Modeling of Diffusion and Activation of Low Energy Arsenic Implants in Silicon

2002 ◽  
Vol 717 ◽  
Author(s):  
Srinivasan Chakravarthi ◽  
Chidambaram P.R. ◽  
Charles Machala ◽  
Amitabh Jain ◽  
Xin Zhang
Keyword(s):  
Low Energy ◽  
Junction Depth ◽  
University Of Washington ◽  
Front End ◽  
Key Features ◽  
High Concentrations

SummaryIn summary, we find it is possible to model the extent of arsenic diffusion during front-end and back-end processes that define the final junction depth. The key features of the model can be summarised as: (a) Interstitials from implant damage play a diminished role as implant energies are scaled; (b) As4V formation and precipitation at high concentrations is critical to accurate modeling of ultra-shallow arsenic junctions. These models when used with device simulations help optimize transistor performance/tradeoffs.We would like to thank Pavel Fastenko and Scott T. Dunham (University of Washington) for details and discussion regarding their modeling results.

Low energy boron implantation profiles in silicon from junction depth measurements

1971 ◽  
Vol 7 (1-2) ◽  
pp. 7-15 ◽  
Author(s):  
P. Sebillotte ◽  
M. Badanoiu ◽  
V. B. Ndocko ◽  
P. Siffert
Keyword(s):  
Low Energy ◽  
Junction Depth ◽  
Boron Implantation

VuFind

2013 ◽  
pp. 73-99 ◽  
Author(s):  
Demian Katz ◽  
Andrew Nagy
Keyword(s):  
Open Source ◽  
Search Engine ◽  
Relational Database ◽  
Data Retrieval ◽  
Similarity Analysis ◽  
The Core ◽  
Front End ◽  
Informative Case ◽  
Key Features

Apache Solr, an open source Java-based search engine, forms the core of many Library 2.0 products. The use of an index in place of a relational database allows faster data retrieval along with key features like faceting and similarity analysis that are not practical in the previous generation of library software. The popular VuFind discovery tool was built to provide a library-friendly front-end for Solr’s powerful searching capabilities, and its development provides an informative case study on the use of Solr in a library setting. VuFind is just one of many library packages using Solr, and examples like Blacklight, Summon, and the eXtensible Catalog project show other possible approaches to its use.

A 1.2V, 2.7mA receiver front-end for bluetooth low energy applications

2014 ◽  
Author(s):  
Lei Liao ◽  
Aytac Atac ◽  
Ye Zhang ◽  
Yifan Wang ◽  
Zhimiao Chen ◽  
...  
Keyword(s):  
Low Energy ◽  
Bluetooth Low Energy ◽  
Energy Applications ◽  
Front End

A Comparison of Low Energy BF2 Implantation in Si and Ge Preamorphized Silicon

1988 ◽  
Vol 128 ◽  
Author(s):  
Gary A. Ruggles ◽  
Shin-Nam Hong ◽  
Jimmie J. Wortman ◽  
Mehmet Ozturk ◽  
Edward R. Myers ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Crystalline Silicon ◽  
Amorphous Layer ◽  
Low Energy ◽  
Electrical Activation ◽  
Silicon Substrates ◽  
Boron Diffusion ◽  
Junction Depth ◽  
Rapid Thermal Anneal ◽  
Boron Segregation

ABSTRACTLow energy (6 keV) BF2 implantation was carried out using single crystal, Ge-preamorphized, and Si-preamorphized silicon substrates. Implanted substrates were rapid thermal annealed at temperatures from 600°C to 1050'C and boron channeling, diffusion, and activation were studied. Ge and Si preamorphization energies were chosen to produce nearly identical amorphous layer depths as determined by TEM micrographs (approximately 40 nm in both cases). Boron segregation to the end-of-range damage region was observed for 6 keV BF2 implantation into crystalline silicon, although none was detected in preamorphized substrates. Junction depths as shallow as 50 nm were obtained. In this ultra-low energy regime for ion implantation, boron diffusion was found to be as important as boron channeling in determining the junction depth, and thus, preamorphization does not result in a significant reduction in junction depth. However, the formation of junctions shallower than 100 rmu appears to require RTA temperatures below 1000°C which can lead to incomplete activation unless the substrate has been preamorphized. In the case of preamorphized samples, Hall measurements revealed that nearly complete electrical activation can be obtained for preamorphized samples after a 10 second rapid thermal anneal at temperatures as low as 600°C.

scholarly journals Atmospheric bromoform at Cape Point, South Africa: a first time series on the African continent

2017 ◽  
Author(s):  
Brett Kuyper ◽  
Carl J. Palmer ◽  
Casper Labuschagne ◽  
Chris J. C. Reason
Keyword(s):  
South Africa ◽  
Austral Spring ◽  
Data Set ◽  
Air Masses ◽  
Mixing Ratios ◽  
Front End ◽  
Potential Source ◽  
High Concentrations ◽  
Marine Air ◽  
First Time

Abstract. Bromoform mixing ratios in marine air were measured at Cape Point Global Atmospheric Watch Station, South Africa. This represents the first ever bromoform data set recorded at this unique location. Manual daily measurements were made during a month long field campaign (austral spring 2011) using a GC-ECD with a custom built front end thermal desorption trap. The measured concentrations ranged between 2.3 ± 0.4 and 84.7 ± 10.8 ppt with a mean of 24.7 ± 3.1 ppt. Our analysis shows the concentration of bromform varies significantly according to wind direction and the trajectory of the air mass sampled. Air masses which had come into contact with multiple potential source of bromoform showed the highest average mixing ratios. The measurements reported here represent some of the highest recorded coastal bromoform concentrations globally. These high concentrations may be explained by the multiple local sources of bromoform around Cape Point.

scholarly journals Automated application of low energy electron irradiation enables inactivation of pathogen- and cell-containing liquids in biomedical research and production facilities

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Jasmin Fertey ◽  
Martin Thoma ◽  
Jana Beckmann ◽  
Lea Bayer ◽  
Julia Finkensieper ◽  
...  
Keyword(s):  
Electron Irradiation ◽  
Continuous Process ◽  
Radiation Energy ◽  
Low Energy ◽  
Energy Electron ◽  
Biological Research ◽  
Low Energy Electron ◽  
High Concentrations ◽  
Syncytial Virus ◽  
High Doses

Abstract Ionizing radiation is widely used to inactivate pathogens. It mainly acts by destroying nucleic acids but causes less damage to structural components like proteins. It is therefore highly suited for the sterilization of biological samples or the generation of inactivated vaccines. However, inactivation of viruses or bacteria requires relatively high doses and substantial amounts of radiation energy. Consequently, irradiation is restricted to shielded facilities—protecting personnel and the environment. We have previously shown that low energy electron irradiation (LEEI) has the same capacity to inactivate pathogens in liquids as current irradiation methods, but generates much less secondary X-ray radiation, which enables the use in normal laboratories by self-shielded irradiation equipment. Here, we present concepts for automated LEEI of liquids, in disposable bags or as a continuous process. As the electrons have a limited penetration depth, the liquid is transformed into a thin film. High concentrations of viruses (Influenza, Zika virus and Respiratory Syncytial Virus), bacteria (E. coli, B. cereus) and eukaryotic cells (NK-92 cell line) are efficiently inactivated by LEEI in a throughput suitable for various applications such as sterilization, vaccine manufacturing or cell therapy. Our results validate the premise that for pathogen and cell inactivation in liquids, LEEI represents a suitable and versatile irradiation method for standard biological research and production laboratories.

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