Ion Irradiation Induced Crosslinking Effects on Mechanical Properties of Photoresist Films

1999 ◽  
Vol 585 ◽  
Author(s):  
I. T. S. Garcia ◽  
D. Samios ◽  
F. C. Zawislaka ◽  
J. A. H. Da Jornada ◽  
C. E. Foerster ◽  
...  

AbstractWe investigate the crosslinking process in ion irradiated AZ 1350J™ photoresist. The films were deposited on clean silicon wafers and irradiated with 380 keV He ions in the fluence range of 1013 to 1016 He.cm-2, corresponding to average deposited energy densities from 0.02 to 20 eV. Å-3.respectively. Nanoindentation, Raman spectroscopy as well as gel content and density measurements have been used to determine mechanical and structural properties of the irradiated films. The results show that the irradiation induces crosslinking of the polymeric chains but also produces carbonization of the films. For deposited energy densities up to 2 eV.Å-3. the crosslinking process is predominant and is mainly responsible for the increase of hardness and Young's modulus by respectively 5 and 2 times in relation to the values of the pristine film and for the gel content of 90%. For deposited energy densities larger than 2 eV.Å-3, the photoresist film is progressively transformed into an amorphous carbon layer as is shown by the Raman results, and also by the increase of the density at a deposited energy of 20 eV.Å-3.

2005 ◽  
Vol 875 ◽  
Author(s):  
A. Debelle ◽  
G. Abadias ◽  
A. Michel ◽  
C. Jaouen ◽  
Ph. Guérin ◽  
...  

AbstractEpitaxial Mo(110)/Ni(111) superlattices were grown on (1120) single-crystal sapphiresubstrates, by ion beam sputtering (IBS) and thermal evaporation (TE), in order to investigate the role of deposited energy on the interfacial mixing process observed in Mo sublayers. To separate intermixing and growth stress contributions, a careful and detailed characterization of the stress/strain state of both samples was performed by X-ray Diffraction (XRD). Non-equal biaxial coherency stresses are observed in both samples. For the IBS specimen, an additional source of stress, of hydrostatic type, due to growth-induced point defects, is present, resulting in a triaxial stress state. The use of ion irradiation to achieve a controlled stress relaxation can provide additional data and, as shown elsewhere, allows to obtain the stress-free lattice parameter a0 solely linked to chemical effects. For the TE sample, a standard biaxial analysis gives a0. In both samples, the a0 value is lower than the bulk lattice parameter, due to the presence of intermixed Mo(Ni) layers. However, the intermixing is larger in the sputtered Mo sublayers than in the thermal evaporated ones, putting forward the prime role of energy and/or momentum transfer occurring during energetic bombardment.


1989 ◽  
Vol 169 ◽  
Author(s):  
J. C. Barbour ◽  
J. F. Kwak ◽  
E. L. Venturini ◽  
D. S. Ginley ◽  
P. S. Peercy

AbstractThe effects of oxygen and helium ion irradiation on the superconducting properties of Tl2Ca2Ba2Cu3010 thin films were investigated. The transition temperature and width were monitored as a function of ion fluence using both magnetization and resistivity measurements. These data suggest that superconductivity is completely suppressed at 0.020 dpa for both He and 0 ion irradiation. Further, the rate of decrease in Tc as a function of deposited energy showed that the dominant mechanism causing damage-induced suppression of Tc in these films was from atomic collisions.


2002 ◽  
Vol 411 (2) ◽  
pp. 256-261 ◽  
Author(s):  
C.E Foerster ◽  
I.T.S Garcia ◽  
F.C Zawislak ◽  
F.C Serbena ◽  
C.M Lepienski ◽  
...  

2009 ◽  
Vol 615-617 ◽  
pp. 397-400 ◽  
Author(s):  
Gaetano Izzo ◽  
Grazia Litrico ◽  
Andrea Severino ◽  
Gaetano Foti ◽  
Francesco La Via ◽  
...  

The defects produced by 7.0 MeV C+ irradiation in 4H-SiC epitaxial layer were followed by Deep Level Transient Spectroscopy, current-voltage measurements and Transmission Electron Microscopy in a large fluence range (109-51013 ions/cm2). At low fluence (109 -1010 ions/cm2), the formation of three main level defects located at 0.68 eV, 0.98 eV and 1.4 eV below the conduction band edge is detected. The trap concentration increases with ion fluence suggesting that these levels are associated to the point defects generated by ion irradiation. In this fluence range the leakage current of the diodes does not change. At higher fluence an evolution of defects occurs, as the concentration of traps at 0.68 eV and 1.4 eV decreases, while the intensity of the level at 0.98 eV remains constant. In this fluence range complex defects are formed and an increase of a factor five in the leakage current is measured.


RSC Advances ◽  
2015 ◽  
Vol 5 (79) ◽  
pp. 64247-64253 ◽  
Author(s):  
Xirui Lu ◽  
Yi Ding ◽  
Xiaoyan Shu ◽  
Xueli Mao ◽  
Xiaolin Wang

A number of compositions with the general stoichiometry of Gd2CexZr2−xO7 (0 ≤ x ≤ 2) ceramics have been synthesized and received irradiation tests at room temperature with Xe20+ ions in a broad fluence range.


