Vibration Analysis and Evaluation of Piezoelectric Micromachined Ultrasonic Transducers Using Epitaxial Pb(Zr, Ti)O3 Thin Film
2010 ◽
Vol 163-167
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pp. 36-43
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2012 ◽
Vol 605-607
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pp. 1164-1167
Keyword(s):
2012 ◽
Vol 51
(11S)
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pp. 11PA04
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Keyword(s):
2007 ◽
Vol 54
(10)
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pp. 2165-2174
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Keyword(s):
2012 ◽
Vol 54
(2)
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pp. 68-71
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