Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures

Sensors and Materials ◽

10.18494/sam.2016.1162 ◽

2016 ◽

Keyword(s):

Single Crystal ◽

Laser Treatment ◽

Single Crystal Silicon ◽

Fatigue Performance ◽

Crystal Silicon ◽

Silicon Microstructures

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Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.06jm03 ◽

2014 ◽

Vol 53 (6S) ◽

pp. 06JM03 ◽

Cited By ~ 4

Author(s):

Mohamed E. Mitwally ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata ◽

Sherif Sedky

Keyword(s):

Tensile Strength ◽

Single Crystal ◽

Laser Treatment ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Microstructures

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OS1513 Improvement of surface roughness and tensile strength of single crystal silicon microstructures using excimer laser treatment

The Proceedings of the Materials and Mechanics Conference ◽

10.1299/jsmemm.2014._os1513-1_ ◽

2014 ◽

Vol 2014 (0) ◽

pp. _OS1513-1_-_OS1513-2_

Author(s):

Toshiyuki TSUCHIYA ◽

Mohamed E. MITWALLY ◽

Yoshikazu HIRAI ◽

Osamu TABATA ◽

Sherif SEDKY

Keyword(s):

Surface Roughness ◽

Tensile Strength ◽

Single Crystal ◽

Laser Treatment ◽

Excimer Laser ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Microstructures

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Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement

Journal of Surface Engineered Materials and Advanced Technology ◽

10.4236/jsemat.2015.51004 ◽

2015 ◽

Vol 05 (01) ◽

pp. 28-41 ◽

Cited By ~ 1

Author(s):

Mohamed Elwi Mitwally ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata ◽

Sherif Sedky

Keyword(s):

Surface Roughness ◽

Single Crystal ◽

Laser Treatment ◽

Performance Improvement ◽

Mechanical Performance ◽

Single Crystal Silicon ◽

Free Standing ◽

Crystal Silicon ◽

Silicon Microstructures ◽

Krf Excimer Laser

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2836 Surface stress measurement of single crystal silicon microstructures using Raman spectroscopic uniaxial tensile testing

The proceedings of the JSME annual meeting ◽

10.1299/jsmemecjo.2007.1.0_727 ◽

2007 ◽

Vol 2007.1 (0) ◽

pp. 727-728

Author(s):

Yuji NAGAI ◽

Takahiro NAMAZU ◽

Nobuyuki NAKA ◽

Shinsuke KASHIWAGI ◽

Kunio OHTSUKI ◽

...

Keyword(s):

Single Crystal ◽

Surface Stress ◽

Tensile Testing ◽

Stress Measurement ◽

Single Crystal Silicon ◽

Uniaxial Tensile ◽

Crystal Silicon ◽

Raman Spectroscopic ◽

Uniaxial Tensile Testing ◽

Silicon Microstructures

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Elastic moduli, strength, and fracture initiation at sharp notches in etched single crystal silicon microstructures

Journal of Applied Physics ◽

10.1063/1.369711 ◽

1999 ◽

Vol 85 (7) ◽

pp. 3519-3534 ◽

Cited By ~ 73

Author(s):

Wan Suwito ◽

Martin L. Dunn ◽

Shawn J. Cunningham ◽

David T. Read

Keyword(s):

Single Crystal ◽

Elastic Moduli ◽

Single Crystal Silicon ◽

Fracture Initiation ◽

Crystal Silicon ◽

Silicon Microstructures

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OS1418-467 Dynamic stress measurement of single crystal silicon microstructures using micro Raman spectroscopy

The Proceedings of the Materials and Mechanics Conference ◽

10.1299/jsmemm.2015._os1418-46 ◽

2015 ◽

Vol 2015 (0) ◽

pp. _OS1418-46-_OS1418-46

Author(s):

Toshiyuki TSUCHIYA ◽

Yusuke KOGITA ◽

Yoshikazu HIRAI ◽

Osamu TABATA

Keyword(s):

Raman Spectroscopy ◽

Single Crystal ◽

Dynamic Stress ◽

Stress Measurement ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Micro Raman Spectroscopy ◽

Silicon Microstructures

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Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °C of (110) Single Crystal Silicon Microstructures

Procedia Structural Integrity ◽

10.1016/j.prostr.2016.06.179 ◽

2016 ◽

Vol 2 ◽

pp. 1413-1420 ◽

Cited By ~ 1

Author(s):

Akio Uesugi ◽

Yoshikazu Hirai ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Silicon Microstructures ◽

Crystallographic Orientations

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Mechanical properties of boron-doped single-crystal silicon microstructures

10.1117/12.361222 ◽

1999 ◽

Cited By ~ 1

Author(s):

Michael W. Putty ◽

Shih-Chia Chang

Keyword(s):

Mechanical Properties ◽

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Boron Doped ◽

Silicon Microstructures

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Post-CMOS process for high-aspect-ratio monolithically integrated single crystal silicon microstructures

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497275 ◽

2005 ◽

Cited By ~ 1

Author(s):

Yong Zhu ◽

Guizhen Yan ◽

Jie Fan ◽

Xuesong Liu ◽

Jian Zhou ◽

...

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Cmos Process ◽

Crystal Silicon ◽

Monolithically Integrated ◽

Silicon Microstructures

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