Fatigue Testing Machine of Micro-Sized Specimens for MEMS Applications

1999 ◽  
Vol 605 ◽  
Author(s):  
Y. Higo ◽  
K. Takashima ◽  
M. Shimojo ◽  
S. Sugiura ◽  
B. Pfister ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Fatigue Testing ◽  
Ion Beam ◽  
Testing Machine ◽  
Load Cell ◽  
Fatigue Properties ◽  
Type Specimens ◽  
New Type ◽  
Beam Type ◽  
Magnetostrictive Actuator

AbstractA new type of fatigue testing machine for micro-sized specimens for MEMS applications has been developed. This fatigue testing machine consists of a magnetostrictive actuator which is able to impart small displacements to a specimen upto 20 νm with resolution of 5 nm. The actuator is connected to a metal shaft and a diamond tip of 5 νm in radius is attached to the end of the shaft. Small displacements are applied to the specimen through the diamond tip. This makes it possible to construct a high stiffness loading fixture. The magnitude of load applied to the specimen is measured by a strain gauge type load cell with a load resolution of 10 νN. The specimen stage and load cell can be moved to adjust the loading position precisely by a stepping motor at a translation resolution of 0.1 νm. Cantilever beam type specimens with dimensions of 10 × 12 × 50 νm3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Very small cyclic load (ΔP = 0.1 - 40 mN) was able to be applied to the specimen successfully. This machine appears to be promising for evaluation of fatigue properties for micro-sized specimens for MEMS applications.

Development of Fatigue Pre-Cracking Method into Micro-Sized Specimens for Measuring Fracture Toughness

2002 ◽  
Vol 741 ◽  
Author(s):  
K. Takashima ◽  
S. Koyama ◽  
K. Nakai ◽  
Y. Higo
Keyword(s):  
Fracture Toughness ◽  
Fatigue Crack ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Testing Machine ◽  
Alloy Thin Film ◽  
Far Field ◽  
Type Specimens ◽  
Beam Type ◽  
Micro Cantilever

ABSTRACTIn our previous investigations [1, 2], we have demonstrated that the introduction of fatigue pre-crack ahead of a notch is required to measure reliable fracture toughness values even for micro-sized specimens. However, it is rather difficult to introduce a fatigue pre-crack into a micro-sized specimen as once a fatigue crack starts to grow then the fatigue fracture occurs within one thousand cycles and this makes it extremely difficult to control fatigue crack length. Therefore, a new fatigue pre-cracking method is required for measuring fracture toughness. In this investigation, a new fatigue pre-cracking method has been proposed for micro-sized specimens and fracture toughness tests were carried out for the micro-sized specimens with fatigue pre-crack. Micro-cantilever beam type specimens with dimensions of 10 × 10 × 50 μm3 were prepared from an electroless deposited Ni-P amorphous alloy thin film and notches were introduced by focused ion beam machining. Fatigue pre-cracks were introduced ahead of the notches by far-field cyclic compression method using a mechanical testing machine for micro-sized specimens (MFT2000). Fracture tests were also carried out using the testing machine. Fatigue pre-cracks with length of 0.2 μm were confirmed on the fracture surfaces ahead of the notches in the far-field cyclically compressed specimens. This indicates that the fatigue pre-cracking method developed in this investigation is promising for measuring accurate fracture toughness for micro-sized specimens for MEMS applications.

Microscale Fracture Toughness Testing of TiAl PST Crystals

2008 ◽  
Vol 1128 ◽  
Author(s):  
Daisuke Miyaguchi ◽  
Masaaki Otsu ◽  
Kazuki Takashima ◽  
Masao Takeyama
Keyword(s):  
Fracture Toughness ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Testing Machine ◽  
Type Specimens ◽  
Toughening Mechanisms ◽  
Two Phase ◽  
Fracture Toughness Testing ◽  
Crack Wake ◽  
Toughness Testing

