Conformal Electroless Copper and Nickel Deposition on Mems Structures

1998 ◽  
Vol 546 ◽  
Author(s):  
Hercules P. Neves ◽  
Thomas D. Kudrle ◽  
Jia-Ming Chen ◽  
Scott G. Adams ◽  
Michel Maharbiz ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Chemical Activation ◽  
Surface Characteristics ◽  
Nickel Deposition ◽  
Electrical Isolation ◽  
Electroless Metallization ◽  
Potential Applications ◽  
Film Roughness ◽  
Seed Layers ◽  
The Ideal

AbstractWe propose electroless metallization as a method for conformal metal deposition microelectromechanical systems (MEMS). The intrinsically conformal nature of electroless deposition makes it ideal for coating high aspect ratio (greater than 50:1) structures frequently fabricated with micromachining techniques We take advantage of the selective nature of the deposition to obtain self-aligned electrical isolation. We minimize the metal film roughness for potential applications in RF and optics. Given the specific MEMS metallization requirements, we determined the ideal concentrations of additives and surfactants in order to provide good electrical isolation, low roughness and high film reliability. Our depositions were done using seed layers as well as through direct chemical activation of the silicon surface. Characteristics such as resistivity [ 1 ], morphology [ 1 ], microstructure [ 2 ], and electrochemical behavior [ 3 ] have already been reported in the literature; our paper is focused on the specific requirements for MEMS applications.

Planarization of Deep Structures Using Self-Leveling Materials

2012 ◽  
Vol 2012 (1) ◽  
pp. 000079-000083
Author(s):  
Dongshun Bai ◽  
Michelle Fowler ◽  
Curtis Planje ◽  
Xie Shao
Keyword(s):  
Integrated Circuits ◽  
Microelectromechanical Systems ◽  
Flat Panel Displays ◽  
New Materials ◽  
Flat Panel ◽  
Light Emitting ◽  
Good Thermal Stability ◽  
Device Integration ◽  
Potential Applications ◽  
Processing Steps

To achieve device integration that will allow the manufacture of smaller, more functional, and more efficient microelectronics, the industry increasingly requires materials to fill and planarize devices with deep structures. Brewer Science has developed several new self-leveling materials to address these planarization needs. These newly developed materials are designed to be either temporary materials that can be removed after their use in processing steps or permanent materials that can stay in a device for its lifetime. These new materials can be applied easily by means of a spin-coating process. They are unique because they can fill and planarize high-aspect-ratio trenches and vias hundreds of microns deep. Some of the materials are photosensitive and can be patterned using photolithography. All of the photosensitive materials in this paper can be developed with industry-accepted solvents and some with an aqueous TMAH solution. Because of their good thermal stability, high transparency, and excellent planarization properties, these materials have potential applications for microelectromechanical systems (MEMS), 3-D integrated circuits, light-emitting diodes (LEDs), semiconductors, flat-panel displays, and related microelectronic and optoelectronic devices. This paper will discuss the properties of these new materials and will present the filling and leveling results obtained in several applications.

The veterinary nurse's role in the management of wound drains

2020 ◽  
Vol 11 (6) ◽  
pp. 264-269
Author(s):  
Evie Yon
Keyword(s):  
Wound Healing ◽  
Patient Outcomes ◽  
Wound Management ◽  
Surgical Reconstruction ◽  
Normal Process ◽  
Initial Management ◽  
Accurate Knowledge ◽  
Wound Breakdown ◽  
Potential Applications ◽  
The Ideal

Wound management is an exciting and well-researched area of veterinary medicine. It is a key area for veterinary nursing involvement from initial management to possible surgical reconstruction. An essential aspect of this is provision of the ideal wound environment to encourage normal and effective wound healing, and to reduce the incidence of wound breakdown and dehiscence. Throughout this clinical review, consideration will be given to the normal process of wound healing and how this can be assisted by drain placement. The types of drain used in practice, in addition to novel drainage techniques, will be considered throughout, as well as the veterinary nurse's role in their management. Comprehensive and accurate knowledge and understanding of different drain types, in addition to their potential applications, can help to ensure more informed veterinary nursing and, in turn, better wound healing and patient outcomes.

scholarly journals MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications

