Characterization and application of piezoelectric microcantilever sensors fabricated from substrate-free PMN-PT layers

2021 ◽  
Author(s):  
Qing Zhu
Keyword(s):  
Microcantilever Sensors ◽  
Piezoelectric Microcantilever

scholarly journals A Rapid Method to Regenerate Piezoelectric Microcantilever Sensors (PEMS)

Sensors ◽  
2011 ◽  
Vol 11 (5) ◽  
pp. 5520-5528 ◽  
Author(s):  
LiNa Loo ◽  
Wei Wu ◽  
Wan Y. Shih ◽  
Wei-Heng Shih ◽  
Hossein Borghaei ◽  
...  
Keyword(s):  
Rapid Method ◽  
Microcantilever Sensors ◽  
Piezoelectric Microcantilever

Manufacture of Microcantilever Sensors

2005 ◽  
Author(s):  
Andrew W. McFarland ◽  
Jonathan S. Colton ◽  
Daniel Cox ◽  
Steven Y. Liang
Keyword(s):  
Machine Tool ◽  
Mechanical Response ◽  
Surface Force ◽  
Depth Of Cut ◽  
Feed Speed ◽  
Machining Parameters ◽  
Form Accuracy ◽  
Microcantilever Sensors ◽  
Micro Scale ◽  
Sensing Applications

Mechanical micro machining is an emerging technology with many potential benefits and equally great challenges. The push to develop processes and tools capable of micro scale fabrication is a result of the widespread drive to reduce part and feature size. One important factor that contributes to the ability to machine at the microscale level is the overall size of the machine tool due to the effects of thermal, static, and dynamic stabilities. This paper explores the technical feasibility of miniaturized machine tools capable of fabricating features and parts on the micro scale in terms of depth of cut and part form accuracy. It develops a machine tool and examines its capabilities through benchmarking tests and the making of precision dies for the injection molding of microcantilever parts. The design and configuration of a miniaturized vertical machining center of overall dimension less than 300 mm on a side is presented and the component specifications discussed. The six axis machine has linear positioning resolution of 4 nm by 10 nm by 10 nm, with accuracy on the order of 0.3 μm, in the height, feed, and cross feed directions. The work volume as defined by the ranges of axes travel are 4 mm by 25 mm by 25 mm in the height, feed, and cross feed and 20 degrees in the rotational space. To quantify the performance capability of the miniaturized machine tool as a system, a series of evaluation tests were implemented based on linear and arch trajectories over a range of feed speed and depth of cut conditions. Test results suggest that micro level form accuracy and sub-micron level finish are generally achievable for parts with moderate curvature and gradient in the geometry under selected machining parameters and conditions. An injection mold was made of steel with this machine and plastic microcantilevers fabricated. Plastic microcantilevers are appropriate for sensing applications such as surface probe microscopy. The microcantilevers, made from polystyrene, were 464 to 755 μm long, 130 μm wide and only 6–9 μm thick. They showed very good uniformity, reproducibility, and appropriate mechanical response for use as sensors in surface force microscopy.

Label-free detection of amyloid growth with microcantilever sensors

2008 ◽  
Vol 19 (38) ◽  
pp. 384007 ◽  
Author(s):  
Tuomas P J Knowles ◽  
Wenmiao Shu ◽  
François Huber ◽  
Hans Peter Lang ◽  
Christoph Gerber ◽  
...  
Keyword(s):  
Label Free ◽  
Microcantilever Sensors ◽  
Label Free Detection

Modified Model for Static Behavior of Microcantilever Gas Sensor Adsorbed with Monolayer Molecules

2011 ◽  
Vol 415-417 ◽  
pp. 455-459
Author(s):  
Xiao Ming Wang ◽  
Fei Wang ◽  
Xue Zeng Zhao ◽  
Da Lei Jing
Keyword(s):  
Young’S Modulus ◽  
Young's Modulus ◽  
Curvature Radius ◽  
Static Behavior ◽  
Neutral Layer ◽  
Modified Model ◽  
Adsorbed Molecules ◽  
Microcantilever Sensors ◽  
The Relationship ◽  
Layer Position

The modified static bending model of microcantilever with monolayer molecules has been established based on energy method, in which the change in neutral layer position caused by adsorption-induced stress has been considered. On this basis, we have analyzed the relationship between the bending curvature radius of a microcantilever with its thickness, Young’s modulus and molecule-molecule distance of adsorbed molecules when it is adsorbed with monolayer water molecules. Additionally, we have investigated the effect of change in neutral layer position on the static behavior of microcantilever sensors and have found that: 1) the bending curvature radius of microcantilever is affected by its Young’s modulus, thickness and distance of adsorbed molecules respectively; 2)the predicted error of bending curvature radius caused by the change in neutral layer position slightly increases with decreasing Young’s modulus and thickness, whereas the effect of distance between adsorbed molecules on the error is significant.

Detection of 2,4-dinitrotoluene using microcantilever sensors

2004 ◽  
Vol 99 (2-3) ◽  
pp. 223-229 ◽  
Author(s):  
L.A Pinnaduwage ◽  
T Thundat ◽  
J.E Hawk ◽  
D.L Hedden ◽  
P.F Britt ◽  
...  
Keyword(s):  
Microcantilever Sensors
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