Junction and Profile Analysis using Carrier Illumination

2002 ◽  
Vol 717 ◽  
Author(s):  
T. Clarysse ◽  
W. Vandervorst ◽  
R. Lindsay ◽  
P. Borden ◽  
E. Budiarto ◽  
...  
Keyword(s):  
Quantitative Analysis ◽  
Systematic Study ◽  
Quantitative Measurement ◽  
Concentration Level ◽  
Profile Analysis ◽  
Surface Preparation ◽  
Optical Technique ◽  
Junction Depth ◽  
Cvd Growth ◽  
Non Destructive

AbstractCarrier Illumination™ (CI) is an optical technique for non-destructive in-line monitoring of post-anneal junction depth and pre-anneal PAI depth and dose with wafer mapping capabilities. This work intends to extend the use of the CI-measurements from a range-specific quantitative measurement towards a more universal quantitative analysis of junction depth, profile abruptness and implant dose. For that purpose this paper presents a systematic study of the CI response to a wide variety of post anneal implant processes, varying parameters including implant species, dose and energy, annealing condition, and surface preparation.Samples containing B, BF2 and As-implants with and without Ge PAI layers, with junction depths between 10-120 nm, were measured. In addition near-ideal box-like profiles (as obtained with CVD-growth) were fabricated and measured. For the abrupt CVD profiles, CI measures the junction position with sub-nm resolution independent of the CI-analysis conditions. For more graded profiles resulting from annealed implants, the correlation to the SIMS junction depth becomes a function of generation laser current (which is proportional to the applied power). As the concentration level, at which the correlation is made, can be adjusted over a concentration range of approximately 2x1018 to 2x1019/cm3 by changing the laser current, a route towards correlating the CI measurement with profile abruptness becomes feasible.

Application of EDS Technique for OSP Film Thickness Measurement

2006 ◽  
Author(s):  
Prong Kongsubto ◽  
Sirarat Kongwudthiti
Keyword(s):  
Thin Film ◽  
Quantitative Analysis ◽  
Joint Strength ◽  
Critical Factor ◽  
Thickness Measurement ◽  
Ic Manufacturing ◽  
And Control ◽  
Film Thickness Measurement ◽  
Non Destructive

Abstract Organic solderability preservatives (OSPs) pad is one of the pad finishing technologies where Cu pad is coated with a thin film of an organic material to protect Cu from oxidation during storage and many processes in IC manufacturing. Thickness of OSP film is a critical factor that we have to consider and control in order to achieve desirable joint strength. Until now, no non-destructive technique has been proposed to measure OSP thickness on substrate. This paper reports about the development of EDS technique for estimating OSP thickness, starting with determination of the EDS parameter followed by establishing the correlation between C/Cu ratio and OSP thickness and, finally, evaluating the accuracy of the EDS technique for OSP thickness measurement. EDS quantitative analysis was proved that it can be utilized for OSP thickness estimation.

On the Origin of the Ink of the Thanksgiving Scroll (1QHodayota)

2009 ◽  
Vol 16 (1) ◽  
pp. 97-106 ◽  
Author(s):  
Oliver Hahn ◽  
Gisela Weinberg ◽  
Ira Rabin ◽  
Timo Wolff ◽  
Admir Masic
Keyword(s):  
Trace Elements ◽  
Quantitative Analysis ◽  
Spectroscopic Investigation ◽  
Dead Sea ◽  
General Validity ◽  
Production Area ◽  
The Dead ◽  
Sea Area ◽  
Non Destructive

AbstractIn this study we demonstrate the possibility to identify the production area of the scrolls, coupling non-destructive quantitative analysis of trace elements to spectroscopic investigation of the inks. This approach, that allowed us to determine the Dead Sea area as origin of 1QHodayota, is of general validity.

