Correlation of Defects on Dielectric Surfaces with Large Particle Counts in Chemical-Mechanical Planarization (CMP) Slurries Using a New Single Particle Optical Sensing (SPOS) Technique

2005 ◽  
Vol 867 ◽  
Author(s):  
Edward E. Remsen ◽  
Sriram P. Anjur ◽  
David Boldridge ◽  
Mungai Kamiti ◽  
Shoutian Li
Keyword(s):  
Single Particle ◽  
Large Particle ◽  
Optical Sensing ◽  
Chemical Mechanical Planarization ◽  
Polystyrene Latex ◽  
Equivalent Diameter ◽  
Surface Films ◽  
General Applicability ◽  
Particle Count ◽  
Dual Sensor

AbstractA dual-sensor single particle optical sensing method (SPOS) is described for the measurement of the large particle count (LPC) in fumed silica polishing slurries. LPC values were expressed on a silica sphere-equivalent diameter scale rather than a polystyrene latex-equivalent size basis. Linear correlations between LPC and scratch counts on SiO2 surface films for wafers polished under clean room and table-top CMP conditions are demonstrated. However, these correlations were obtained for a limited set of model slurries; and further investigation will be needed to assess the general applicability of dual-sensor SPOS for oxide scratch defect prediction in CMP slurries.

New Particle Metrology for CMP Slurries

2007 ◽  
Vol 991 ◽  
Author(s):  
Kim Williams ◽  
Ilyong Park ◽  
Edward E. Remsen ◽  
Mansour Moinpour
Keyword(s):  
Flow Field ◽  
Large Particle ◽  
Colloidal Silica ◽  
Polystyrene Latex ◽  
Particle Sizing ◽  
Field Flow Fractionation ◽  
Counting Method ◽  
Dual Sensor ◽  
Different Diameters ◽  
Further Development

ABSTRACTA new particle sizing and counting method based on the coupling of flow field-flow fractionation (FFF) with dual-sensor, single particle optical sensing (SPOS) detection is reported. The integration of FFF and SPOS systems was accomplished by means of a dilution interface that preserved the resolution of FFF-separated particles. Analysis of a model mixture of polystyrene latex standards of different diameters established that the FFF-SPOS system can resolve particles into discrete peaks for subsequent particle counting. Application of this method for the analysis of a colloidal silica standard demonstrated its use for materials commonly employed as CMP abrasives. Further development and refinement of the technique will enable compositional and structural analyses of heterogeneous large particle populations constituting commercial CMP slurries.

Measurement of the Lorenz-mie scattering of a single particle: Polystyrene latex

1970 ◽  
Vol 34 (1) ◽  
pp. 159-162 ◽  
Author(s):  
David T Phillips ◽  
Philip J Wyatt ◽  
Richard M Berkman
Keyword(s):  
Single Particle ◽  
Mie Scattering ◽  
Polystyrene Latex

scholarly journals Cluster analysis of WIBS single-particle bioaerosol data

2013 ◽  
Vol 6 (2) ◽  
pp. 337-347 ◽  
Author(s):  
N. H. Robinson ◽  
J. D. Allan ◽  
J. A. Huffman ◽  
P. H. Kaye ◽  
V. E. Foot ◽  
...  
Keyword(s):  
Time Series ◽  
Cluster Analysis ◽  
Single Particle ◽  
Fungal Spores ◽  
Polystyrene Latex ◽  
Data Sets ◽  
Forest Site ◽  
Fluorescence Measurements ◽  
Concentration Time ◽  
Concentration Time Series

Abstract. Hierarchical agglomerative cluster analysis was performed on single-particle multi-spatial data sets comprising optical diameter, asymmetry and three different fluorescence measurements, gathered using two dual Wideband Integrated Bioaerosol Sensors (WIBSs). The technique is demonstrated on measurements of various fluorescent and non-fluorescent polystyrene latex spheres (PSL) before being applied to two separate contemporaneous ambient WIBS data sets recorded in a forest site in Colorado, USA, as part of the BEACHON-RoMBAS project. Cluster analysis results between both data sets are consistent. Clusters are tentatively interpreted by comparison of concentration time series and cluster average measurement values to the published literature (of which there is a paucity) to represent the following: non-fluorescent accumulation mode aerosol; bacterial agglomerates; and fungal spores. To our knowledge, this is the first time cluster analysis has been applied to long-term online primary biological aerosol particle (PBAP) measurements. The novel application of this clustering technique provides a means for routinely reducing WIBS data to discrete concentration time series which are more easily interpretable, without the need for any a priori assumptions concerning the expected aerosol types. It can reduce the level of subjectivity compared to the more standard analysis approaches, which are typically performed by simple inspection of various ensemble data products. It also has the advantage of potentially resolving less populous or subtly different particle types. This technique is likely to become more robust in the future as fluorescence-based aerosol instrumentation measurement precision, dynamic range and the number of available metrics are improved.

