Numerical Analysis of Transient Capacitance Data Obtained from Titanium Induced Levels in Silicon
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AbstractUsing electrical and optical DLTS analysis based on the capacitance transient measurements and taking into account the spatially dependent capture and the competition between emission and capture, parameters of Titanium levels in silicon are derived. By curve fitting the calculation to trap-filling data, the electron capture cross section of the first donor level (Ec - .284 eV) is found to be 5.8 10-15 exp (.013/kT)cm2 at ξ= 5 104 V/cm. The hole trap capture cross section of the second donor level (Ev + .260 eV) is found to be 1.97 10-17exp (-.017/kT)cm2 at zero electric field.
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