Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface

2006 ◽  
Vol 18 (6) ◽  
pp. 698-704 ◽  
Author(s):  
Shujie Liu ◽  
◽  
Shuichi Nagasawa ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu

Semiconductor processing must be fast and highly accurate when measuring the surface profile of soft thin films such as photoresists. We propose doing so using a multi-ball-cantilever AFM, which covers a wide area at high speed. Each cantilever has a ball stylus with a diameter that does not plastically deform measured surfaces. We studied resist profiles and the influence of the AFM stylus on the resist surface. To verify our proposal’s feasibility, we simulated the relationship of the indenter shape, size, and load and resist surface deformation using the finite element method (FEM). We discuss the influence of the AFM stylus based on the force-displacement curve. Experiments using the multi-ball-cantilever AFM confirmed its feasibility for measuring surface profiles highly accurately.

2019 ◽  
Vol 43 (4) ◽  
pp. 535-543 ◽  
Author(s):  
Shunxin Cao ◽  
Ruijun Zhang ◽  
Shuohua Zhang ◽  
Shuai Qiao ◽  
Dongsheng Cong ◽  
...  

Interaction and wear between wheel and rail become increasingly serious with the increase in elevator speed and load. Uneven roller surface, eccentricity of rollers, and the looseness of rail brackets result in serious vibration problems of high-speed and super-high-speed elevators. Therefore, the forced vibration differential equation representing elevator guide rails is established based on Bernoulli–Euler theory, and the vibration equation of the elevator guide shoes and the car is constructed using the Darren Bell principle. Then, the coupled vibration model of guide rail, guide shoes, and car can be obtained using the relationship of force and relative displacement among these components. The roller–rail parameters are introduced into the established coupled vibration model using the model equivalent method. Then, the influence of roller–rail parameters on the horizontal vibration of super-high-speed elevator cars is investigated. Roller eccentricity and the vibration acceleration of the car present a linear correlation, with the amplitude of the car vibration acceleration increasing with the eccentricity of the roller. A nonlinear relationship exists between the surface roughness of the roller and the vibration acceleration of the car. Increased continuous loosening of the guide rail results in severe vibration of the car at the loose position of the support.


2003 ◽  
Vol 18 (9) ◽  
pp. 2068-2078 ◽  
Author(s):  
A. DiCarlo ◽  
H. T. Y. Yang ◽  
S. Chandrasekar

A method for determining the stress–strain relationship of a material from hardness values H obtained from cone indentation tests with various apical angles is presented. The materials studied were assumed to exhibit power-law hardening. As a result, the properties of importance are the Young's modulus E, yield strength Y, and the work-hardening exponent n. Previous work [W.C. Oliver and G.M. Pharr, J. Mater. Res. 7, 1564 (1992)] showed that E can be determined from initial force–displacement data collected while unloading the indenter from the material. Consequently, the properties that need to be determined are Y and n. Dimensional analysis was used to generalize H/E so that it was a function of Y/E and n [Y-T. Cheng and C-M. Cheng, J. Appl. Phys. 84, 1284 (1999); Philos. Mag. Lett. 77, 39 (1998)]. A parametric study of Y/E and n was conducted using the finite element method to model material behavior. Regression analysis was used to correlate the H/E findings from the simulations to Y/E and n. With the a priori knowledge of E, this correlation was used to estimate Y and n.


2013 ◽  
Vol 300-301 ◽  
pp. 62-67
Author(s):  
Kun Ye ◽  
Ren Xian Li

Cutting is an effective device to reduce crosswind loads acting on trains. The cutting depth, width and gradient of slope are important factors for design and construction of cutting. Based on numerical analysis methods of three-dimensional viscous incompressible aerodynamics equations, aerodynamic side forces and yawing moments acting on the high-speed train, with different depths and widths of cutting,are calculated and analyzed under crosswinds,meanwhile the relationship of the gradient of cutting slope and transverse aerodynamic forces acting on trains are also studied. Simulation results show that aerodynamic side forces and yawing moments acting on the train(the first, middle and rear train)decrease with the increase of cutting depth. The relationship between transverse forces (moments) coefficients acting on the three sections and the cutting depth basically is the three cubed relation. The bigger is cutting width,the worse is running stability of train. The relationship between yawing moments coefficients acting each body of the train and the cutting width approximately is the three cubed relation. The transverse Aerodynamic forces decreased gradually with the increase of the gradient of cutting slope, the relationship between yawing moments coefficients acting each body of the train and the gradient of cutting slope basically is the four cubed relation.


2013 ◽  
Vol 760-762 ◽  
pp. 320-324
Author(s):  
Shi Lei Zhou ◽  
Ya Lin Guan ◽  
Xin Kun Tang

High-speed signal connector has become a key factor of the signal transmission quality in telecommunications and data communications system. Signal integrity of connector is an inevitable problem. This paper based on the theory of differential transmission lines and Multimode S-Parameters, analyzed the USB3.0 connector signal integrity. And use 3D simulation software CST to build model and analyze the relationship of signal integrity and connectors geometry.


