ◽  
...  
Keyword(s):  
Solar System ◽  
Electron Impact ◽  
Outer Solar System ◽  
Impact Processes

2s → ns (n = 3, 4) excitation of hydrogen atom by positron and (or) electron impact

2008 ◽  
Vol 86 (12) ◽  
pp. 1393-1399 ◽  
Author(s):  
V S Kulhar
Keyword(s):  
Hydrogen Atom ◽  
Differential Cross Section ◽  
Electron Impact ◽  
Cross Section ◽  
Cross Sections ◽  
Order Term ◽  
Particle Scattering ◽  
Angle Dependence ◽  
Impact Processes ◽  
Region 10

Excitation of a hydrogen atom from its meta stable 2s to its 3s and 4s state in positron and (or) electron impact processes was investigated using Newton’s three-particle scattering equations. The effect of the second-order term was also investigated. The angle dependence of the differential cross section was studied at energies of 10 and 50 eV, respectively. Integrated cross sections are also reported in the energy region 10–200 eV. These are compared with other existing calculations.PACS No.: 36.10.Dr

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