Gas Phase Reactions in Horizontal MOCVD Reactors
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ABSTRACTWe have applied kinetic simulation to MOCVD chemistry in a horizontal MOCVD reactor. Both chemical reactions and material diffusion are considered. For trimethylgallium decomposition, concentrations of chemical species reach their steady state values which differ largely from the equilibrium values.
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1987 ◽
Vol 120
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pp. 273-274
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2018 ◽
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pp. 1231-1239
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1988 ◽
Vol 93
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pp. 115-119
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2018 ◽
1993 ◽
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pp. 5298-5304
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pp. 159-171
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1996 ◽
Vol 18
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pp. 141-157
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