Properties and Effects of Laser-Induced Plasma During Evaporative Deposition of Thin Films
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ABSTRACTThe properties of plasmas generated by the interaction of a pulsed CO2 laser with several solid evaporation targets were studied and the films deposited from such plasmas were characterized. A large flux (˜ 1014/cm2/s) of ions at high velocities (2 − 10 × 106 cm/s) was measured in these plasmas. ZrO2 thin films deposited by laser-assisted evaporation on room temperature substrates had crystalline-oriented structures. Low optical absorption and high refractive index values (2.15 at 632.8 nm) indicated the stoichiometric and dense nature of these films.
2014 ◽
Vol 71
(1)
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pp. 129-135
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2008 ◽
Vol 62
(15)
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pp. 2249-2252
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1977 ◽
Vol 16
(5)
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pp. 843-844
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2006 ◽
Vol 102
(2)
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pp. 1631-1636
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