TEM/STEM Sample Preparation for the Investigation of Solid State Structures: Applications to Electronic Devices and Computer Components

1985 ◽  
Vol 62 ◽  
Author(s):  
Richard E. Flutie

There has been a resurgence of the TEM/STEM being applied to the inspection and microanalysis of solid state electronic structures and devices. As the IC industry scaled down to submicron lines and spaces the IC designer, manufacturing processor and failure analyst required better “eyes” than the SEM could give. In addition to the image improvement, the TEM/STEM provided the microanalysis capability of microelectron diffraction (<30 angstroms) and sub-micron EDXA of ultra-thinned samples.

Author(s):  
T. J. Magee ◽  
J. Peng ◽  
J. Bean

Cadmium telluride has become increasingly important in a number of technological applications, particularly in the area of laser-optical components and solid state devices, Microstructural characterizations of the material have in the past been somewhat limited because of the lack of suitable sample preparation and thinning techniques. Utilizing a modified jet thinning apparatus and a potassium dichromate-sulfuric acid thinning solution, a procedure has now been developed for obtaining thin contamination-free samples for TEM examination.


Polymer ◽  
2004 ◽  
Vol 45 (12) ◽  
pp. 4009-4015 ◽  
Author(s):  
Bin Zhang ◽  
Shanju Zhang ◽  
Lidia Okrasa ◽  
Tadeusz Pakula ◽  
Tim Stephan ◽  
...  

2017 ◽  
Vol 139 (46) ◽  
pp. 16696-16707 ◽  
Author(s):  
Andrey A. Fokin ◽  
Tatyana S. Zhuk ◽  
Sebastian Blomeyer ◽  
Cristóbal Pérez ◽  
Lesya V. Chernish ◽  
...  

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