Accuracy Improvements in LPC Measurements for CMP Slurries

2009 ◽  
Vol 1157 ◽  
Author(s):  
Bruno Tolla ◽  
David Boldridge
Keyword(s):  
Analytical Method ◽  
Large Particle ◽  
Current Method ◽  
Particle Count ◽  
Accuracy And Precision

AbstractWe have examined the Large Particle Count (LPC) analytical method to see whether there are opportunities to improve both the accuracy and precision in hope of improving the utility of the LPC measurement. We have identified weaknesses in the current method that limit both its accuracy and its precision, and which can introduce count errors in excess of a factor of 10. We propose modifications to the current method which result in both accuracy and precision improvements. We recommend these improvements as absolutely necessary for any experiments designed to test the correlation between LPC and defectivity.

scholarly journals Technical note: Measurement of chemically-resolved volume equivalent diameter and effective density of particles by AAC-SPAMS

2020 ◽  
Author(s):  
Long Peng ◽  
Lei Li ◽  
Guohua Zhang ◽  
Xubing Du ◽  
Xinming Wang ◽  
...  
Keyword(s):  
Particle Size ◽  
Particle Density ◽  
Global Climate ◽  
Physical Property ◽  
Intrinsic Property ◽  
Technical Note ◽  
Polystyrene Latex ◽  
Effective Density ◽  
Equivalent Diameter ◽  
Aerodynamic Diameter

Abstract. Size and effective density (ρe) are important properties of aerosol particles and are related to their influences on human health and the global climate. The volume equivalent diameter (Dve) is an intrinsic property that is used to evaluate particle size. ρe, defined as the ratio of particle density to a dynamic shape factor (χ), is used to characterize the physical property of a particle as an alternative to particle density. However, it is still challenging to simultaneously characterize the Dve and ρe of particles. Here, we present a novel system that classifying particles with their aerodynamic diameter (Da) by aerodynamic aerosol classifiers (AAC) and determining their vacuum aerodynamic diameter (Dva) by single particle aerosol mass spectrometry (SPAMS) to achieve a measurement of Dve and ρe. The reliability of the AAC-SPAMS system for accurately obtaining Dve and ρe is verified based on the results that the deviation between the measured values and the theoretical values is less than 4 % for the size-resolved spherical polystyrene latex (PSL). The AAC-SPAMS system is applied to characterize the Dve and ρe of (NH4)2SO4 and NaNO3 particles, suggesting that these particles are aspherical and their ρe are independent of particle size. Finally, the AAC-SPAMS system is deployed in a field measurement, showing that it is a powerful technique to characterize the chemically-resolved Dve and ρe of particles in real time.

Electrochemical Studies of Copper Chemical Mechanical Polishing Mechanism: Effects of Oxidizer Concentration

2003 ◽  
Vol 767 ◽  
Author(s):  
J. Lu ◽  
J.E. Garland ◽  
C.M. Petite ◽  
S.V. Babu ◽  
D. Roy
Keyword(s):  
Electrochemical Impedance ◽  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Electrochemical Techniques ◽  
Copper Surface ◽  
Ex Situ ◽  
Surface Films ◽  
Copper Disk ◽  
Dissolution Tests ◽  
Oxidizer Concentration

AbstractThe process of copper chemical-mechanical planarization (CMP) can be considered as an erosion corrosion process. Such a process can be efficiently studied by in situ and ex situ electrochemical techniques, such as potentiodynamic scan and electrochemical impedance spectroscopy (EIS). Using a copper disk as the working electrode in an electrochemical cell, slurries with different oxidizer concentrations have been investigated with the aforementioned techniques. Corresponding dissolution tests were also studied and compared. It is shown that changing the oxidizer concentration leads to the formation of surface films with different structure and composition on the copper surface during CMP process. The nature of these films controls the rate of copper corrosion. These results could be used to explain the change of copper removal rate in different oxidizer concentration, as well as to understand the copper CMP mechanism.

scholarly journals Development and characterization of a single particle laser ablation mass spectrometer (SPLAM) for organic aerosol studies

2011 ◽  
Vol 4 (4) ◽  
pp. 4165-4208
Author(s):  
F. Gaie-Levrel ◽  
S. Perrier ◽  
E. Perraudin ◽  
C. Stoll ◽  
N. Grand ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Detection Limit ◽  
Mass Spectrometer ◽  
Single Particle ◽  
Detection Efficiency ◽  
Linear Time ◽  
Scattered Light ◽  
Optical Detection ◽  
Organic Aerosol ◽  
Polystyrene Latex

Abstract. A single particle instrument has been developed for real-time analysis of organic aerosols. This instrument, named Single Particle Laser Ablation Mass Spectrometry (SPLAM), samples particles using an aerodynamic lens system for which the theoretical performances were calculated. At the outlet of this system, particle detection and sizing are realized using two continuous diode lasers operating at λ = 403 nm. Polystyrene Latex (PSL), sodium chloride (NaCl) and dioctylphtalate (DOP) particles were used to characterize and calibrate optical detection of SPLAM. The optical detection limit (DL) and detection efficiency (DE) were determined using size-selected DOP particles. The DE is ranging from 0.1 to 90 % for 100 and 350 nm DOP particles respectively and the SPLAM instrument is able to detect and size-resolve particles as small as 110–120 nm. Scattered light is detected by two photomultipliers and the detected signals are used to trigger a UV excimer laser (λ = 248 nm) used for laser desorption ionization (LDI) of individual aerosol particles. The formed ions are analyzed by a 1 m linear time-of-flight mass spectrometer in order to access to the chemical composition of individual particles. The TOF-MS detection limit for gaseous aromatic compounds was determined to be 0.85 attograms. DOP particles were also used to test the overall functioning of the instrument. The analysis of a secondary organic aerosol, formed in a smog chamber by the ozonolysis of indene, is presented as a first scientific application of the instrument. Single particle mass spectra are obtained with a global hit rate of 10 %. They are found to be very different from one particle to another, reflecting chemical differences of the analyzed particles, and most of the detected mass peaks are attributed to oxidized products of indene.

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