Micromachines ◽  
2020 ◽  
Vol 11 (10) ◽  
pp. 928 ◽  
Author(s):  
Haoran Wang ◽  
Yifei Ma ◽  
Hao Yang ◽  
Huabei Jiang ◽  
Yingtao Ding ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Vibration Mode ◽  
Photoacoustic Imaging ◽  
Rapid Development ◽  
Flexural Vibration ◽  
Ultrasound Transducers ◽  
Optical Contrast ◽  
Future Directions ◽  
Potential Applications ◽  
Mems Technology

Photoacoustic imaging (PAI) is drawing extensive attention and gaining rapid development as an emerging biomedical imaging technology because of its high spatial resolution, large imaging depth, and rich optical contrast. PAI has great potential applications in endoscopy, but the progress of endoscopic PAI was hindered by the challenges of manufacturing and assembling miniature imaging components. Over the last decade, microelectromechanical systems (MEMS) technology has greatly facilitated the development of photoacoustic endoscopes and extended the realm of applicability of the PAI. As the key component of photoacoustic endoscopes, micromachined ultrasound transducers (MUTs), including piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs), have been developed and explored for endoscopic PAI applications. In this article, the recent progress of pMUTs (thickness extension mode and flexural vibration mode) and cMUTs are reviewed and discussed with their applications in endoscopic PAI. Current PAI endoscopes based on pMUTs and cMUTs are also introduced and compared. Finally, the remaining challenges and future directions of MEMS ultrasound transducers for endoscopic PAI applications are given.

Focused Ion Beam Nano-Machined Structures For Strain Analysis By A Moiré Technique

2002 ◽  
Vol 761 ◽  
Author(s):  
Biao Li ◽  
Huimin Xie ◽  
Xin Zhang
Keyword(s):  
Focused Ion Beam ◽  
Microelectromechanical Systems ◽  
Ion Beam ◽  
Accurate Determination ◽  
Strain Analysis ◽  
Local Strain ◽  
Ion Milling ◽  
Nano Fabrication ◽  
In Situ Deposition ◽  
Potential Applications

ABSTRACTThe accurate determination of residual stress/strain in thin films is especially important in the emerging field of MicroElectroMechanical Systems (MEMS). In this article, a focused ion beam (FIB) moiré method is proposed and demonstrated to measure the strain in MEMS structures. This technique is based on the advantages of the FIB system in nano-fabrication, imaging, in-situ deposition, and fine adjustment. Nano-grating lines with 70 nm width and 140 nm spacing are directly written on the top of the MEMS structures by ion milling without the requirement of an etch mask. The FIB moiré pattern is formed by the interference between a prepared specimen grating and FIB raster scan lines. The strain of the MEMS structures is derived by calculating the average spacing of moiré fringes. Since the local strain of a MEMS structure itself can be monitored during the process, the FIB moiré technique has many potential applications in the mechanical metrology of MEMS. As an example, the strain distribution along the sticking MEMS structures, and the contribution of surface oxidization and mass loading to the cantilever strain is determined by this FIB moiré technique.

scholarly journals Functionalization of vertically aligned carbon nanotubes

2013 ◽  
Vol 4 ◽  
pp. 129-152 ◽  
Author(s):  
Eloise Van Hooijdonk ◽  
Carla Bittencourt ◽  
Rony Snyders ◽  
Jean-François Colomer
Keyword(s):  
Carbon Nanotubes ◽  
Surface Characteristics ◽  
High Carbon ◽  
Vertically Aligned Carbon Nanotubes ◽  
Aligned Carbon Nanotubes ◽  
Wide Range ◽  
Potential Applications ◽  
Vertically Aligned ◽  
Functionalization Of Carbon Nanotubes ◽  
Chemical Groups

This review focuses and summarizes recent studies on the functionalization of carbon nanotubes oriented perpendicularly to their substrate, so-called vertically aligned carbon nanotubes (VA-CNTs). The intrinsic properties of individual nanotubes make the VA-CNTs ideal candidates for integration in a wide range of devices, and many potential applications have been envisaged. These applications can benefit from the unidirectional alignment of the nanotubes, the large surface area, the high carbon purity, the outstanding electrical conductivity, and the uniformly long length. However, practical uses of VA-CNTs are limited by their surface characteristics, which must be often modified in order to meet the specificity of each particular application. The proposed approaches are based on the chemical modifications of the surface by functionalization (grafting of functional chemical groups, decoration with metal particles or wrapping of polymers) to bring new properties or to improve the interactions between the VA-CNTs and their environment while maintaining the alignment of CNTs.