AbstractA microscale fracture testing technique has been applied to examine the fracture properties of lamellar in TiAl PST crystals. Micro-sized cantilever specimens with a size ˜ 10×20×50 μm3 were prepared from Ti-48Al two-phase single crystals (PST) lamellar by focused ion beam (FIB) machining. Notches with a width of 0.5 μm and a depth of 5 μm were also introduced into the specimens by FIB. Two types of notch directions (interlamellar and translamellar) were selected when introducing the notches. Fracture tests were successfully completed using a mechanical testing machine for micro-sized specimens at room temperature. The fracture toughness (KQ) values of the interlamellar type specimens were obtained in the range 1.5–3.6 MPam1/2, while those of the translamellar specimens were 5.0–8.1 MPam1/2. These fracture toughness values are lower than those having been previously reported in conventional TiAl PST samples. For macro-sized specimens, extrinsic toughening mechanisms, including shear ligament bridging, act in the crack wake, and the crack growth resistance increases rapidly with increasing length of crack wake for lamellar structured TiAl alloys. In contrast, the crack length in microsized specimens is only 2–3 μm. This indicates that extrinsic toughening mechanisms are not activated in micro-sized specimens. This also indicates that intrinsic fracture toughness can be evaluated using microscale fracture toughness testing.

FIB-Based Fatigue Testing of Silicon Nitride Thin Films for Space Applications

2004 ◽  
Vol 851 ◽  
Author(s):  
Wen-Hsien Chuang ◽  
Rainer K. Fettig ◽  
Reza Ghodssi
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Focused Ion Beam ◽  
Fatigue Testing ◽  
Ion Beam ◽  
Fatigue Properties ◽  
Test Duration ◽  
Electrostatic Actuator ◽  
Space Applications ◽  
James Webb Space Telescope

ABSTRACTA novel micro-scale electrostatic actuator has been designed and fabricated to study fatigue properties of low-stress LPCVD silicon nitride thin films, which are the structural materials of microshutter arrays to be used in NASA's James Webb Space Telescope (JWST). To obtain different stress levels without high applied voltages, the electrostatic actuator was designed based on a resonant technique to achieve mechanical amplification. All fabricated devices were tested inside a focused-ion-beam (FIB) system with pressure of 10-6 torr at room temperature (23 ± 1 °C) and with the test duration ranging from 5 seconds to 8.5 hours, 105 to 109 cycles, respectively. From the experiment, no fatigue failure of low-stress LPCVD silicon nitride thin films has been observed up to 109 testing cycles, four orders of magnitude higher than the expected lifetime of the microshutter arrays. The presented test device and experimental technique can be extended to characterize fatigue properties for other thin film materials.

Corrosion Fatigue Tests of Micro-Sized Specimens

2000 ◽  
Vol 657 ◽  
Author(s):  
Y. Mizutani ◽  
Y. Higo ◽  
Y. Ichikawa ◽  
A. Morita ◽  
K. Takashima ◽  
...  
Keyword(s):  
Fatigue Test ◽  
Corrosion Fatigue ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Fatigue Tests ◽  
Test Method ◽  
Fatigue Properties ◽  
Mems Devices ◽  
Problems And Solutions ◽  
Beam Type

ABSTRACTCorrosion fatigue properties of micro-sized materials are extremely important to design MEMS devices and micro-machines used in corrosive environments. However, there have been few studies that investigate corrosion fatigue properties of micro-sized materials. Thus, it is necessary to develop a corrosion fatigue test method for micro-sized materials. However, there are several difficulties in corrosion fatigue tests on micro-sized specimens. It is also necessary to clarify the problems for the method and to find their solutions. In this investigation, a corrosion fatigue test method for micro-sized specimens has been developed and corrosion fatigue tests for micro-sized Ni-P amorphous alloy specimens have been carried out in a 0.9% NaCl solution. Specimens of cantilever-beam-type with dimensions of 10 × 12 × 50 μm3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Corrosion fatigue tests on the micro-sized specimens were succeeded, and environmental effects on fatigue properties of micro-sized specimens were clearly observed. Several problems and solutions for the method were described.

