Visual Investigation of the Radial Energy Distribution of the Ions Produced by a Low Pressure Saddle Field Ion Source

2000 ◽  
Vol 5 (1) ◽  
pp. 37-42
Author(s):  
Aras S. Mahmood ◽  
Keyword(s):  
Energy Distribution ◽  
Low Pressure ◽  
Ion Source

Ammonia in the Ion-Source. III. Clustering With N-Oxides, Sulfoxides and Sulfones

1986 ◽  
Vol 39 (12) ◽  
pp. 2161 ◽  
Author(s):  
RG Gillis
Keyword(s):  
Chemical Ionization ◽  
Low Pressure ◽  
Ion Source ◽  
Unimolecular Decomposition ◽  
Positive Ion

Under positive ion chemical ionization conditions, with ammonia as reagent gas at relatively low pressure, N-oxides, sulfoxides and sulfones form clusters with a proton and one or more ammonia molecules; these clusters can be represented as [M+H]+, [M+NH4]+, [M+N2H7]+, [2M+H]+ and [2M+NH4]+. The unimolecular decomposition of the clusters can be followed by the accompanying metastable peaks.

Study on the energy distribution of ion beams extracted from the sputter-type negative-ion source

1996 ◽  
Author(s):  
Junzo Ishikawa ◽  
Hiroshi Tsuji ◽  
Takashi Takatori ◽  
Yasuhito Gotoh
Keyword(s):  
Energy Distribution ◽  
Ion Beams ◽  
Ion Source ◽  
Negative Ion

Space Potential and Ion Energies in a Low Pressure Discharge Containing at least Two Negative Species

1988 ◽  
Vol 117 ◽  
Author(s):  
S G Ingram ◽  
N St J Braithwaite
Keyword(s):  
Energy Distribution ◽  
Collisionless Plasma ◽  
Negative Ions ◽  
Potential Drop ◽  
Low Pressure ◽  
Type Model ◽  
Plasma Parameters ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Positive Ion

AbstractA Tonks-Langmuir type model for a one-dimensional low pressure (collisionless) plasma containing at least two species of Maxwellian negative charge carriers is examined. The solutions of this model yield the positive ion energy distribution at the sheath edge without needing to specify the ionization process. This distribution has a width consistent with the potential drop across the plasma, and is shown to satisfy the generalised Bohm criterion for sheath formation. However by assuming a form for the ionization rate in the plasma, the potential profile across the discharge has been calculated. It has been found that for a range of plasma parameters the solution for the potential at which quasineutrality fails becomes triple valued; the physical solution in this regime is identified.Many plasmas used for materials processing contain negative ions. It is important to understand how these ions influence the positive ion energy distribution at the substrate where the processing occurs.This work is also of relevance to the behaviour of Langmuir probes in electronegative plasmas.

scholarly journals Energy distribution of the compact microwave ion source for extremely low voltage ion extraction

2002 ◽  
Vol 73 (2) ◽  
pp. 758-760 ◽  
Author(s):  
Y. Gotoh ◽  
K. Nakajima ◽  
T. Hagiwara ◽  
H. Tsuji ◽  
J. Ishikawa
Keyword(s):  
Energy Distribution ◽  
Low Voltage ◽  
Ion Source ◽  
Ion Extraction ◽  
Microwave Ion Source
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