Mambalgins, the Venom-origin Peptides as a Potentially Novel Group of Analgesics: Mini Review

2018 ◽  
Vol 17 (2) ◽  
pp. 87-97 ◽  
Author(s):  
Maksymilian Aleksander Brzezicki ◽  
Przemyslaw Temistokles Zakowicz
Keyword(s):  
Animal Studies ◽  
Current Knowledge ◽  
Short Review ◽  
Thermal Pain ◽  
Difficult Condition ◽  
Acid Sensing Ion Channels ◽  
Pain Models ◽  
Potential Applications ◽  
Chronic Constrictive Injury ◽  
The Ideal

Background: Despite a wide variety of current analgesia regimens, chronic pain is an incredibly difficult condition to treat. Its pathophysiology, initiation, development and course involve a range of different receptors and transmitters. The acid-sensing ion channels (ASICs) are being attributed to an increasingly larger significance in pain aetiology. Over the last few years, the mechanism of ASICs action, influence of their antagonists/agonists and clinical applications have been well described. However, the importance of this protein is significantly larger, not only from the perspective of pain management, but also in psychiatry of addiction or fear. Recently discovered peptides from three-finger toxin group, called mambalgins (isolated from Dendroaspis polylepis polylepsis) exhibit potent analgesic mechanisms of action on ASICs in animal model. Aims & Methods: The article reviews current knowledge in the field of mambalgins and assesses their potential analgesic application, based on the recent experimental evidence. Results: The mambalgins seem to decrease the intensity of the inflammatory, neuropathic and mechanic pain. This has been demonstrated in animal studies of different pain models, including carrageenan- induced inflammatory pain, chronic constrictive injury-induced neuropathic pain and thermal pain. The mechanism of mambalgin action is not clearly defined, but it is suspected that they bind directly to the pH-sensitive region of the ASIC. Conclusion: In this short review, we attempted to summarise the current knowledge about mambalgins and their potential applications as a new substance in searching for the ideal analgesia without common side effects of the other drug groups.

scholarly journals Characterization of Activated Carbons from Oil-Palm Shell by CO2Activation with No Holding Carbonization Temperature

2013 ◽  
Vol 2013 ◽  
pp. 1-6 ◽  
Author(s):  
S. G. Herawan ◽  
M. S. Hadi ◽  
Md. R. Ayob ◽  
A. Putra
Keyword(s):  
Activated Carbon ◽  
Surface Area ◽  
Oil Palm ◽  
Pyrolysis Temperature ◽  
Activated Carbons ◽  
Chemical Activation ◽  
Surface Characteristics ◽  
Bet Surface Area ◽  
Preparation Time

Activated carbons can be produced from different precursors, including coals of different ranks, and lignocellulosic materials, by physical or chemical activation processes. The objective of this paper is to characterize oil-palm shells, as a biomass byproduct from palm-oil mills which were converted into activated carbons by nitrogen pyrolysis followed by CO2activation. The effects of no holding peak pyrolysis temperature on the physical characteristics of the activated carbons are studied. The BET surface area of the activated carbon is investigated using N2adsorption at 77 K with selected temperatures of 500, 600, and 700°C. These pyrolysis conditions for preparing the activated carbons are found to yield higher BET surface area at a pyrolysis temperature of 700°C compared to selected commercial activated carbon. The activated carbons thus result in well-developed porosities and predominantly microporosities. By using this activation method, significant improvement can be obtained in the surface characteristics of the activated carbons. Thus this study shows that the preparation time can be shortened while better results of activated carbon can be produced.