Fracture Behavior of Micro-Sized Specimens Prepared from a TiAl Thin Foil

2003 ◽  
Vol 795 ◽  
Author(s):  
K. Takashima ◽  
T. P. Halford ◽  
D. Rudinal ◽  
Y. Higo ◽  
P. Bowen
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Testing Machine ◽  
Lamellar Microstructure ◽  
Thin Foil ◽  
Type Specimens ◽  
Thin Foils ◽  
Fracture Tests ◽  
Micro Cantilever ◽  
Fully Lamellar

ABSTRACTFracture tests have been carried out on micro-sized specimens prepared from a fully lamellar γ-TiAl based alloy thin foil. Micro cantilever beam type specimens with dimensions = 50 × 10 × 20 μm were prepared from one lamellar colony of the thin foil by focused ion beam machining. Notches with a width of 0.5 μm and a depth of 10 μm were also introduced into the micro-sized specimens by focused ion beam machining. Notch directions were introduced into samples in order to select the trans- and inter-lamellar directions, respectively. Fracture tests were carried out using a mechanical testing machine for micro-sized specimens. Fracture tests for the micro-sized specimens were performed successfully, showing the fracture behaviour to be dependent upon the notch orientation. The fracture toughness of specimens with a notch direction perpendicular to the lamellar direction was 4.7 – 6.9 MPam1/2, while that with a notch direction in the inter-lamellar direction was 1.4 – 2.7 MPm1/2. This indicates that the orientation of the lamellar microstructure greatly affects the fracture properties of micro-sized components prepared from fully lamellar γ-TiAl based alloy thin foils. It is required to consider the results obtained in this investigation when designing actual micro scale structures using TiAl thin foils.

Fracture Toughness Measurement of a Micro-Sized Single Crystal Silicon

2005 ◽  
Vol 297-300 ◽  
pp. 292-298 ◽  
Author(s):  
Satoru Koyama ◽  
Kazuki Takashima ◽  
Yakichi Higo
Keyword(s):  
Fracture Toughness ◽  
Single Crystal ◽  
Ion Beam ◽  
Testing Machine ◽  
Single Crystal Silicon ◽  
Mems Devices ◽  
Type Specimens ◽  
Crystal Silicon ◽  
Fracture Toughness Measurement ◽  
Toughness Measurement

Reliability is one of the most critical issues for designing practical MEMS devices. In particular, the fracture toughness of micro-sized MEMS elements is important, as micro/nano-sized flaws can act as a crack initiation sites to cause failure of such devices. Existing MEMS devices commonly use single crystal silicon. Fracture toughness testing upon micro-sized single crystal silicon was therefore carried out to examine whether a fracture toughness measurement technique, based upon the ASTM standard, is applicable to 1/1000th sized silicon specimens. Notched cantilever beam type specimens were prepared by focused ion beam machining. Two specimens types with different notch orientations were prepared. The notch plane/direction were (100)/[010], and (110)/[ ＿ ,110], respectively. Fracture toughness tests were carried out using a mechanical testing machine for micro-sized specimens. Fracture has been seen to occur in a brittle manner in both orientations. The provisional fracture toughness values (KQ) are 1.05MPam1/2 and 0.96MPam1/2, respectively. These values meet the micro-yielding criteria for plane strain fracture toughness values (KIC). Fracture toughness values for the orientations tested are of the same order as values in the literature. The results obtained in this investigation indicate that the fracture toughness measurement method used is applicable for micro-sized components of single crystal silicon in MEMS devices.

The Fatigue Properties of the M27 Higher Strength Bolt in the Grid Structure with Bolted Spherical Joints

2016 ◽  
Vol 851 ◽  
pp. 775-779
Author(s):  
Chao Zhang ◽  
Hong Gang Lei ◽  
Shao Jie Tian ◽  
Xu Yang
Keyword(s):  
Finite Element ◽  
Fatigue Failure ◽  
Fatigue Testing ◽  
Testing Machine ◽  
Fatigue Properties ◽  
Metallographic Analysis ◽  
Constant Amplitude ◽  
Grid Structure ◽  
Finite Element Software ◽  
Loading Device

Under the suspended crane loading, the key to the fatigue of the grid structure with bolt-sphere joints is the fatigue of the higher strength bolt. By now, there are not any research reports about the fatigue properties of M27 higher strength bolt at home and abroad. With the aid of the fatigue-testing machine and the loading device, this paper will have 8 constant amplitude fatigue experiments on test-piece, and will get the S-N curve of the higher strength bolt. With the aid of the metallographic analysis, this paper studies the mechanism and influencing factors of the fatigue failure; and with the aid of the finite element software ABQUAS, it analyzes and gets the stress concentration factor of the M27 higher strength bolt, and verifies the position of the fatigue failure.

