Advanced characterization of ultra-low-k periodic porous silica films – pore size distribution, pore-diameter anisotropy, and size and macroscopic isotropy of domain structure

2003 ◽  
Vol 766 ◽  
Author(s):  
N. Hata ◽  
C. Negoro ◽  
S. Takada ◽  
K. Yamada ◽  
Y. Oku ◽  
...  

AbstractWe have shown previously the results from out-of-plane and in-plane X-ray scattering /diffraction measurements together with transmission electron microscope and X-ray reflectance measurements and shown that they are effective in characterization of a periodic porous silica low-k film [1]. In the present work, we report the results on pore-size distribution, pore-diameter anisotropy, and size and macroscopic isotropy of domain structure.

2013 ◽  
Author(s):  
Jaquiel S. Fernandes ◽  
Rodrigo Nagata ◽  
Anderson C. Moreira ◽  
Celso P. Fernandes ◽  
Carlos R. Appoloni

1991 ◽  
Vol 74 (10) ◽  
pp. 2538-2546 ◽  
Author(s):  
Susan Krueger ◽  
Gabrielle G. Long ◽  
David R. Black ◽  
Dennis Minor ◽  
Pete R. Jemian ◽  
...  

2019 ◽  
Vol 33 (7) ◽  
pp. 6361-6372 ◽  
Author(s):  
Jinbu Li ◽  
Shuangfang Lu ◽  
Chunqing Jiang ◽  
Min Wang ◽  
Zhuoheng Chen ◽  
...  

2002 ◽  
Vol 74 (11) ◽  
pp. 2470-2477 ◽  
Author(s):  
Felix C. Leinweber ◽  
Dieter Lubda ◽  
Karin Cabrera ◽  
Ulrich Tallarek

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