Double-layered Structure of Surface Modification of Low-k Dielectrics Induced by He Plasma

2005 ◽  
Vol 863 ◽  
Author(s):  
Ken-Ichi Yanai ◽  
Tadayoshi Hasebe ◽  
Kouji Sumiya ◽  
Seiki Oguni ◽  
Kazuhiro Koga

AbstractSurface modification of a p-SiOC film induced by Helium (He) plasma was investigated using various measurements. Differential Fourier transform infrared absorption (FT-IR) spectra and the etch-depth measurements with the immersion in the mixed hydrofluoric acid (HF) indicate that the almost all of Si-CH3 bonds are broken in the modification layer, resulting in carbon-depletion, an SiO2-like composition. The x-ray photoelectron spectroscopy (XPS) measurements at different take-off angles reveal that the modified surface forms a double-layered structure, a thin carbon-rich top layer (about 1 nm thick) on a thick carbon-depletion layer (about 20 nm thick) with the irradiation of He plasma over 300 W. Atomic force microscopy (AFM) observations show that the modified surface is the smoothest in the case of the carbon-depletion surface.

Polymers ◽  
2020 ◽  
Vol 12 (9) ◽  
pp. 2008
Author(s):  
Hsiu-Wen Chien ◽  
Hong-Yu Lin ◽  
Chau-Yi Tsai ◽  
Tai-Yu Chen ◽  
Wei-Nian Chen

Superhydrophilic coatings have been widely used for the surface modification of membranes or biomedical devices owing to their excellent antifouling properties. However, simplifying the modification processes of such materials remains challenging. In this study, we developed a simple and rapid one-step co-deposition process using an oxidant trigger to fabricate superhydrophilic surfaces based on dopamine chemistry with sulfobetaine methacrylate (SBMA). We studied the effect of different oxidants and SBMA concentrations on surface modification in detail using UV–VIS spectrophotometry, dynamic light scattering, atomic force microscopy, X-ray photoelectron spectroscopy, and surface plasmon resonance. We found that NaIO4 could trigger the rate of polymerization and the optimum ratio of dopamine to SBMA is 1:25 by weight. This makes the surface superhydrophilic (water contact angle < 10°) and antifouling. The superhydrophilic coating, when introduced to polyester membranes, showed great potential for oil/water separation. Our study provides a complete description of the simple and fast preparation of superhydrophilic coatings for surface modification based on mussel-inspired chemistry.


2015 ◽  
Vol 1726 ◽  
Author(s):  
Patrizia Minutolo ◽  
Mario Commodo ◽  
Gianluigi De Falco ◽  
Rosanna Larciprete ◽  
Andrea D'Anna

ABSTRACTIn this work we produce atomically thin carbon nanostructures which have a disk-like shape when deposited on a substrate. These nanostructures have intermediate characteristics between a graphene island and a molecular compound and have the potentiality to be used either as they are, or to become building blocks for functional materials or to be manipulated and engineered into composite layered structures.The carbon nanostructures are produced in a premixed ethylene/air flame with a slight excess of fuel with respect to the stoichiometric value. The size distribution of the produced compounds in aerosol phase has been measured on line by means of a differential mobility analyzer (DMA) and topographic images of the structures deposited on mica disks were obtained by Atomic Force Microscopy. Raman spectroscopy and XPS have been used to characterize their structure and the electronic and optical properties were obtained combining on-line photoionization measurements with Cyclic Voltammetry, light absorption and photoluminescence.When deposited on the mica substrate the carbon compounds assume the shape of an atomically thin disk with in plane diameter of about 20 nm. Carbon nano-disks consist of a network of small aromatic island with in plane length, La, of about 1 nm. Raman spectra evidence a significant amount of disorder which is in a large part due to the quantum confinement in the aromatic islands. Nano-disks contain small percentage of sp3 and the O/C ratio is lower than 6%. They furthermore present interesting UV and visible photoluminescence properties.


2007 ◽  
Vol 1007 ◽  
Author(s):  
Christoph Rill ◽  
Sorin Ivanovici ◽  
Guido Kickelbick

ABSTRACTThe use of various phosphonic acid derivatives – some of which contain polymerizable groups – as surface modifying agents for nanoparticles was studied both in-situ during the synthesis of lanthanide-based (Ln = Nd, Eu, Yb) nanoparticles at room temperature as well as in a separate step after the particle preparation by a hydrothermal method. In the single-pot in-situ method the phosphonic acid esters served as growth-limiting agent during particle formation leading to small nanoparticles with a size of only a few nanometers as determined by dynamic light scattering as well as transmission electron and atomic force microscopy. Free phosphonic acids as well as their silyl esters were used to modify the hydrothermally prepared neodymium hydroxide nanorods which had diameters of approx. 20 nm and a length ranging up to a few micrometers. The surface modification was confirmed by infrared spectroscopy and thermogravimetric analysis.


2013 ◽  
Vol 634-638 ◽  
pp. 353-356
Author(s):  
Chao Lin Miao ◽  
Hui Wang

Surface modification of microporous polypropylene membrane was performed by grafting polymerization of acrylamide.The morphological and microstructure changes of the membrane surface were confirmed by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, scanning electron microscopy and atomic force microscopy. The results indicate that the pore size of the grafted membrane was reduced.


2015 ◽  
Vol 2015 ◽  
pp. 1-9
Author(s):  
Jun Yuan Li ◽  
Li Wu Zheng ◽  
Li Ma ◽  
Dora Lai Wan Kwong ◽  
Lim Kwong Cheung ◽  
...  

