Characterization of Slurry System and Suppression of Oxide Erosion in Aluminum CMP (Chemical-Mechanical Planarization)

1999 ◽  
Vol 566 ◽  
Author(s):  
Lei Zhong ◽  
Jerry Yang ◽  
Karey Holland ◽  
Joost Grillaert ◽  
Katia Devriend ◽  
...  
Keyword(s):  
Titanium Nitride ◽  
Barrier Layer ◽  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Experimental Result ◽  
Mixture Ratio ◽  
Slurry System ◽  
First Time

In this work, we investigated the dependence of the removal rate upon the oxidizer (peroxide) addition into commercially available slurries for a variety of films such as aluminum, titanium, titanium nitride and oxide. We found that the barrier layer materials were extremely sensitive to the peroxide addition while the removal rate varied only slightly for aluminum and oxide. The selectivity to titanium and titanium nitride drops from as high as 1000 to almost close to 1 as the mixture ratio (peroxide : slurry) increases. We proposed that the barrier layer be used to protect the oxide from being over-exposed and suppress the erosion eventually. This can be easily realized by dividing the process into two steps with each step being run at a specific peroxide mixture ratio. The experimental result unambiguously proved, for the first time, the effectiveness of this approach.

Selectivity Studies On Tantalum Barrier Layer In Copper CMP

2003 ◽  
Vol 767 ◽  
Author(s):  
Arun Vijayakumar ◽  
Tianbao Du ◽  
Kalpathy B. Sundaram ◽  
Vimal Desai
Keyword(s):  
Barrier Layer ◽  
Photoelectron Spectroscopy ◽  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Electrochemical Techniques ◽  
Copper Metallization ◽  
Force Microscopy ◽  
Atomic Force ◽  
Surface Analysis Techniques ◽  
Diffusion Barrier Layer

AbstractCopper metallization in sub-0.18 μm semiconductor devices is achieved by combining the dual damascence techniques followed by chemical mechanical planarization (CMP). Tantalum and its nitride have been identified as the diffusion barrier layer for copper metallization. However, the wide differences in properties between copper and tantalum layers result in selectivity problems during CMP process. The aim of this work is to obtain a better understanding on the slurry selectivity for copper and tantalum and to develop slurries with best selectivity performance. In this work, the effect of several chemical parameters (abrasive type, oxidizer type, concentration, pH etc.) was studied through static and dynamic tests using advanced electrochemical techniques and surface analysis techniques. The surface layers of the statically etched copper and tantalum discs were investigated using X-ray photoelectron spectroscopy (XPS) and surface planarity was studied using atomic force microscopy (AFM). Polishing rates results show that alumina-based slurry polished copper very well whereas tantalum removal rate was low. However, for the silica-based slurry the tantalum shows much higher removal rate than copper and better surface planarity was obtained.

A Review on Chemical Mechanical Planarization of Barrier Layer Metals

2021 ◽  
Vol 882 ◽  
pp. 171-180
Author(s):  
Arpita Shukla ◽  
S. Noyel Victoria ◽  
R. Manivannan
Keyword(s):  
Barrier Layer ◽  
Material Removal ◽  
Semiconductor Device ◽  
Removal Rate ◽  
Chemical Mechanical Planarization ◽  
Abrasive Particle ◽  
Mechanical Action ◽  
Complexing Agent ◽  
Whole Process ◽  
Front End

Chemical mechanical planarization (CMP) is recognized to be one of the finest polishing techniques which provides a smooth and globally planarized metal surface in the field of semiconductor device manufacturing. This process aids in material removal followed with a well finished and planarized surface by a combination of both chemical and mechanical action imparted by oxidizer and abrasive particle respectively. Semiconductor device manufacturing process is an amalgamation of two sub processes i.e. front end of line (FEOL) and back end of line (BEOL). The whole process consists of different segments comprising of several types of material that need to be planarized. The slurry components play an imperative role in metal CMP. It comprises abrasive, oxidizer, and several additives such as complexing agent, corrosion inhibitor, pH adjustor, slurry stabilizer, etc. and each imparts diverse impact on the material needs to be polished. One of the main topics of concern in this area is the removal rate selectivity of interconnects metal to the barrier layer metal. Thus, the reported review work efforts to emphasize the planarization of barrier layer materials, the various key ingredients employed in metal CMP and removal rate selectivity between interconnects and barrier layer metal.