2020 ◽  
Vol 20 (2) ◽  
pp. 108-115
Author(s):  
R Gimazov ◽  
G Bulatova

Aim. The article aims to achieve the accuracy of space-time characteristics of a running step in 11–12-year-old schoolchildren. Materials and methods. The article provides a comparative analysis of the results of training and improving the running step in the control and experimental groups. For an objective instrumental assessment of the second stage of training, a structural phase biomechanical analysis of movements based on data from high-speed digital video recording with a frequency of 240 frames per second was used. Changes in the technique of the running step in schoolchildren were analyzed in the take-off phase (when the supporting leg pushed away from the surface of the treadmill), in the float phase and in the amortization phase. Methods of parametric and nonparametric statistics were used. Results. In schoolchildren from the experi­mental group, a statistically significant positive increase in the coefficients of the relationship of the angular characteristics of the running step with the model indicators of the American sprinter Ryan Bailey was achieved, which objectively reflects a significant increase in 30 meter running speed. Conclusion. Taking into account the natural rules of nervous system mechanisms made it possible to objectively increase the efficiency of running technique in the experimental group.


Wood Research ◽  
2021 ◽  
Vol 66 (2) ◽  
pp. 321-330
Author(s):  
Tianxing Zhang ◽  
Wengang Hu

The effect of tenon length and tenon width on withdrawal load capacity of mortise and tenon (M-T) joint was studied based on the finite element method (FEM), and the relationship of withdrawal load capacity relating to tenon length and tenon width was regressed using response surface method. The results showed that the tenon length and tenon width had remarkable effects on withdrawal load capacity of M-T joint T-shaped sample. The effect of tenon length on withdrawal load capacity was greater than tenon width. The regression equation used to predict the withdrawal load capacity was capable of optimizing the tenon sizes of M-T joint with R-square of 0.926. Using FEM can get more knowledge of M-T joint visually, and reduce the costs of materials and time of experiments.


Electrochem ◽  
2020 ◽  
Vol 1 (2) ◽  
pp. 200-216
Author(s):  
Micheal J. Lain ◽  
Irene Rubio Lopez ◽  
Emma Kendrick

Sulphur, boron and phosphorous containing electrolyte additives were evaluated in cells containing pristine electrodes from a commercial EV lithium ion cell against a standard baseline electrolyte. Following formation and a full cell ageing step, cycling performance and impedance spectroscopy were used to elucidate the most effective additives. The additive tris trimethyl silyl phosphite (TTSPi) showed the most promise; with improved cell capacities and reduced impedances observed after formation. X-ray photoelectron spectroscopy (XPS) measurements on anode elemental surface profiles were correlated with the electrochemical performance. It was observed that increased lithium fluoride content on the surface of the anodes typically produced cells with lower impedance. Sulphur containing additives also showed improved cell behaviours; and the decomposition and chemical reactions of these compounds at the anode surface is discussed in detail. The main influence of TTSPi was to reduce the amount of oxygen (C=O) and sulphur in the electrolyte interphase (SEI) layer; to be replaced with hydrocarbons.


2013 ◽  
Vol 639-640 ◽  
pp. 155-159
Author(s):  
Xi Bing Hu ◽  
Da Chen ◽  
Guo Jing He

Base on the traditional assumption, beam-to-column minor axis connections are usually considered either as perfectly rigid or as nominally pinned. In fact, many researches show that beam-to-column minor axis connections are often semi-rigid, and their performance greatly effects the internal force, displacement, and ultimate bearing capacity of the steel frames, which cannot be neglected. Welded joint, one type of beam-to-column minor axis connections, which is widely used in the engineering practice is researched. The finite element method was used to analysis the relationship between the parameter variation and the rotational initial stiffness of the connections. The results can be used as a reference to the designs of steel frames.


2011 ◽  
Vol 204-210 ◽  
pp. 2057-2060
Author(s):  
Jian Ming Wang ◽  
Ai Hua Ao ◽  
Chang Sheng Qiao ◽  
Yu Zhong ◽  
Yuan Yuan Zhang

The sources of melanin and the sorts of melanin are introduced. New techniques for extraction and analysis of natural melanin were introduced. New analytical techniques are high performance liquid chromatography, high-speed countercurrent chromatography, high performance capillary electrophoresis and chromatography-mass spectrometry. The relationship of polyketide melanogenesis molecular biology to that of nonmelanin-producing pathways in a wide range of fungi and other organisms is discussed. The applications of melanin are introduced.


2015 ◽  
Vol 656-657 ◽  
pp. 712-718
Author(s):  
Thanh Son Le ◽  
Thien Binh Nguyen ◽  
Thanh Nam Nguyen ◽  
Huy Bich Nguyen ◽  
Huynh Lam Phan

Rice Color Sorter plays an important role in the postharvest rice processing assembly. The quality and price of rice export will be increased by using this machine for classifying finished-rice. This paper presents the designing, the slide–adjustment structure and the position of nozzles for a rice color sorter machine. Slides, nozzles and materials-catching slide are main factors in classifying-component of Rice Color Sorter. The relative positions of these factors will decide the accuracy and response-ability of identification process using the high speed CCD camera. Moreover, the relationship of parameters decides the relative distance between devices in classifying-component of Rice Color Sorter with a standard-work mode. It also gives suitable-adjustment-structures for Rice Color Sorter responding the best image-identifying-control module of CCD camera.


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