X-Ray and Tem Studies of Short-Range Order in Al1−xInxAs Thin Films

X-ray scattering and transmission electron microscopy (TEM) have been used to study short-range order in Al1−xlnxAs thin films grown by molecular beam epitaxy. Two samples grown on (001) InP at temperatures of 370°C and 400°C are characterized. The first exhibits simultaneous triple-period-A and CuPt-A short-range order with a rather short correlation range of about 2.4 nm normal to the (111) planes. Within these (individual) planes the concentration, however, is uniform over a considerably greater distance – about 6 to 9 nm – leading to a highly anisotropic scattering. This observation of triple-period short-range ordering in a sample that exhibits 2×1 surface reconstruction during growth is unexpected. We also report on the first observation of the coexistence of triple-period-A and CuPt-B short-range order. The diffuse scattering exhibits significant intensity anomalies that we attribute to atomic displacements associated with the short-range order. The second sample exhibits CuPt-B short-range ordering with scattering that is significantly streaked, suggestive of lamellar-shaped ordered domains. This sample also exhibits intensity anomalies that must be associated with atomic displacements. The first sample contains a high density of twin lamellae, while both samples contain high densities of stacking faults leading to additional narrow streaking along symmetry-allowed 〈111〉 directions. These growth faults most likely arise from the relatively low growth temperatures.