Tie Importance of Contact Radius for Substrate-Independent Property Measurement of Thin Films

1998 ◽  
Vol 522 ◽  
Author(s):  
J. L. Hay ◽  
M. E. O'Hern ◽  
W. C. Oliver
RSC Advances ◽  
2018 ◽  
Vol 8 (53) ◽  
pp. 30624-30628 ◽  
Author(s):  
Weiwei Hua ◽  
Jingwei Xiu ◽  
Fei Xiu ◽  
Zepu Zhang ◽  
Juqing Liu ◽  
...  

Micro-supercapacitors exhibiting excellent AC line-filtering with oriented coordination polymer thin-film electrodes are fabricated based on a substrate-independent electrode fabrication strategy.


2008 ◽  
Vol 130 (10) ◽  
Author(s):  
Ankur Jain ◽  
Kenneth E. Goodson

An accurate measurement of the thermophysical properties of freestanding thin films is essential for modeling and predicting thermal performance of microsystems. This paper presents a method for simultaneous measurement of in-plane thermal conductivity and heat capacity of freestanding thin films based on the thermal response to a sinusoidal electric current. An analytical model for the temperature response of a freestanding thin film to a sinusoidal heating current passing through a metal heater patterned on top of the thin film is derived. Freestanding thin-film samples of silicon nitride and nickel titanium (NiTi), a shape memory alloy, are microfabricated and characterized. The thermal conductivity of thin-film NiTi, which increases linearly between 243K and 313K, is 40% lower than the bulk value at room temperature. The heat capacity of NiTi also increases linearly with temperature in the low temperature phase and is nearly constant above 280K. The measurement technique developed in this work is expected to contribute to an accurate thermal property measurement of thin-film materials. Thermophysical measurements on NiTi presented in this work are expected to aid in an accurate thermal modeling of microdevices based on the shape memory effect.


2015 ◽  
Vol 645-646 ◽  
pp. 287-290
Author(s):  
Yao Min Chen ◽  
Pei Tao Dong ◽  
Xue Zhong Wu ◽  
Yu Lie Wu

SiC films made of different methods may have different mechanical properties, so their mechanical properties need to be determined by mechanical property measurement [1]. Since SiC films have stable chemical properties, it’s very difficult to be etched [2]. This paper introduce a method for SiC films mechanical property testing without processing SiC. Moreover, in view of the lack of square SiC films’ mechanical properties research, this paper also do simulation on it.


2015 ◽  
Vol 25 (26) ◽  
pp. 4144-4152 ◽  
Author(s):  
Waldemar A. Marmisollé ◽  
Joseba Irigoyen ◽  
Danijela Gregurec ◽  
Sergio Moya ◽  
Omar Azzaroni

2019 ◽  
Vol 6 (11) ◽  
pp. 116427
Author(s):  
Pravakar P Rajbhandari ◽  
Ashok Chaudhari ◽  
Tara P Dhakal

Carbon ◽  
2015 ◽  
Vol 83 ◽  
pp. 275-281 ◽  
Author(s):  
Wei Gong ◽  
Wenshuang Chen ◽  
Jianping He ◽  
Ying Tong ◽  
Chun Liu ◽  
...  

2003 ◽  
Vol 18 (6) ◽  
pp. 1383-1391 ◽  
Author(s):  
Ting Y. Tsui ◽  
C. A. Ross ◽  
G. M. Pharr

A new method for making substrate-independent hardness measurements by nanoindentation techniques that applies to soft metallic films on very hard substrates is presented. The primary issue to be addressed is substrate-induced enhancement of indentation pileup and the ways it influences the indentation contact area. On the basis of experimental observations of soft aluminum films deposited on silicon, glass, and sapphire substrates, an empirical relationship was derived that relates the amount of pileup to the contact depth. From this relationship and the associated experimental observations, a method was developed that allows the intrinsic hardness of the film to be estimated, even when the indenter penetrates through the film into the substrate. The method should prove useful for very thin films (<100 nm) in which it is not possible to make measurements at penetration depths small enough to avoid subtrate effects.


2017 ◽  
Vol 254 (9) ◽  
pp. 1700204 ◽  
Author(s):  
Joe V. Carpenter ◽  
Mark Bailly ◽  
Allison Boley ◽  
Jianwei Shi ◽  
Michael Minjares ◽  
...  

2011 ◽  
Vol 26 (6) ◽  
pp. 727-738 ◽  
Author(s):  
Jennifer Hay ◽  
Bryan Crawford

Abstract


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