Thermochemistry and Kinetics of Gas-Phase Reactions Relevant to the CVD of Coatings: New Data for Process Models
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AbstractUnderstanding the role of gas-phase reactions is an important step in the development of useful CVD process models. In this article, we review the general types of gas-phase reactions that can occur and discuss quantum-chemistry techniques for predicting their thermochemistry and kinetics. We also describe the use of high-temperature flow reactors to measure gas-phase reaction kinetics. Coupling these theoretical and experimental methods is a powerful approach to the characterization of CVD precursor chemistry. We illustrate this in a discussion of the reaction between BC13 and NH3, which is important in the deposition of hexagonal boron nitride coatings.
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2019 ◽
Vol 21
(36)
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pp. 20296-20307
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2004 ◽
Vol 217
(1-2)
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pp. 109-115
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1995 ◽
Vol 7
(1-2)
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pp. 65-78
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1976 ◽
Vol 54
(10)
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pp. 1643-1659
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