Piezoelectric Multilayer Actuators for Nanopositioning Systems
Keyword(s):
1996 ◽
Keyword(s):
2017 ◽
Vol 40
(4)
◽
pp. 759-771
◽
2020 ◽
Vol 117
(25)
◽
pp. 14602-14608
◽
1996 ◽
Vol 44
(5)
◽
pp. 751-769
◽