Measurement of Thin Film Mechanical Properties by Microbeam Bending

1999 ◽  
Vol 563 ◽  
Author(s):  
J. Florando ◽  
H. Fujimoto ◽  
Q. Ma ◽  
O. Kraft ◽  
R. Schwaiger ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Metal Film ◽  
Constitutive Law ◽  
Stress Strain ◽  
Strain Behavior ◽  
Testing Method ◽  
Beam Geometry ◽  
Simple Numerical Model

AbstractAn improved microbeam bending technique has been developed for the study of mechanical properties of thin films on substrates. This testing method utilizes a triangular beam geometry and improved micromachining techniques compared to previously used methods. The technique permits the stress-strain law for a metal film on a substrate to be determined. Single crystal Si beams and bi-layer Si/Al beams of lengths 25–100 pgm have been fabricated and tested. The beams are deflected with a nanoindenter, which accurately imposes a load on the beam and measures the corresponding displacement. For the bi-layer beams, a simple numerical model utilizing a Ramburg-Osgood constitutive law the film has been developed to determine the stress-strain behavior of the Al film.

scholarly journals High Temperature Thermo-Mechanical Properties of Praseodymium Doped Ceria Thin Films Measured Two Ways

2022 ◽  
Author(s):  
Yuxi Ma ◽  
Quan Zhou ◽  
Jason D. Nicholas
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
High Temperature ◽  
Temperature Dependence ◽  
Internal Stress ◽  
Expansion Coefficient ◽  
Mechanical Stability ◽  
Doped Ceria ◽  
Stress Strain ◽  
Chemical Expansion

The temperature dependence of a Mixed Ionic Electronic Conducting (MIEC) material’s thermo-chemical expansion coefficient, biaxial modulus, and/or Young’s modulus are crucial in determining the internal stress, strain, and/or mechanical stability...

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

1988 ◽  
Vol 3 (5) ◽  
pp. 931-942 ◽  
Author(s):  
T. P. Weihs ◽  
S. Hong ◽  
J. C. Bravman ◽  
W. D. Nix
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Single Layer ◽  
Beam Theory ◽  
New Technique ◽  
Young’S Moduli ◽  
Silicon Micromachining ◽  
A New Technique

The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO2 have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.

Tensile Stress-Strain Properties of a-C:H (Diamond-Like Carbon) thin Films

1991 ◽  
Vol 239 ◽  
Author(s):  
Paul D. Garrett ◽  
Brian K. Daniels
Keyword(s):  
Thin Film ◽  
Tensile Stress ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Stress Strain ◽  
Film Coatings ◽  
Strain Behavior ◽  
Thin Film Coatings ◽  
Mode Of Failure

ABSTRACTFundamental mechanical properties of a-C:H (amorphous or “diamond-like” carbon, DLC) thin film coatings have been investigated. Coatings were deposited by a methane-argon RF plasma on polycarbonate films. Tensile stress-strain behavior of the coated polymer was studied using an extensometer to monitor strain. The differences in moduli between uncoated and coated samples were used to calculate apparent coating moduli, which varied from 1 GPA to 82 GPa. The mode of failure was observed via in-situ optical microscopy during deformation. Intrinsic bond strength of the coating/substrate interface was estimated from crack spacings in the deformed coating.

scholarly journals Investigation of the Mechanical Properties of St. Lawrence River Ice

1971 ◽  
Vol 8 (2) ◽  
pp. 163-169 ◽  
Author(s):  
L. W. Gold ◽  
A. S. Krausz
Keyword(s):  
Mechanical Properties ◽  
Strain Rate ◽  
Yield Stress ◽  
Power Law ◽  
River Ice ◽  
Stress Strain ◽  
Strain Behavior ◽  
Brittle Transition ◽  
Ductile To Brittle Transition ◽  
St Lawrence River

Observations are reported on the stress–strain behavior at −9.5 ± 0.5 °C of four types of ice obtained from the St. Lawrence River. The ice was subject to nominal rates of strain covering the range 2.1 × 10−5 min−1 to 5.8 × 10−2 min−1. A ductile-to-brittle transition was observed for strain rate of about 10−2 min−1. In the ductile range the four types had an upper yield stress that increased with strain rate according to a power law.

