Boron Segregation and Out-diffusion in Single-Crystal Si 1-y C y
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AbstractBoron segregation and its effect on carbon diffusion is studied in single-crystal Si1-yCy. We find that boron segregates from silicon to Si0.996C0.004 at a level m=[B]SiC/[B]Si = 1.7 during a 2 hour, 850°Cannealin N2. After this anneal, if most of the carbon is then removed from the Si1-yCy layer (via an oxidation-enhanced out-diffusion process), most of the boron segregation is removed as well. This argues against immobile B-C defects as the predominant mechanism driving the segregation. Boron is shown to increase carbon diffusion during the N2 anneal, but also appears to enhance carbon precipitation during a subsequent oxidation.
2013 ◽
Vol 52
(11R)
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pp. 110122
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2000 ◽
Vol 07
(01n02)
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pp. 7-14
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1999 ◽
Vol 38
(Part 2, No. 3A)
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pp. L223-L225
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2020 ◽
Vol 33
(7)
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pp. 1013-1020
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2002 ◽
Vol 106
(20)
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pp. 5163-5168
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