scholarly journals Fine Characterization of Sand Body in the Front of the Fluvial Delta: Taking the VII Oil Group of N21 Reservoir in Gasikule Oilfield as an Example

Geofluids ◽  
2021 ◽  
Vol 2021 ◽  
pp. 1-14
Author(s):  
Jun Sheng ◽  
Jincheng Liu ◽  
Qingshan Qi ◽  
Xin Li ◽  
Wulin Tan ◽  
...  
Keyword(s):  
Barrier Layer ◽  
Development Model ◽  
Modeling Technology ◽  
Body Development ◽  
Sand Body ◽  
Sedimentary System ◽  
First Time

Taking the VII oil group of N21 reservoir in Gasikule Oilfield as an example, the sedimentary time unit was divided into the barrier layer, interbed, and sand bed by analyzing the sedimentary system and sand body development model in this paper. The single sand body was analyzed for the sand bed time unit. The residual muddy intercalation period division theory was proposed for the first time to divide the sedimentary periods of the sedimentary time unit of the sand bed. Finally, a new “sandwich” layer point coincidence modeling technology was proposed to characterize the sedimentary time units of a barrier layer accurately and interbed and finely describe the sedimentary time unit of the multiperiod sand bed.

scholarly journals On the optimal use of isotherm models for the characterization of biosorption of lead onto algae

2016 ◽  
Author(s):  
F. Brouers ◽  
Tariq Al-Musawi
Keyword(s):  
Removal Rate ◽  
Coefficient Of Determination ◽  
Isotherm Models ◽  
Good Representation ◽  
Nonlinear Fitting ◽  
Linearization Methods ◽  
Complete Set ◽  
The Hill ◽  
First Time

For the first time we apply a new method based on the mathematical derivation of some known isotherm from the Burr function which describes many birth-death (sorption-desorption) phenomena in ecology and economy. Therefore, in this study the experimental isotherm data of biosorption of Pb(II) onto algae was modeled to Langmuir, Hill-Sips, Brouers-Sotolongo, Brouers-Gaspard, and Redlich-Peterson isotherm models. The parameters of each model were determined by nonlinear fitting algorithms using Mathematica program. The maximum Pb(II) removal rate increased with the increase of temperature and reached the maximum value (98%) at the temperature of 40 C. The results showed that the Hill-Sips and the Brouers-Sotolongo isotherms were definitely the most suitable models to satisfactorily describe biosorption of Pb(II) on the algal biomass. In addition, as these two models gave very close results, the use of an intermediate one the Brouers-Gaspard isotherm model could also describe the sorption in most cases. High coefficient of determination values was obtained by using nonlinear methods and these findings are contrary to most works in this field that use linearization methods. Further, this study showed that a complete set of data is necessary to have a good representation of the isotherm and using only coefficient of determination is not always an adequate tool to compare the goodness of the nonlinear fit of an isotherm models.