Resonant Fatigue Testing of Cantilever Specimens Prepared from Thin Films

2008 ◽  
Vol 1139 ◽  
Author(s):  
Kwangsik Kwak ◽  
Masaaki Otsu ◽  
Kazuki Takashima
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Cantilever Beam ◽  
Microelectromechanical Systems ◽  
Fatigue Testing ◽  
Crystalline Silicon ◽  
Gold Foil ◽  
Fatigue Properties ◽  
Mems Devices ◽  
Testing Method

AbstractFatigue properties of thin film materials are extremely important to design durable and reliable microelectromechanical systems (MEMS) devices. However, it is rather difficult to apply conventional fatigue testing method of bulk materials to thin films. Therefore, a fatigue testing method fitted to thin film materials is required. In this investigation, we have developed a fatigue testing method that uses a resonance of cantilever type specimen prepared from thin films. Cantilever beam specimens with dimensions of 1(W) × 3(L) × 0.01(t) mm3 were prepared from Ni-P amorphous alloy thin films and gold foils. In addition, cantilever beam specimens with dimension of 3(L) × 0.3(W) × 0.005(t) mm3 were also prepared from single crystalline silicon thin films. These specimens were fixed to a holder that is connected to an golddio speaker used as an actuator, and were resonated in bending mode. In order to check the validity of this testing method, Young's moduli of these specimens were measured from resonant frequencies. The average Young's modulus of Ni-P was 108 GPa and that of gold foil specimen was 63 GPa, and these values were comparable with those measured by other techniques. This indicates that the resonance occurred theoretically-predicted manner and this testing method is valid for measuring the fatigue properties of thin films. Resonant fatigue tests were carried out for these specimens by changing amplitude range of resonance, and S-N curves were successfully obtained.

Deposition energy dependence in cluster-assembled thin film densities

2005 ◽  
Vol 908 ◽  
Author(s):  
Kristoffer Meinander ◽  
Tina Clauss ◽  
Kai Nordlund
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Molecular Dynamics ◽  
Energy Dependence ◽  
Computer Simulations ◽  
Cluster Atom ◽  
Cu Nanoclusters ◽  
Deposition Energy

AbstractMechanical properties of thin films grown by nanocluster deposition are highly dependent on the energy at which the clusters are deposited. Using molecular dynamics computer simulations we have quantitatively studied variations in the properties of copper thin films grown by deposition of Cu nanoclusters, at energies ranging from 5 meV to 10 eV per cluster atom, on a Cu (100) substrate.

Mechanical Properties and Wear Resistance of High Moment thin Film Head Materials

1994 ◽  
Vol 356 ◽  
Author(s):  
H. Deng ◽  
V. R. Inturi ◽  
J. A. Barnard
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Wear Resistance ◽  
Magnetic Thin Films ◽  
Mechanical And Tribological Properties ◽  
Sputtered Films ◽  
Recording Heads ◽  
High Density Recording ◽  
Worn Surface

AbstractMechanical and tribological properties of soft magnetic thin films with high permeability and low coercivity are very important for the application of these films in high-density recording heads. This paper reports our experimental observations on these important properties of FeTaN thin film head materials. Hardness(H) and Young’s modulus(E) for FeTaN sputtered films were determined by nanoindentation. Wear resistance of these films against commercial magnetic tapes was measured with a sphere-on-flat wear tester. The experimental results indicate that the FeTa films can be hardened when nitrogen is introduced. It was found in this study that the thermal stability of the mechanical properties such as hardness of thin films containing nitrogen is better than that of the film without nitrogen. However, our experiments also revealed that the wear resistance of FeTaN films decreases when the concentration of nitrogen increases and the hardness of the worn surface at a wear scar is lower than that of the unworn surface.

Characterization of Mechanical Properties of Thin Films by Nanoindentation Technique and Finite Element Simulation

2002 ◽  
Author(s):  
Zhaohui Shan ◽  
Suresh K. Sitaraman
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Finite Element ◽  
Strain Hardening Exponent ◽  
Plastic Properties ◽  
Titanium Thin Film ◽  
Nanoindentation Technique ◽  
Element Simulation ◽  
Titanium Thin Films

Titanium thin films have been widely used in microelectronics due to their good adhesion to substrates, such as Silicon wafer and Quartz. However, mechanical behavior of Titanium thin films has not been well characterized. This paper presents a methodology that combines the nanoindentation technique and finite element modeling to characterize the mechanical (elastic and plastic) properties of thin film with its application on Titanium thin film deposited on silicon substrate. The results show that the elastic properties (Young’s modulus) of the Titanium thin film does not change much from the bulk Titanium, and the plastic properties (yield stress and strain hardening exponent) of the Titanium thin film are higher than those of bulk Titanium. This method is also applicable for the study of mechanical properties of other thin films and small volume materials.

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