Defect Structure and Dynamics in Silicon
Keyword(s):
ABSTRACTThis paper gives a brief account of recent calculations of equilibrium configurations, formation energies, and migration energies of intrinsic lattice defects (vacancies, self-interstitials) and complexes of dopant impurities (phosphorus, aluminum) with these defects. The results have been used to provide a comprehensive interpretation of low- and high-temperature diffusion data.
Keyword(s):
1994 ◽
Vol 30
(10)
◽
pp. 1263-1267
◽
2010 ◽
Vol 20
(11)
◽
pp. 2134-2138
◽
2016 ◽
Vol 26
(8)
◽
pp. 2257-2262
◽