Method and Instrumentation for Nondestructive Characterization of Surface Area and Pore Size Distribution of Thin Films in Their Deposited State
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ABSTRACTTPL has developed a method and instrumentation system for characterizing the surface area and pore size distribution of a thin-film or coating in its as-deposited state. Errors associated with destructive removal of the film are avoided and small sample sizes can be utilized with high-fidelity results.
2001 ◽
Vol 72
(7)
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pp. 3038-3045
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2019 ◽
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1994 ◽
Vol 29
(9)
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pp. 1183-1192
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