Planar Near-Field Measurement Techniques on High Performance Arrays. Part 1. Error Analysis for Nonscanning Beam Patterns

1975 ◽  
Author(s):  
Arthur D. Yaghjian
Keyword(s):  
Error Analysis ◽  
Field Measurement ◽  
High Performance ◽  
Near Field ◽  
Measurement Techniques ◽  
Beam Patterns ◽  
Near Field Measurement

scholarly journals Visualizing nanometric structures with sub-millimeter waves

2021 ◽  
Author(s):  
Alonso Ingar Romero ◽  
Amlan kusum Mukherjee ◽  
Anuar Fernandez Olvera ◽  
Mario Mendez Aller ◽  
Sascha Preu
Keyword(s):  
Field Measurement ◽  
Relative Phase ◽  
Dynamic Range ◽  
Near Field ◽  
Measurement Techniques ◽  
Height Profile ◽  
Height Difference ◽  
Wavelength Stabilization ◽  
Fabry Perot ◽  
Near Field Measurement

Abstract The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375 mm and 0.5 mm (corresponding to 0.6 THz-0.8 THz) by evaluating the Fabry-Pérot oscillations within surface-structured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. This precision surpasses the state-of-the-art by 1-2 orders of magnitude. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization.

scholarly journals Visualizing nanometric structures with sub-millimeter waves

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Alonso Ingar Romero ◽  
Amlan kusum Mukherjee ◽  
Anuar Fernandez Olvera ◽  
Mario Méndez Aller ◽  
Sascha Preu
Keyword(s):  
Field Measurement ◽  
Relative Phase ◽  
Dynamic Range ◽  
Near Field ◽  
Measurement Techniques ◽  
Height Profile ◽  
Height Difference ◽  
Wavelength Stabilization ◽  
Fabry Perot ◽  
Near Field Measurement

AbstractThe resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375 mm and 0.5 mm (corresponding to 0.6 THz–0.8 THz) by evaluating the Fabry-Pérot oscillations within surface-structured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization.

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