A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer
2015 ◽
Vol 16
(6)
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pp. 497-510
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2013 ◽
Vol 569-570
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pp. 1132-1139
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1999 ◽
Vol 106
(4)
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pp. 2256-2256
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2019 ◽
Vol 33
(12)
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pp. 1950112
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2014 ◽
Vol 136
(4)
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Keyword(s):