33.3: Source-Gated Transistors in Amorphous Silicon for Active Matrix Displays

2005 ◽  
Vol 36 (1) ◽  
pp. 1262 ◽  
Author(s):  
F. Balon ◽  
J. M. Shannon
Keyword(s):  
Amorphous Silicon ◽  
Active Matrix ◽  
Active Matrix Displays

Decoder-Type Gate Driver Circuits Fabricated with Amorphous Silicon Thin-Film Transistors for Active Matrix Displays

2011 ◽  
Vol 50 (3S) ◽  
pp. 03CC03 ◽  
Author(s):  
Tae-Wook Kim ◽  
Gyu-Tae Park ◽  
Byong-Deok Choi ◽  
MunPyo Hong ◽  
Jin-Nyoung Jang ◽  
...  
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Thin Film Transistors ◽  
Silicon Thin Film ◽  
Active Matrix ◽  
Active Matrix Displays ◽  
Gate Driver

High Deposition Rate Amorphous Silicon Solar Cells and Thin Film Transistors Using the Pulsed Plasma Pecvd Technique

1998 ◽  
Vol 507 ◽  
Author(s):  
Scott Morrison ◽  
Jianping Xi ◽  
Arun Madan
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Deposition Rate ◽  
Continuous Wave ◽  
Modulation Frequency ◽  
Thin Film Transistor ◽  
High Deposition Rate ◽  
Pulsed Plasma ◽  
Active Matrix ◽  
Active Matrix Displays

ABSTRACTThe pulsed plasma technique has been shown to increase the deposition rate without an increase in the particulate count in the plasma which is an important factor determining the yield of commercial products such as active matrix displays. In this paper, we report the deposition of amorphous silicon at deposition rates of up to 15 Å/sec, using a modulation frequency in the range of 1-100kHz. These materials have been incorporated into a simple p/i/n solar cell and thin film transistor (TFT) configurations. We report on the effect of the conversion efficiency as a function of the modulation frequency, which in turn is related to the deposition rate. We also report on the TFT performance with modulation frequency and compare the results with devices made under the conventional continuous wave PECVD plasma at 13.56MHz.

Decoder-Type Gate Driver Circuits Fabricated with Amorphous Silicon Thin-Film Transistors for Active Matrix Displays

2011 ◽  
Vol 50 (3) ◽  
pp. 03CC03 ◽  
Author(s):  
Tae-Wook Kim ◽  
Gyu-Tae Park ◽  
Byong-Deok Choi ◽  
MunPyo Hong ◽  
Jin-Nyoung Jang ◽  
...  
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Thin Film Transistors ◽  
Silicon Thin Film ◽  
Active Matrix ◽  
Active Matrix Displays ◽  
Gate Driver

A Fully Self-Aligned Amorphous Silicon Tft Technology for Large Area Image Sensors and Active-Matrix Displays

1998 ◽  
Vol 507 ◽  
Author(s):  
M J Powell ◽  
C Glasse ◽  
J E Curran ◽  
J R Hughes ◽  
I D French ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Amorphous Silicon ◽  
Doping Level ◽  
Field Effect ◽  
Channel Length ◽  
Image Sensors ◽  
Large Area ◽  
Active Matrix ◽  
New Process ◽  
Active Matrix Displays

ABSTRACTWe have developed a fully self-aligned amorphous silicon TFT technology, which is suitable for large area image sensors and active matrix displays. Self-alignment is achieved by defining the top nitride by back exposure and then forming source and drain contacts by ionimplantation and silicidation. We incorporate a low resistance gate metallisation process, by using Al metal, capped by Cr. We have compared the process of forming the silicide after the ion-implantation step, with a new process of forming the silicide first and then implanting through the formed silicide. We find a significant advantage to the latter method, where we can achieve a higher doping level and reduced contact resistance. We have therefore optimised our process based on this method. Transistor characteristics as a function of channel length for both methods show the improved contact resistance, obtained with the latter method. We obtain field effect mobilities of 0.7cm2V−1s−1, measured in the saturated region, for a channel length of 8μm.

High Retention-Time Nonvolatile Amorphous Silicon TFT Memory for Static Active Matrix OLED Display without Pixel Refresh

2019 ◽  
Vol 33 (5) ◽  
pp. 365-373
Author(s):  
Yifei Huang ◽  
Bahman Hekmatshoar ◽  
Sigurd Wagner ◽  
James Sturm
Keyword(s):  
Amorphous Silicon ◽  
Retention Time ◽  
Active Matrix ◽  
Oled Display
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