TBE in Sweden

2020 ◽  
Keyword(s):  
Genetic Characterization ◽  
Immunoglobulin M ◽  
Enzyme Linked Immunosorbent Assay ◽  
Second Phase ◽  
Serum Samples ◽  
Tick Borne Encephalitis ◽  
Specific Immunoglobulin ◽  
Tick Borne Encephalitis Virus ◽  
First Time

Tick-borne encephalitis virus (TBEV) was isolated for the first time in Sweden in 1958 (from ticks and from 1 tick-borne encephalitis [TBE] patient).1 In 2003, Haglund and colleagues reported the isolation and antigenic and genetic characterization of 14 TBEV strains from Swedish patients (samples collected 1991–1994).2 The first serum sample, from which TBEV was isolated, was obtained 2–10 days after onset of disease and found to be negative for anti-TBEV immunoglobulin M (IgM) by enzyme-linked immunosorbent assay (ELISA), whereas TBEV-specific IgM (and TBEV-specific immunoglobulin G/cerebrospinal fluid [IgG/CSF] activity) was demonstrated in later serum samples taken during the second phase of the disease.

Chemical Constituents and Antibacterial Activity of Cissus Aralioides.

2020 ◽  
Vol 17 ◽  
Author(s):  
Balogun Olaoye Solomon ◽  
Ajayi Olukayode Solomon ◽  
Owolabi Temitayo Abidemi ◽  
Oladimeji Abdulkarbir Oladele ◽  
Liu Zhiqiang
Keyword(s):  
Plant Extract ◽  
Chemical Constituents ◽  
Ethyl Acetate Fraction ◽  
Antibacterial Activities ◽  
Sub Saharan Africa ◽  
Chromatographic Purification ◽  
Whole Plant ◽  
Sub Saharan ◽  
First Time

: Cissus aralioides is a medicinal plant used in sub-Saharan Africa for treatment of infectious diseases; however the chemical constituents of the plant have not been investigated. Thus, in this study, attempt was made at identifying predominant phytochemical constituents of the plant through chromatographic purification and silylation of the plant extract, and subsequent characterization using spectroscopic and GC-MS techniques. The minimum inhibitory concentration (MICs) for the antibacterial activities of the plant extract, chromatographic fractions and isolated compounds were also examined. Chromatographic purification of the ethyl acetate fraction from the whole plant afforded three compounds: β-sitosterol (1), stigmasterol (2) and friedelin (3). The phytosterols (1 and 2) were obtained together as a mixture. The GC-MS analysis of silylated extract indicated alcohols, fatty acids and sugars as predominant classes, with composition of 24.62, 36.90 and 26.52% respectively. Results of MICs indicated that friedelin and other chromatographic fractions had values (0.0626-1.0 mg/mL) comparable with the standard antibiotics used. Characterization of natural products from C. aralioides is being reported for the first time in this study.

Green Synthesis and Spectroscopic Studies of Ag-rGO Nanocomposites for Highly Selective Mercury (II) Sensing

2018 ◽  
Vol 9 (1) ◽  
pp. 101-108 ◽  
Author(s):  
Shubhangi J. Mane-Gavade ◽  
Sandip R. Sabale ◽  
Xiao-Ying Yu ◽  
Gurunath H. Nikam ◽  
Bhaskar V. Tamhankar
Keyword(s):  
Green Synthesis ◽  
Color Change ◽  
Limit Of Detection ◽  
Aqueous Media ◽  
Suitable Condition ◽  
Cost Effective ◽  
Spectroscopic Studies ◽  
Calibration Plot ◽  
First Time

Introduction: Herein we report the green synthesis and characterization of silverreduced graphene oxide nanocomposites (Ag-rGO) using Acacia nilotica gum for the first time. Experimental: We demonstrate the Hg2+ ions sensing ability of the Ag-rGO nanocomposites form aqueous medium. The developed colorimetric sensor method is simple, fast and selective for the detection of Hg2+ ions in aqueous media in presence of other associated ions. A significant color change was noticed with naked eye upon Hg2+ addition. The color change was not observed for cations including Sr2+, Ni2+, Cd2+, Pb2+, Mg2+, Ca2+, Fe2+, Ba2+ and Mn2+indicating that only Hg2+ shows a strong interaction with Ag-rGO nanocomposites. Under the most suitable condition, the calibration plot (A0-A) against concentration of Hg2+ was linear in the range of 0.1-1.0 ppm with a correlation coefficient (R2) value 0.9998. Results & Conclusion The concentration of Hg2+ was quantitatively determined with the Limit of Detection (LOD) of 0.85 ppm. Also, this method shows excellent selectivity towards Hg2+ over nine other cations tested. Moreover, the method offers a new cost effective, rapid and simple approach for the detection of Hg2+ in water samples.