Quantitative Measurement System of Liquid Products in Sealed Tank

2019 ◽  
Vol 970 ◽  
pp. 63-74
Author(s):  
Yuliya Shulgina ◽  
Maria A. Kostina ◽  
P.V. Sorokin ◽  
Marina Polonskaya ◽  
O.A. Kozhemyak ◽  
...  
Keyword(s):  
Quantitative Measurement ◽  
Optimal Solution ◽  
Storage Conditions ◽  
Ultrasonic Pulse ◽  
Non Destructive Testing ◽  
Destructive Testing ◽  
Wide Range ◽  
Liquid Products ◽  
Manometric Method ◽  
Non Destructive

Many industries apply pressure tanks for the storage of various types of liquids [1]. It can be toxic, chemically active liquids or food products. Storage conditions of these liquids can have a wide range of pressures and temperatures; therefore it is preferable to control the liquids levels from the outside of the tank. The most optimal solution in this case is the ultrasonic pulse time method [2-6], which is also widely used in robotics [7], fishing, shipping [8-9], archeology [10-11], non-destructive testing [12-17] and manometric method [18].

Using X-ray diffraction in forensic science

2007 ◽  
Vol 222 (3-4) ◽  
Author(s):  
Marek Kotrlý
Keyword(s):  
Quantitative Analysis ◽  
Forensic Science ◽  
Phase Analysis ◽  
Analytical Methods ◽  
Small Volume ◽  
X Ray Diffraction ◽  
X Ray ◽  
Xrd Phase Analysis ◽  
Forensic Expert ◽  
Non Destructive

The majority of expert examination in forensic science is concerned with comparison, determination, and description of diversified samples. X-ray diffraction (powdered and/or single crystal) is bringing big benefits and analytical possibilities into forensic expert work, which are not easily provided by other methods. XRD methods are used in combination with other analytical methods (SEM with EDS/WDS, micro XRF, optical microscopy, FTIR, etc.).Importance of XRD phase analysis in forensic science lies namely in: analysis of relatively small-volume samples, relatively non-destructive, exact phase analysis, quantitative analysis (in majority of cases). And method is conclusive for a court.

Quantitative analysis and measurement of carbon isotopic compositions in individual fluid inclusions by micro-laser Raman spectrometry

2016 ◽  
Vol 8 (37) ◽  
pp. 6730-6738 ◽  
Author(s):  
Jiajia Li ◽  
Rongxi Li ◽  
Bangsheng Zhao ◽  
Ning Wang ◽  
Jinghua Cheng
Keyword(s):  
Raman Spectroscopy ◽  
Quantitative Analysis ◽  
Fluid Inclusions ◽  
Laser Raman Spectroscopy ◽  
Raman Spectrometry ◽  
Laser Raman ◽  
Isotopic Compositions ◽  
Carbon Isotopic ◽  
Non Destructive

Micro-laser Raman spectroscopy is a non-destructive technique to quantitatively determine the carbon isotopic compositions of CO2 in individual fluid inclusions.

Non-destructive, In-line Characterization of Shallow Junction Processes

2000 ◽  
Vol 610 ◽  
Author(s):  
G. Jonathan Kluth ◽  
Laurie Bechtler ◽  
Peter Borden ◽  
Jian Mi
Keyword(s):  
Optical Method ◽  
Low Dose ◽  
Annealing Temperature ◽  
Optical Metrology ◽  
Junction Depth ◽  
Shallow Junction ◽  
Line Measurement ◽  
Non Destructive

AbstractThis paper describes the application of a novel optical metrology tool to in-line monitoring of shallow junction processes in a production setting. Recent results demonstrate the sensitivity of junction depth to implant dose and energy, as well as to annealing temperature and time. Results are also presented on monitoring of amorphizing implants and low dose implants. The in-line measurement has been performed on both bare wafers and product wafers. Measurements are compared with results obtained by destructive techniques such as SIMS and SRP. These results demonstrate that the optical method has the capability to provide in-line control of shallow junction processes.

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