Grain Size Distribution and Degree of Texture in Films Used in Integrated Circuits
Keyword(s):
AbstractAs miniaturisation proceeds, the electrical properties of conductive films used in modem IC's are increasingly influenced by the grain sizes and the texture of the films. There is a need therefore to devise techniques which can examine these properties. Described in this work are two new cross-sectional TEM techniques for use on fully-processed IC's to determine quantitatively grain size distributions and the degree of texture in a film. The technique which investigates texture is used to determine how quickly the texture develops through a polysilicon film.
2019 ◽
Vol 68
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pp. 29-46
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2020 ◽
Vol 17
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pp. 26-33
2006 ◽
Vol 519-521
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pp. 1617-1622
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2018 ◽
Keyword(s):
2021 ◽
2011 ◽
Vol 27
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pp. 163
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