X-Ray Diffraction Determination of Texture and Stress in Damascene Fabricated Copper Interconnects

1999 ◽  
Vol 563 ◽  
Author(s):  
Delrose Winter ◽  
Paul R. Besser
Keyword(s):  
Incident Beam ◽  
Preferred Orientation ◽  
Copper Interconnects ◽  
X Rays ◽  
X Ray Diffraction ◽  
X Ray ◽  
Diffraction Determination ◽  
Lattice Planes ◽  
Excellent Tool

AbstractX-Ray diffraction (XRD) provides an excellent tool for the measurement of both stress and texture (preferred orientation) on fabricated damascene interconnect structures. Since x-ray diffraction provides a direct measurement of lattice spacings, film strain can be measured directly. Also, since the intensity of diffracted x-rays is proportional to the density of lattice planes oriented in diffracting condition with respect to the incident beam, both the direction and extent of preferred orientation can be accurately measured. Special techniques and considerations are necessary when examining damascene interconnect structures with XRD which are not necessary with blanket films. These techniques are discussed and described in order to aid in obtaining meaningful XRD data and a correct interpretation of the results.

scholarly journals Electronic Excitations and Radiation Damage in Macromolecular Crystallography

Crystals ◽  
2018 ◽  
Vol 8 (7) ◽  
pp. 273 ◽  
Author(s):  
José Brandão-Neto ◽  
Leonardo Bernasconi
Keyword(s):  
Chemical Information ◽  
X Rays ◽  
Electronic Excitations ◽  
Macromolecular Crystallography ◽  
X Ray Diffraction ◽  
X Ray ◽  
Atomic Structures ◽  
Successful Approach ◽  
Structural Research

Macromolecular crystallography at cryogenic temperatures has so far provided the majority of the experimental evidence that underpins the determination of the atomic structures of proteins and other biomolecular assemblies by means of single crystal X-ray diffraction experiments. One of the core limitations of the current methods is that crystal samples degrade as they are subject to X-rays, and two broad groups of effects are observed: global and specific damage. While the currently successful approach is to operate outside the range where global damage is observed, specific damage is not well understood and may lead to poor interpretation of the chemistry and biology of the system under study. In this work, we present a phenomenological model in which specific damage is understood as the result of a single process, the steady excitation of crystal electrons caused by X-ray absorption, which acts as a trigger for the bulk effects that manifest themselves in the form of global damage and obscure the interpretation of chemical information from XFEL and synchrotron structural research.

scholarly journals Electronic Excitations and Radiation Damage in Macromolecular Crystallography

2018 ◽  
Author(s):  
José Brandão-Neto ◽  
Leonardo Bernasconi
Keyword(s):  
Chemical Information ◽  
X Rays ◽  
Electronic Excitations ◽  
Macromolecular Crystallography ◽  
X Ray Diffraction ◽  
X Ray ◽  
Atomic Structures ◽  
Successful Approach ◽  
Structural Research

Macromolecular crystallography at cryogenic temperatures has so far provided the majority of the experimental evidence that underpins the determination of the atomic structures of proteins and other biomolecular assemblies by means of single crystal X-ray diffraction experiments. One of the core limitations of the current methods is that crystal samples degrade as they are subject to X-rays, and two broad groups of effects are observed: global and specific damage. While the currently successful approach is to operate outside the range where global damage is observed, specific damage is not well understood and may lead to poor interpretation of the chemistry and biology of the system under study. In this work, we present a phenomenological model in which specific damage is understood as the result of a single process, the steady excitation of crystal electrons caused by X-ray absorption, which acts as a trigger for the bulk effects that manifest themselves in the form of global damage and obscure the interpretation of chemical information from XFEL and synchrotron structural research.

The determination of crystal size and disorder from X-ray diffraction photographs of polymer fibres. 1. The accuracy of determination of Fourier coefficients of the intensity profile of a reflection

1989 ◽  
Vol 22 (4) ◽  
pp. 363-371 ◽  
Author(s):  
R. Somashekar ◽  
I. H. Hall ◽  
P. D. Carr
Keyword(s):  
Crystal Size ◽  
Fourier Coefficients ◽  
Intensity Profile ◽  
X Ray Diffraction ◽  
Scattering Angle ◽  
X Ray ◽  
Fourier Cosine ◽  
High Harmonics ◽  
Lattice Planes

Methods which determine the number and disorder of lattice planes in a crystal from the Fourier cosine coefficients of the intensity profile of an X-ray reflection use only the low harmonics and require that the coefficients be normalized so that the zero harmonic is unity. Experimentally, the profiles can only be recorded over a smaller range of scattering angle than required by the theory, and it is necessary to subtract background, which is likely to be estimated with considerable error, before determining the coefficients. It is shown that with polymer fibres this causes serious errors in the normalization, and in the values of those low harmonics used in the size and disorder determination, and prevents reliable values being obtained. Methods which avoid normalization and use only high harmonics are needed. It is shown that disorder may be obtained in such a way, but not size, for which low-order normalized coefficients are essential. A method of extrapolation is described and tested which enables the accurate high harmonics to be used to improve the estimates of the low ones. Whilst this will yield more reliable values of crystal size than are obtainable from existing methods, the accuracy depends entirely on the validity of the extrapolation, which cannot be tested in many cases of interest.

