The Initial Stages of Silicide Epitaxy - Nucleation and Morphology

1987 ◽  
Vol 94 ◽  
Author(s):  
R. J. Nemanich ◽  
C. M. Doland ◽  
F. A. Ponce

ABSTRACTThe initial stages of epitaxial silicide formation are described in terms of the nucleation properties. The reaction process is divided into the stages of interdiffusion, nucleation, and growth and coalescence. The aspects of the nucleation from the interdiffused regions are described. Results are presented for Pd and Pt deposited on clean Si surfaces. The initial thickness where silicide compound formation is observed is related to he critical cluster size of the nucleation model. The epitaxial morphology can be strongly influenced by heterogeneous nucleation involving the substrate interface, and this effect is demonstrated by reaction with metal overlayers less than the critical thickness.

2006 ◽  
Vol 979 ◽  
Author(s):  
J. B. Choi ◽  
Min H. Choi ◽  
U.-J. Chung ◽  
A. B. Limanov ◽  
James S. Im

AbstractWe have investigated excimer laser irradiation of 2000-Å-thin as-deposited Al films on SiO2. Microstructural analysis of the irradiated films conducted with AFM and EBSD techniques reveals that there exists a wide energy density interval over which large equaxed grains with a strong (111) texture are obtained. Based on thermal, transformational, and microstructural considerations, we propose a heterogeneous nucleation model to account for the observed behaviors, and discuss the implication of the model on the phenomenon of heterogeneous nucleation of crystalline solids in condensed systems as regards the thermodynamic role played by the orientation of subcritical clusters.


2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Artur Tuktamyshev ◽  
Alexey Fedorov ◽  
Sergio Bietti ◽  
Stefano Vichi ◽  
Riccardo Tambone ◽  
...  

AbstractWe investigated the nucleation of Ga droplets on singular GaAs(111)A substrates in the view of their use as the seeds for the self-assembled droplet epitaxial quantum dots. A small critical cluster size of 1–2 atoms characterizes the droplet nucleation. Low values of the Hopkins-Skellam index (as low as 0.35) demonstrate a high degree of a spatial order of the droplet ensemble. Around $$350\,^{\circ }\hbox {C}$$ 350 ∘ C the droplet size distribution becomes bimodal. We attribute this observation to the interplay between the local environment and the limitation to the adatom surface diffusion introduced by the Ehrlich–Schwöbel barrier at the terrace edges.


1991 ◽  
Vol 136 (3) ◽  
pp. 181-197 ◽  
Author(s):  
J. Bartels ◽  
U. Lembke ◽  
R. Pascova ◽  
J. Schmelzer ◽  
I. Gutzow

2013 ◽  
Vol 740-742 ◽  
pp. 393-396
Author(s):  
Maxim N. Lubov ◽  
Jörg Pezoldt ◽  
Yuri V. Trushin

The influence of attractive and repulsive impurities on the nucleation process of the SiC clusters on Si(100) surface was investigated. Kinetic Monte Carlo simulations of the SiC clusters growth show that that increase of the impurity concentration (both attractive and repulsive) leads to decrease of the mean cluster size and rise of the nucleation density of the clusters.


2017 ◽  
Author(s):  
Maja Tomicic ◽  
Martin Bødker Enghoff ◽  
Henrik Svensmark

Abstract. One hundred and ten direct measurements of aerosol nucleation rate at high ionization levels were performed in an 8 m3 reaction chamber. Neutral and ion-induced particle formation from sulphuric acid (H2SO4) as a function of ionization and H2SO4 concentration was studied. Other species that could participate in the nucleation were not measured. The measurements extend the parameter space of measurements described by (Dunne, 2016) (at T = 295 K and RH = 38 %) by expanding to lower H2SO4 concentrations (4x106–3x107 cm−3) and higher ion concentrations (1700–19000 cm−3). The ion concentrations, which correspond to levels caused by a nearby supernova, were achieved with gamma ray sources. Nucleation rates were directly measured with a particle size magnifier (PSM Airmodus A10) at a size close to critical cluster size (mobility diameter of ~ 1.4 nm) and formation rates at mobility diameter of ~ 4 nm were measured with a CPC (TSI model 3775). The measurements show that nucleation increases by around a factor of five when the ionization increases from background to supernova levels under fixed gas conditions. The results expand the parametrization from (Dunne, 2016) to lower sulphuric acid concentrations and higher ion concentrations.


1983 ◽  
Vol 78 (1) ◽  
pp. 420-423 ◽  
Author(s):  
Richard C. Ward ◽  
Barbara N. Hale ◽  
Sergio Terrazas

2021 ◽  
Vol 21 (10) ◽  
pp. 5828-5839
Author(s):  
Ke Yuan ◽  
Vitalii Starchenko ◽  
Nikhil Rampal ◽  
Fengchang Yang ◽  
Xiaogang Yang ◽  
...  

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