1998 ◽  
Vol 517 ◽  
Author(s):  
J.E.E. Baglin ◽  
A.J. Kellock ◽  
T.T. Bardin ◽  
T. Karis ◽  
D. Keck

AbstractThe mechanisms and effectiveness of corrosion protection provided by thin ion-beam carbon coatings on Cu, Fe, Mn and Co are discussed. A thin (# 10 Å) layer of protective carbon is produced on metal surfaces by ion-beam dissociation of adventitious or intentional hydrocarbon adsorbates. Below 200°C, oxidation is strongly inhibited, as is corrosion in a humid, sulphurous ambient. Above 200°C, the carbon layer may itself be destroyed by oxidation, due to catalytic action of the metal surface. Thicker PVD carbon (up to 60 Å) was not an effective corrosion barrier, even after ion irradiation. A technique for producing high integrity ion-beam carbon layers of high stability and durability is discussed.


2020 ◽  
Vol 17 (36) ◽  
pp. 7-17
Author(s):  
Mariana Babilone de Souza FERREIRA ◽  
◽  
DOS SANTOS Claudio Gouvêa

Polyethylene (PE) is considered one of the most versatile thermoplastics available today. However, it exhibits several limitations related to its low melting point, low heat resistance, tendency to crack propagation, and its low resistance to rupture under stress. In order to overcome these deficiencies, several processes for crosslinking PE chains were developed, which makes this material more stable to temperature changes. In this work, methods based on peroxide (PEX-A) and silane (PEX-B) as chemical modification agents for PE chain crosslinking were analyzed, aiming to apply PE in pipes for conduction water. The materials were characterized by infrared spectroscopy (FTIR), gel content, and thermal analysis (TGA and DSC) to achieve those objectives. Also, some mechanical properties such as tensile strength and hardness and the determination of the heat deflection temperature (HDT) were evaluated. Spectra demonstrated the presence of the functional groups characteristic of PE and the incorporation of siloxane groups in PEX-B. Gel content values obtained were above 60% and indicated the formation of crosslinked chains between the molecules of the polymers. The thermal analysis suggests a greater efficiency in forming a chain network by the silane crosslinking process compared to the peroxide process. As for the mechanical tests, they also showed improvement in the mechanical properties of the crosslinked polymer when compared to the respective original PE. Thus, the silane method provided sufficient results to conclude that the properties evaluated are superior compared to the peroxide crosslinking method.


Materials ◽  
2021 ◽  
Vol 14 (21) ◽  
pp. 6289
Author(s):  
Damjan Iveković ◽  
Petar Žugec ◽  
Marko Karlušić

High energy ion irradiation is an important tool for nanoscale modification of materials. In the case of thin targets and 2D materials, which these energetic ions can pierce through, nanoscale modifications such as production of nanopores can open up pathways for new applications. However, materials modifications can be hindered because of subsequent energy release via electron emission. In this work, we follow energy dissipation after the impact of an energetic ion in thin graphite target using Geant4 code. Presented results show that significant amount of energy can be released from the target. Especially for thin targets and highest ion energies, almost 40% of deposited energy has been released. Therefore, retention of deposited energy can be significantly altered and this can profoundly affect ion track formation in thin targets. This finding could also have broader implications for radiation hardness of other nanomaterials such as nanowires and nanoparticles.


Author(s):  
D.I. Potter ◽  
A. Taylor

Thermal aging of Ni-12.8 at. % A1 and Ni-12.7 at. % Si produces spatially homogeneous dispersions of cuboidal γ'-Ni3Al or Ni3Si precipitate particles arrayed in the Ni solid solution. We have used 3.5-MeV 58Ni+ ion irradiation to examine the effect of irradiation during precipitation on precipitate morphology and distribution. The nearness of free surfaces produced unusual morphologies in foils thinned prior to irradiation. These thin-foil effects will be important during in-situ investigations of precipitation in the HVEM. The thin foil results can be interpreted in terms of observations from bulk irradiations which are described first.Figure 1a is a dark field image of the γ' precipitate 5000 Å beneath the surface(∿1200 Å short of peak damage) of the Ni-Al alloy irradiated in bulk form. The inhomogeneous spatial distribution of γ' results from the presence of voids and dislocation loops which can be seen in the bright field image of the same area, Fig. 1b.


Author(s):  
G. Das ◽  
R. E. Omlor

Fiber reinforced titanium alloys hold immense potential for applications in the aerospace industry. However, chemical reaction between the fibers and the titanium alloys at fabrication temperatures leads to the formation of brittle reaction products which limits their development. In the present study, coated SiC fibers have been used to evaluate the effects of surface coating on the reaction zone in the SiC/IMI829 system.IMI829 (Ti-5.5A1-3.5Sn-3.0Zr-0.3Mo-1Nb-0.3Si), a near alpha alloy, in the form of PREP powder (-35 mesh), was used a茸 the matrix. CVD grown AVCO SCS-6 SiC fibers were used as discontinuous reinforcements. These fibers of 142μm diameter contained an overlayer with high Si/C ratio on top of an amorphous carbon layer, the thickness of the coating being ∽ 1μm. SCS-6 fibers, broken into ∽ 2mm lengths, were mixed with IMI829 powder (representing < 0.1vol%) and the mixture was consolidated by HIP'ing at 871°C/0. 28GPa/4h.


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