X-Ray Diffraction

2021 ◽  
pp. 408-480
Author(s):  
Kannan M. Krishnan
Keyword(s):  
Point Group ◽  
Polycrystalline Materials ◽  
X Rays ◽  
X Ray Diffraction ◽  
Symmetry Point Group ◽  
X Ray ◽  
Atomic Scattering ◽  
Scattering Factor ◽  
Diffraction Patterns ◽  
Lattice Planes

X-rays diffraction is fundamental to understanding the structure and crystallography of biological, geological, or technological materials. X-rays scatter predominantly by the electrons in solids, and have an elastic (coherent, Thompson) and an inelastic (incoherent, Compton) component. The atomic scattering factor is largest (= Z) for forward scattering, and decreases with increasing scattering angle and decreasing wavelength. The amplitude of the diffracted wave is the structure factor, F hkl, and its square gives the intensity. In practice, intensities are modified by temperature (Debye-Waller), absorption, Lorentz-polarization, and the multiplicity of the lattice planes involved in diffraction. Diffraction patterns reflect the symmetry (point group) of the crystal; however, they are centrosymmetric (Friedel law) even if the crystal is not. Systematic absences of reflections in diffraction result from glide planes and screw axes. In polycrystalline materials, the diffracted beam is affected by the lattice strain or grain size (Scherrer equation). Diffraction conditions (Bragg Law) for a given lattice spacing can be satisfied by varying θ or λ — for study of single crystals θ is fixed and λ is varied (Laue), or λ is fixed and θ varied to study powders (Debye-Scherrer), polycrystalline materials (diffractometry), and thin films (reflectivity). X-ray diffraction is widely applied.

X-ray diffraction determination of a semiconductor epilayer unit cell oriented and distorted arbitrarily

1993 ◽  
Vol 26 (4A) ◽  
pp. A181-A187 ◽  
Author(s):  
B F Usher ◽  
G W Smith ◽  
S J Barnett ◽  
A M Keir ◽  
A D Pitt
Keyword(s):  
Unit Cell ◽  
X Ray Diffraction ◽  
X Ray ◽  
Diffraction Determination

X-Ray Diffraction Determination of Metallurgical Damage in Turbo Blower Rotor Shafts

1988 ◽  
Vol 142 ◽  
Author(s):  
John F. Porter ◽  
Dan O. Morehouse ◽  
Mike Brauss ◽  
Robert R. Hosbons ◽  
John H. Root ◽  
...  
Keyword(s):  
Residual Stress ◽  
Hole Drilling ◽  
X Ray Diffraction ◽  
X Ray ◽  
Turbo Blower ◽  
Diffraction Determination ◽  
Defence Research ◽  
Stress Profiles ◽  
Non Destructive

AbstractStudies have been ongoing at Defence Research Establishment Atlantic on the evaluation of non-destructive techniques for residual stress determination in structures. These techniques have included neutron diffraction, x-ray diffraction and blind-hole drilling. In conjunction with these studies, the applicability of these procedures to aid in metallurgical and failure analysis investigations has been explored. The x-ray diffraction technique was applied to investigate the failure mechanism in several bent turbo blower rotor shafts. All examinations had to be non-destructive in nature as the shafts were considered repairable. It was determined that residual stress profiles existed in the distorted shafts which strongly indicated the presence of martensitic microstuctures. These microstructures are considered unacceptable for these shafts due to the potential for cracking or in-service residual stress relaxation which could lead to future shaft distortion.

X‐ray diffraction determination of interfacial roughness correlation in SixGe1−x/Si and GaAs/AlxGa1−xAs superlattices

1992 ◽  
Vol 60 (24) ◽  
pp. 2986-2988 ◽  
Author(s):  
Y. H. Phang ◽  
D. E. Savage ◽  
T. F. Kuech ◽  
M. G. Lagally ◽  
J. S. Park ◽  
...  
Keyword(s):  
X Ray Diffraction ◽  
Interfacial Roughness ◽  
X Ray ◽  
Diffraction Determination
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