Micro Fracture Toughness Testing of TiAl Based Alloys with a Fully Lamellar Structure

2004 ◽  
Vol 842 ◽  
Author(s):  
K. Takashima ◽  
T. P. Halford ◽  
D. Rudinal ◽  
Y. Higo ◽  
M. Takeyama
Keyword(s):  
Fracture Toughness ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Testing Machine ◽  
High Fracture Toughness ◽  
Fracture Mechanisms ◽  
High Fracture ◽  
Fundamental Information ◽  
Micrometer Scale ◽  
Fully Lamellar

ABSTRACTA micro-sized testing technique has been applied to investigate the fracture properties of lamellar colonies in a fully lamellar Ti-46Al-5Nb-1W alloy. Micro-sized cantilever specimens with a size ≈ 10 × 10 × 50 μm3 were prepared by focused ion beam machining. Notches with a width of 0.5 μm and a depth of 5 μm were also introduced into the micro-sized specimens by focused ion beam machining. Fracture tests were successfully completed using a mechanical testing machine for micro-sized specimens at room temperature. The fracture toughness (KQ) values obtained were in the range 1.4–7 MPam1/2. Fracture surface observations indicate that these variations are attributable to differences in local lamellar orientations ahead of the notch. These fracture toughness values are also lower than those having been previously reported in conventional samples. This may be due the absence of significant extrinsic toughening mechanisms in these micro-sized specimens. Fracture mechanisms of these alloys are also considered on the micrometer scale. The results obtained in this investigation give important and fundamental information on the development of TiAl based alloys with high fracture toughness.

Experiment Research for Fracture Toughness of PAN-Based Carbon Fibers

2011 ◽  
Vol 462-463 ◽  
pp. 1361-1366 ◽  
Author(s):  
Bo Ming Zhang ◽  
Yu Fen Wu
Keyword(s):  
Fracture Toughness ◽  
Tensile Strength ◽  
Carbon Fibers ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Testing Machine ◽  
High Strength ◽  
Carbon Filaments ◽  
Fracture Theory ◽  
In Virtue Of

For the sake of the carbon filaments’ fracture toughness, using the focused ion beam (FIB) to etch the carbon fibers and got different tensile strength, and all specimens were stretched on an Instron-type filaments testing machine and got the samples’ tensile strength, The crack-to-mirror size ratio was assumed as a constant, In virtue of Griffith fracture theory, Fracture toughness (KΙC) of representative high-strength type PAN (polyacrylonitrile)-based carbon fibers, Torayca T300 and T800, were estimated to be 1MPam1/2 from the tensile strength vs. fracture mirror size relation.

The Relationship Between Tensile and Fatigue Strength of Friction Welded Steel Joints

2015 ◽  
Author(s):  
S. T. Selvamani ◽  
K. Palanikumar ◽  
K. Shanmugam ◽  
S. Divagar ◽  
M. Vigneshwar
Keyword(s):  
Fatigue Strength ◽  
Fatigue Testing ◽  
High Carbon Steel ◽  
Testing Machine ◽  
Fatigue Properties ◽  
Uniaxial Tensile ◽  
Sensitivity Factor ◽  
Welded Steel ◽  
Steel Joints ◽  
The Relationship

The friction welding of AISI 52100 grade low chromium and high carbon steel joints are investigated in this work to evaluate the fatigue life of the joints by conducting the experiments using servo hydraulic fatigue testing machine at different stress levels. All the experiments are conducted under uniaxial tensile loading condition (stress ratio=0). Fatigue strength, fatigue notch factor (Kf) and notch sensitivity factor (q) are evaluated for the optimized joints and the relationship between tensile and fatigue properties of Fully Deformed None (FDZ) is established. Finally, the Characteristics of friction welded joint is investigated with the help of Scanning Electron Microscope and Optical Microscopy under optimized condition.

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