Additive manufacturing as an emerging technology for fabrication of microelectromechanical systems (MEMS)

2019 ◽  
Vol 2 (2) ◽  
pp. 175-197 ◽  
Author(s):  
Sanjay Kumar ◽  
Pulak Bhushan ◽  
Mohit Pandey ◽  
Shantanu Bhattacharya
Keyword(s):  
Additive Manufacturing ◽  
3D Printing ◽  
Microelectromechanical Systems ◽  
Manufacturing Sector ◽  
Process Improvements ◽  
Recent Success ◽  
Mems Fabrication ◽  
Recent Developments ◽  
Potential Applications ◽  
Printing Processes

The recent success of additive manufacturing processes (also called, 3D printing) in the manufacturing sector has led to a shift in the focus from simple prototyping to real production-grade technology. The enhanced capabilities of 3D printing processes to build intricate geometric shapes with high precision and resolution have led to their increased use in fabrication of microelectromechanical systems (MEMS). The 3D printing technology has offered tremendous flexibility to users for fabricating custom-built components. Over the past few decades, different types of 3D printing technologies have been developed. This article provides a comprehensive review of the recent developments and significant achievements in most widely used 3D printing technologies for MEMS fabrication, their working methodology, advantages, limitations, and potential applications. Furthermore, some of the emerging hybrid 3D printing technologies are discussed, and the current challenges associated with the 3D printing processes are addressed. Finally, future directions for process improvements in 3D printing techniques are presented.

Comparative Photocatalytic Properties of Cu2O from Octahedron to Sphere Structures

2014 ◽  
Vol 609-610 ◽  
pp. 45-50 ◽  
Author(s):  
Li Min Qian ◽  
Jie Zhou ◽  
Chu Zheng ◽  
Di Chen ◽  
Bi Shen ◽  
...  
Keyword(s):  
Photocatalytic Activity ◽  
Surface Characteristics ◽  
Morphology Evolution ◽  
Simple Method ◽  
Visible Light Photocatalyst ◽  
Absorption Intensity ◽  
Potential Applications ◽  
Type Semiconductor ◽  
P Type ◽  
Controllable Preparation

Cu2O, a p-type semiconductor, has broad potential applications, especially as a visible-light photocatalyst. This paper presents a simple water-bath reflux to prepare Cu2O micro/nanoparticles. The morphology evolution from intact octahedrons to surface-pitted spheres was obtained by adjusting reducing agent and additive. Reflectance spectra show similar photo-absorption intensity and the same range from 250 nm to 650 nm. However, they perform different photocatalytic activity. Intact octahedron has the best photodegradation ability and next is vertex-and edge-damaged octahedron, the lowest for vertex-free polyhedrons and surface-pitted spheres. The enhanced photocatalytic activity for intact octahedrons should to be attributed to its surface characteristics of high index. Our study not only provides a simple method for controllable preparation of Cu2O micro/nanoparticles with different morphologies but also confirms the effect of morphologies on photocatalytic activity.

scholarly journals A New Strong Form Technique for Thermo-Electro-Mechanical Behaviors of Piezoelectric Solids

Coatings ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 687
Author(s):  
Jun Lv ◽  
Minjie Shao ◽  
Yuting Xue ◽  
Xiaowei Gao ◽  
Zhaoqian Xie
Keyword(s):  
Microelectromechanical Systems ◽  
Piezoelectric Materials ◽  
Numerical Technique ◽  
Differential Method ◽  
Strong Form ◽  
Mechanical Behaviors ◽  
Point Collocation ◽  
Potential Applications ◽  
Electric Potentials ◽  
Piezoelectric Structures

Piezoelectric materials are widely fabricated and investigated for potential applications in microelectromechanical systems as direct converters between mechanical and electrical signals, where some show pyroelectric features involving thermo-electro-mechanical interactions. This study aimed to introduce a novel numerical technique to predict the thermo-electro-mechanical behaviors of piezoelectric structures, based on a strong-form numerical framework called the element differential method. In this method, the shape functions of the isoparametric element and their first two derivatives were derived analytically by interpolating the temperature, displacement, and electric potentials. Then, a point collocation method based on node positions in the elements was proposed to generate the final system of equations without any domain integrations. Thus, the coupled behaviors of thermal piezoelectric structures, including the pyroelectric features, can be simulated by the strong-form formulation of the governing equations. Several numerical examples, including the piezoelectric composites structures, are presented, and the coupled thermo-electro-mechanical responses have been analyzed to validate the proposed method.

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