scholarly journals Waste-Based One-Part Alkali Activated Materials

Materials ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 2911
Author(s):  
Margarida Gonçalves ◽  
Inês Silveirinha Vilarinho ◽  
Marinélia Capela ◽  
Ana Caetano ◽  
Rui Miguel Novais ◽  
...  
Keyword(s):  
Compressive Strength ◽  
Microstructural Analysis ◽  
Construction Materials ◽  
Sodium Metasilicate ◽  
High Compressive Strength ◽  
Hardened State ◽  
First Time ◽  
Furnace Slag ◽  
Alkali Activated

Ordinary Portland Cement is the most widely used binder in the construction sector; however, a very high carbon footprint is associated with its production process. Consequently, more sustainable alternative construction materials are being investigated, namely, one-part alkali activated materials (AAMs). In this work, waste-based one-part AAMs binders were developed using only a blast furnace slag, as the solid precursor, and sodium metasilicate, as the solid activator. For the first time, mortars in which the commercial sand was replaced by two exhausted sands from biomass boilers (CA and CT) were developed. Firstly, the characterization of the slag and sands (aggregates) was performed. After, the AAMs fresh and hardened state properties were evaluated, being the characterization complemented by FTIR and microstructural analysis. The binder and the mortars prepared with commercial sand presented high compressive strength values after 28 days of curing-56 MPa and 79 MPa, respectively. The mortars developed with exhausted sands exhibit outstanding compressive strength values, 86 and 70 MPa for CT and CA, respectively, and the other material’s properties were not affected. Consequently, this work proved that high compressive strength waste-based one-part AAMs mortars can be produced and that it is feasible to use another waste as aggregate in the mortar’s formulations: the exhausted sands from biomass boilers.

scholarly journals Isolation and characterization of a new cold-active protease from psychrotrophic bacteria of Western Himalayan glacial soil

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Saleem Farooq ◽  
Ruqeya Nazir ◽  
Shabir Ahmad Ganai ◽  
Bashir Ahmad Ganai
Keyword(s):  
Specific Activity ◽  
Temperature Range ◽  
Psychrotrophic Bacteria ◽  
Isolation And Characterization ◽  
Cold Active ◽  
Active Protease ◽  
Quantitative Screening ◽  
First Time ◽  
Low K

AbstractAs an approach to the exploration of cold-active enzymes, in this study, we isolated a cold-active protease produced by psychrotrophic bacteria from glacial soils of Thajwas Glacier, Himalayas. The isolated strain BO1, identified as Bacillus pumilus, grew well within a temperature range of 4–30 °C. After its qualitative and quantitative screening, the cold-active protease (Apr-BO1) was purified. The Apr-BO1 had a molecular mass of 38 kDa and showed maximum (37.02 U/mg) specific activity at 20 °C, with casein as substrate. It was stable and active between the temperature range of 5–35 °C and pH 6.0–12.0, with an optimum temperature of 20 °C at pH 9.0. The Apr-BO1 had low Km value of 1.0 mg/ml and Vmax 10.0 µmol/ml/min. Moreover, it displayed better tolerance to organic solvents, surfactants, metal ions and reducing agents than most alkaline proteases. The results exhibited that it effectively removed the stains even in a cold wash and could be considered a decent detergent additive. Furthermore, through protein modelling, the structure of this protease was generated from template, subtilisin E of Bacillus subtilis (PDB ID: 3WHI), and different methods checked its quality. For the first time, this study reported the protein sequence for psychrotrophic Apr-BO1 and brought forth its novelty among other cold-active proteases.

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