A Study on Hysteresis Effect of Barium Strontium Titanate Thin Films for Alternative Gate Dielectric Application

1999 ◽  
Vol 606 ◽  
Author(s):  
Wen-Jie Qi ◽  
Keith Zawadzki ◽  
Renee Nieh ◽  
Yongjoo Jeon ◽  
Byoung Hun Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Gate Dielectric ◽  
Operating Temperature ◽  
Charge Trapping ◽  
Hysteresis Effect ◽  
Barium Strontium ◽  
Sweep Voltage ◽  
A Charge

AbstractHysteresis effect of barium strontium titanate (BST) thin films for gate dielectric application has been studied. It is found that the “counterclockwise” hysteresis has strong sweep voltage and operating temperature dependence. It can be reduced or eliminated by proper thermal annealing or by using a barrier layer. A charge trapping and detrapping mechanism has been proposed.

Thickness dependence of the properties of epitaxial barium strontium titanate thin films

2015 ◽  
Vol 57 (8) ◽  
pp. 1529-1534 ◽  
Author(s):  
V. B. Shirokov ◽  
Yu. I. Golovko ◽  
V. M. Mukhortov ◽  
Yu. I. Yuzyuk ◽  
P. E. Janolin ◽  
...  
Keyword(s):  
Thin Films ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Thickness Dependence ◽  
Barium Strontium

Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils

2010 ◽  
Vol 256 (22) ◽  
pp. 6531-6535 ◽  
Author(s):  
Yanhua Fan ◽  
Shuhui Yu ◽  
Rong Sun ◽  
Lei Li ◽  
Yansheng Yin ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Copper Foils ◽  
Barium Strontium ◽  
Mn Doped

TUNABLE BAND-PASS FILTER USING INTERDIGITAL CAPACITOR BY BARIUM STRONTIUM TITANATE (BST) THIN FILMS

2006 ◽  
Vol 86 (1) ◽  
pp. 141-148 ◽  
Author(s):  
TAE-SOON YUN ◽  
HEE NAM ◽  
KI-CHUL YOON ◽  
JONG-CHUL LEE ◽  
HYUN-SUK KIM ◽  
...  
Keyword(s):  
Thin Films ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Band Pass Filter ◽  
Pass Filter ◽  
Bst Thin Films ◽  
Interdigital Capacitor ◽  
Barium Strontium ◽  
Band Pass

Effects of thermal misfit strains on dielectric features of sandwich barium strontium titanate multilayer thin films on metal plates

2021 ◽  
pp. 2150030
Author(s):  
Hanting Dong ◽  
Liang Ke ◽  
Xiangjun Hui ◽  
Jiangfeng Mao ◽  
Haiqing Du ◽  
...  
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Composition Range ◽  
Multilayer Films ◽  
Multilayer Thin Films ◽  
Barium Strontium ◽  
Metal Plates ◽  
Bst Films

Effects of thermal misfit strains on dielectric features for sandwich structural barium strontium titanate (BST) thin films on metal plates were investigated via a modified thermodynamic model. When TEC of substrates is closer to that of BST, larger permittivity and tunability can be received. The tendency of permittivities and tunabilities of such films as a function of TEC of substrates agrees with that of single compositional BST films and compositionally graded BST multilayer films. The highest tunability reaches 60% at the biasing field of 300 kV/cm when the films are onto Ti metal. Moreover, Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3 structure can obtain higher tunability than Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3 structure, while Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3/Ba[Formula: see text]Sr[Formula: see text]TiO3 films show better compatible composition range for relatively larger tunability. Dielectric properties of sandwich-like BST films in some references can also be analyzed based on our calculated results.

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