Epitaxial Aluminum Electrodes on Theta Rotated Y-X LiTaO3 Piezoelectric Substrate for High Power Durable SAW Duplexers.

2004 ◽  
Vol 833 ◽  
Author(s):  
Osamu Nakagawara ◽  
Hironori Suzuki ◽  
Shuji Yamato ◽  
Masayuki Hasegawa ◽  
Hideharu Ieki

ABSTRACTHigh power durable electrodes have been successfully grown on 38.5° rotated Y-X LiTaO3 piezoelectric substrates featuring epitaxial Al films with a pseudo-homoepitaxial Ti intermediate layer. We found that a two-step process sequence in the deposition temperature of an intermediate layer could make it possible for an Al/Ti structure to grow epitaxially on low-cut-angle Y-X LiTaO3. Specified epitaxial relationship was Al(111)<011>//Ti(001)<100>//LiTaO3(001)<100>. Duplexers with epitaxial Al electrodes had a breakdown power above 6 W and more than ten times longer lifetime in contrast to filters with polycrystalline electrodes of which the breakdown power is 3.4 W. Epitaxial electrodes with extremely less grain boundary can improve power durability because self-diffusion of Al atoms occurs mainly in the grain boundary of the film. Material variation of epitaxial electrodes will be discussed as well.

Coatings ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 1269
Author(s):  
Chin-Chiuan Kuo ◽  
Chun-Hui Lin ◽  
Jing-Tang Chang ◽  
Yu-Tse Lin

Chromium-carbon films were deposited by utilizing reactive high-power impulse magnetron sputtering at different mixture ratios of ethyne and argon atmosphere, and different substrate bias voltages and deposition temperature, with the same pulse frequency, duty cycle, and average power. The microstructure and mechanical properties of the obtained films were compared. The films consist of amorphous or nanocrystalline chromium carbide, hydrogenated amorphous carbon, and minor α-chromium phase. Decreasing the fraction of ethyne increases the content of the α-chromium phase but decreases hydrogenated amorphous carbon phase. The film’s hardness increases by enhancing the negative substrate bias and raising the deposition temperature, which could be attributed to the increase of film density and the Hall–Petch strengthening effect induced by the nanoscale crystallization of the amorphous carbide phase.


1991 ◽  
Vol 66-69 ◽  
pp. 843-848 ◽  
Author(s):  
J. Sommer ◽  
Christian Herzig ◽  
S. Mayer ◽  
W. Gust

1997 ◽  
Vol 492 ◽  
Author(s):  
H. Van Swygenhoven ◽  
M. Spaczér ◽  
A. Caro

ABSTRACTMolecular dynamics computer simulations of high load plastic deformation at temperatures up to 500K of Ni nanophase samples with mean grain size of 5 nm are reported. Two types of samples are considered: a polycrystal nucleated from different seeds, each having random location and random orientation, representing a sample with mainly high angle grain boundaries, and polycrystals with seeds located at the same places as before, but with a limited missorientation representing samples with mainly low angle grain boundaries. The structure of the grain boundaries is studied by means of pair distribution functions, coordination number, atom energetics, and common neighbour analysis. Plastic behaviour is interpreted in terms of grain-boundary viscosity, controlled by a self diffusion mechanism at the disordered interface activated by thermal energy and stress.


1990 ◽  
Vol 51 (C1) ◽  
pp. C1-1035-C1-1042 ◽  
Author(s):  
J. SABRAS ◽  
C. DOLIN ◽  
J. AYACHE ◽  
C. MONTY ◽  
R. MAURY ◽  
...  

1996 ◽  
Vol 4 (8) ◽  
pp. 601-611 ◽  
Author(s):  
S. Frank ◽  
J. Rüsing ◽  
Chr. Herzig

1951 ◽  
Vol 22 (5) ◽  
pp. 634-639 ◽  
Author(s):  
R. E. Hoffman ◽  
D. Turnbull

1994 ◽  
Vol 31 (4) ◽  
pp. 479-482 ◽  
Author(s):  
J. Čermák ◽  
J. Růžičková ◽  
A. Pokorná

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