scholarly journals Ethanol chemical vapor deposition process design for selective growth of vertically-aligned single-walled carbon nanotubes

2011 ◽  
Author(s):  
Hatem Mansour Abuhimd
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Process Design ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Single Walled Carbon Nanotubes ◽  
Deposition Process ◽  
Selective Growth ◽  
Vertically Aligned ◽  
Walled Carbon Nanotubes

High-Yield Synthesis of Vertically Aligned Single-Walled Carbon Nanotubes in Ion-Damage and Radical-Damage Free Atmospheric Pressure PECVD

2007 ◽  
Vol 1057 ◽  
Author(s):  
Tomohiro Nozaki ◽  
Kuma Ohnishi ◽  
Ken Okazaki
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Chemical Vapor ◽  
Single Walled Carbon Nanotubes ◽  
Ion Damage ◽  
Vertically Aligned ◽  
Walled Carbon Nanotubes ◽  
Radical Damage

ABSTRACTPlasma-enhanced chemical vapor deposition (PECVD) is recognized as one of the viable fabrication techniques of carbon nanotubes (CNTs). However, “CNTs” synthesized in low-pressure PECVD is overwhelmingly carbon nanofibers or multi-walled carbon nanotubes because catalyst and CNTs receive severe damage from ion bombardment: single-walled carbon nanotubes (SWCNTs) has been exclusively synthesized in the thermal CVD regime except few examples. We present atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD) for high-purity vertically-aligned SWCNT synthesis, because both ion-damage and radical-damage are preferentially avoided in atmospheric pressure. Tentative reaction mechanism is also discussed based gas phase chemistry analyzed by quadrupole mass spectrometer.

Process Design for the Flow of Ethanol Chemical Vapor Deposition Grown Vertically Aligned Single Walled Carbon Nanotubes

2012 ◽  
Author(s):  
Hatem Abuhimd ◽  
Abe Zeid ◽  
Yung Joon Jung ◽  
Sagar Kamarthi
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Flow Rate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Single Walled Carbon Nanotubes ◽  
Growth Time ◽  
Single Walled Carbon ◽  
Vertically Aligned ◽  
Walled Carbon Nanotubes

Carbon nanotubes (CNTs) have received much attention from both the scientific and industrial communities due to their structural properties and unique morphology. There has also been growing interest in vertically aligned single walled carbon nanotubes (VA-SWNTs) because of their suitability for building devices such as solar cells and nanomembrane. Various methods including chemical vapor deposition (CVD) have been developed for growing VA-SWNTs. Among them is alcohol catalytic CVD which is well known for its economic viability, comprehensive substrates selectivity and good yield of VA-SWNTs. This work studies the length assurance of VA-SWNTs growth by an experimental design and an artificial neural network (ANN) metamodel. Process analysis shows that the interaction between gas flow rate and growth time are the most significant input factors. In addition, with high probability flow rate less than 150 sccm and a growth time of 20 minutes are suitable for the repeatability of medium length VA-SWNTs.

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