Manufacture of Microelectronic Circuitry by Drop-on-Demand Dispensing of Nano-particle Liquid Suspensions

2000 ◽  
Vol 624 ◽  
Author(s):  
J.B. Szczech ◽  
C.M. Megaridis ◽  
D.R. Gamota ◽  
J. Zhang

ABSTRACTAn emerging selective metallization process utilizes Drop-On-Demand (DOD) inkjet printing, and recent developments in nano-particle fluid suspensions to fabricate fine-line circuit interconnects. The suspensions consist of silver or gold particulates of 1–10 nm in size that are homogeneously suspended in an organic carrier solvent. A piezo-electric droplet generator driven by a bipolar voltage signal is used to dispense 50–70 µm diameter droplets traveling at 1-3 m/s before impacting a compliant substrate. The deposit/substrate composite is subsequently processed at 300°Cfor 15 minutes to allow for evaporation of the solvent carrier and sintering of the nano-particles, thereby yielding a finished circuit product. Test vehicles created using this technique exhibited features as fine as 120–200 µm wide and 1–3 µm thick. The circuitry performed well during environmental conditioning studies. However, repeatability of the results showed sensitivity to the generation of steady, satellite-free droplets. In an effort to generate droplets consistently, it is essential to develop a strong fundamental understanding of the correlation between device excitation parameters and fluid properties, and resolve the microrheological behavior of the conductive ink as it flows through the droplet generator.

Micromachines ◽  
2019 ◽  
Vol 10 (7) ◽  
pp. 477 ◽  
Author(s):  
Saeedeh Imani Moqadam ◽  
Lutz Mädler ◽  
Nils Ellendt

In this study we present the design and functionality of a pneumatic drop-on-demand droplet generator that produces metallic micro particles with a size range of 300 µm to 1350 µm at high temperatures of up to 1600 °C. Molten metal droplets were generated from an EN 1.3505 (AISI 52100) steel which solidified during a falling distance of 6.5 m. We analyzed the resulting particle size and morphology using static image analysis. Furthermore, the droplet formation mode was analyzed using high-speed recordings and the pressure oscillation was measured in the crucible. The system is meant to be reproducible in all aspects and therefore the in-situ measurements are set to control the droplet size and trajectory during the run. Additionally, the ex-situ measurements are done on the particles in order to characterize them in size and morphology aspects.


2008 ◽  
Vol 147 (2) ◽  
pp. 649-655 ◽  
Author(s):  
Kuang-Chao Fan ◽  
Jhih-Yuan Chen ◽  
Ching-Hua Wang ◽  
Wen-Chueh Pan

2014 ◽  
Vol 625 ◽  
pp. 615-620
Author(s):  
Jin Wei Liang ◽  
Hung Yi Chen

This paper presents the design, fabrication and control of a piezoelectric-type droplet generator which is applicable for on-line dispensing. The piezoelectric-actuated dispensing system consists of a linear piezoelectric motor (LPM) actuated table, a plastic syringe, a nozzle, a linear encoder and a PC-based control unit. Adaptive wavelet neural network (AWNN) control is applied to overcome nonlinear hysteresis inherited in the LPM. The adaptive learning rates are derived based on the Lyapunov stability theorem so that convergence of the tracking error can be assured. Unlike open-loop dispensing system, the system proposed can potentially generate droplets with high accuracy. Experimental verifications including regulating and tracking control are performed firstly to assure the reliability of the proposed control schemes. Real dispensing is then conducted to validate the feasibility of the piezoelectric-actuated drop-on-demand droplet generator. The results demonstrate that the proposed scheme works well in developing the piezoelectric-actuated drop-on-demand dispensing system.


2015 ◽  
Vol 66 ◽  
pp. 156-165 ◽  
Author(s):  
Xiaoyang Zhu ◽  
Li Zhu ◽  
Hejuan Chen ◽  
Mei Yang ◽  
Weiyi Zhang

2003 ◽  
Vol 804 ◽  
Author(s):  
Lei Chen ◽  
Sungxiang Huang ◽  
Jun Bao ◽  
Chihui Liu ◽  
Wenhan Liu ◽  
...  

AbstractA combinatorial synthesis method was developed by ejecting insoluble oxide suspensions using a drop-on-demand inkjet delivery system. The insoluble oxide suspensions with ultrafine/nano particles were prepared by grinding the oxide power in water using a high-energy ball mill. Using luminescent materials as model systems, it was established that the technique is very well suited to combinatorial synthesis of insoluble oxides.


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