Objective. The present study aimed to investigate the effect of fluoride-modified titanium surface on adhesion of irradiated osteoblasts.Materials and Methods. Fluoride-modified surface was obtained and the morphology, roughness, and chemical composition of the surface were evaluated by scanning electron microscopy, atomic force microscopy, and X-ray photoelectron spectroscopy, respectively. The adhesion of irradiated osteoblast-like cells, in terms of number, area, and fluorescence intensity on the titanium surface, was evaluated using immunofluorescence staining.Results. Numerous nanosize pits were seen only in the F-TiO surface. The pits were more remarkable and uniform on F-TiO surface than on TiO surface; however, the amplitude of peaks and bottoms on F-TiO surface appeared to be smaller than on TiO surface. The Sa value and Sdr percentage of TiO surfaces were significantly higher than those of F-TiO surface. The concentrations of main elements such as titanium, oxygen, and carbon were similar on both surfaces. The number of irradiated osteoblasts adhered on the control surface was larger than on fluoride-modified surface. Meanwhile, the cells on the fluoride-modified surface formed more actin filaments.Conclusions. The fluoride-modified titanium surface alters the adhesion of irradiated osteoblasts. Further studies are needed to investigate the proliferation, differentiation, maturation, gene expression, and cytokine production of irradiated osteoblasts on fluoride-modified titanium surface.


2013 ◽  
Vol 25 ◽  
pp. 40-48 ◽  
Author(s):  
Václav Švorčík ◽  
Zdeňka Kolská ◽  
Jakub Siegel ◽  
Petr Slepička

Surface of polyethyleneterephthalate (PET) was modified by plasma discharge and subsequently grafted with dithiol (4,4-bifenyldithiol, BFD)) to create thiol (-SH) groups on polymer surface. This short dithiol is expected to be fixed via one of-SH groups to radicals created by the plasma treatment on the PET surface. Free-SH groups are allowed to interact with Au nanoparticles. Xray Photoelectron Spectroscopy (XPS), Fourier Transform Infrared Spectroscopy (FTIR) and Electrokinetic Analysis (EA, zeta potential) were used for the characterization of surface chemistry of the modified PET. Surface morphology and roughness of the samples were studied by Atomic Force Microscopy (AFM).The results from XPS, FTIR, EA and AFM show that the Au nanoparticles are grafted on modified surface in the case of bifenyldithiol pretreatment. The rigid molecule of biphenyldithiol is bounded via only one-SH group to the modified PET surface and the second one remains free for the consecutive chemical reaction with Au nanoparticle. The gold nanoparticles are distributed relatively homogenously over the polymer surface.


Author(s):  
Y. Pan

The D defect, which causes the degradation of gate oxide integrities (GOI), can be revealed by Secco etching as flow pattern defect (FPD) in both float zone (FZ) and Czochralski (Cz) silicon crystal or as crystal originated particles (COP) by a multiple-step SC-1 cleaning process. By decreasing the crystal growth rate or high temperature annealing, the FPD density can be reduced, while the D defectsize increased. During the etching, the FPD surface density and etch pit size (FPD #1) increased withthe etch depth, while the wedge shaped contours do not change their positions and curvatures (FIG.l).In this paper, with atomic force microscopy (AFM), a simple model for FPD morphology by non-crystallographic preferential etching, such as Secco etching, was established.One sample wafer (FPD #2) was Secco etched with surface removed by 4 μm (FIG.2). The cross section view shows the FPD has a circular saucer pit and the wedge contours are actually the side surfaces of a terrace structure with very small slopes. Note that the scale in z direction is purposely enhanced in the AFM images. The pit dimensions are listed in TABLE 1.


2003 ◽  
Vol 780 ◽  
Author(s):  
C. Essary ◽  
V. Craciun ◽  
J. M. Howard ◽  
R. K. Singh

AbstractHf metal thin films were deposited on Si substrates using a pulsed laser deposition technique in vacuum and in ammonia ambients. The films were then oxidized at 400 °C in 300 Torr of O2. Half the samples were oxidized in the presence of ultraviolet (UV) radiation from a Hg lamp array. X-ray photoelectron spectroscopy, atomic force microscopy, and grazing angle X-ray diffraction were used to compare the crystallinity, roughness, and composition of the films. It has been found that UV radiation causes roughening of the films and also promotes crystallization at lower temperatures.Furthermore, increased silicon oxidation at the interface was noted with the UVirradiated samples and was shown to be in the form of a mixed layer using angle-resolved X-ray photoelectron spectroscopy. Incorporation of nitrogen into the film reduces the oxidation of the silicon interface.


2020 ◽  
Vol 59 (1) ◽  
pp. 207-214 ◽  
Author(s):  
Yao Wang ◽  
Jianqing Feng ◽  
Lihua Jin ◽  
Chengshan Li

AbstractWe have grown Cu2O films by different routes including self-oxidation and metal-organic deposition (MOD). The reduction efficiency of Cu2O films on graphene oxide (GO) synthesized by modified Hummer’s method has been studied. Surface morphology and chemical state of as-prepared Cu2O film and GO sheets reduced at different conditions have also been investigated using atomic force microscopy (AFM) and x-ray photoelectron spectroscopy (XPS). Results show that self-oxidation Cu2O film is more effective on phtocatalytic reduction of GO than MOD-Cu2O film. Moreover, reduction effect of self-oxidation Cu2O film to GO is comparable to that of environmental-friendly reducing agent of vitamin C. The present results offer a potentially eco-friendly and low-cost approach for the manufacture of reduced graphene oxide (RGO) by photocatalytic reduction.


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