Thin HfO2 Films Deposited via Alternating Pulses of Hf(NO3)4 and HfCl4

2003 ◽  
Vol 765 ◽  
Author(s):  
J.F. Conley ◽  
Y. Ono ◽  
R. Solanki ◽  
D.J. Tweet

AbstractA novel technique for deposition of metal oxide films is demonstrated in which alternating pulses of metal-nitrate and metal-chloride precursors are used. The metal nitrate, Hf(NO3)4, acts as the oxidizing agent, avoiding the use of a separate oxidizing species such as H2O. This method results in greater than one monolayer per cycle deposition rate of HfO2 films compared to the use of a single precursor and enables deposition directly on H-terminated Si due to the reactivity of Hf(NO3)4. It was found that performing a short in-situ anneal after every deposition cycle increases film density and improves electrical characteristics. Films are characterized via capacitance vs. voltage, current vs. voltage, spectroscopic ellipsometry, and x-ray diffraction and reflectivity.

2021 ◽  
Vol 19 (49) ◽  
pp. 15-21
Author(s):  
Mohammed Abdilridha Salman ◽  
Salma M. Hassan

ABSTRACT: Polypyrrole and polypyrrole / silver nanocomposites were fabricated by in-situ polymerization employing Ammonium Persulphate as an oxidizing agent. Nanocomposites were synthesized by combining polypyrrole and silver nanoparticles in various weight percentages (0.1%, 0.5%, 3%, 5% and 7% wt.). Crystallographic data were collected using X-ray diffraction.  PPy particles were found to have an orthorhombic symmetry. In contrast, PPy/Ag nanocomposites were reported to have monoclinic structure. The crystallite size was determined by XRD using Scherrer equation and considered to be within 49 nm range. DC conductivity of pelletized samples was evaluated in the temperature range of 323.15k to 453.15k. The conductivity displayed an increase when the temperature is increased from 323.15k to 453.15k. Activation energies were determined from plots of Arrhenius for all nanocomposites. The findings indicated that the activation energy decrease with increasing the weight percentage of Ag nanoparticles in the nanocomposites.


Author(s):  
R. E. Herfert

Studies of the nature of a surface, either metallic or nonmetallic, in the past, have been limited to the instrumentation available for these measurements. In the past, optical microscopy, replica transmission electron microscopy, electron or X-ray diffraction and optical or X-ray spectroscopy have provided the means of surface characterization. Actually, some of these techniques are not purely surface; the depth of penetration may be a few thousands of an inch. Within the last five years, instrumentation has been made available which now makes it practical for use to study the outer few 100A of layers and characterize it completely from a chemical, physical, and crystallographic standpoint. The scanning electron microscope (SEM) provides a means of viewing the surface of a material in situ to magnifications as high as 250,000X.


2017 ◽  
Vol 72 (6) ◽  
pp. 355-364
Author(s):  
A. Kopp ◽  
T. Bernthaler ◽  
D. Schmid ◽  
G. Ketzer-Raichle ◽  
G. Schneider

2020 ◽  
Author(s):  
Chi-Toan Nguyen ◽  
Alistair Garner ◽  
Javier Romero ◽  
Antoine Ambard ◽  
Michael Preuss ◽  
...  

2019 ◽  
Author(s):  
Si Athena Chen ◽  
◽  
Peter Heaney ◽  
Jeffrey E. Post ◽  
Peter J. Eng ◽  
...  

2002 ◽  
Vol 47 (19) ◽  
pp. 3137-3149 ◽  
Author(s):  
M. Morcrette ◽  
Y. Chabre ◽  
G. Vaughan ◽  
G. Amatucci ◽  
J.-B. Leriche ◽  
...  

Author(s):  
Ogün Baris Tapar ◽  
Jérémy Epp ◽  
Matthias Steinbacher ◽  
Jens Gibmeier

AbstractAn experimental heat treatment chamber and control system were developed to perform in-situ X-ray diffraction experiments during low-pressure carburizing (LPC) processes. Results from the experimental chamber and industrial furnace were compared, and it was proven that the built system is reliable for LPC experiments. In-situ X-ray diffraction investigations during LPC treatment were conducted at the German Electron Synchrotron Facility in Hamburg Germany. During the boost steps, carbon accumulation and carbide formation was observed at the surface. These accumulation and carbide formation decelerated the further carbon diffusion from atmosphere to the sample. In the early minutes of the diffusion steps, it is observed that cementite content continue to increase although there is no presence of gas. This effect is attributed to the high carbon accumulation at the surface during boost steps which acts as a carbon supply. During quenching, martensite at higher temperature had a lower c/a ratio than later formed ones. This difference is credited to the early transformation of austenite regions having lower carbon content. Also, it was noticed that the final carbon content dissolved in martensite reduced compared to carbon in austenite before quenching. This reduction was attributed to the auto-tempering effect.


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