Mechanical Properties of Tin Thin Films Measured using Nanoindentation and Bulge Test

1998 ◽  
Vol 522 ◽  
Author(s):  
O.R. Shojaei ◽  
A. Karimi
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Bulge Test ◽  
Tin Thin Films

scholarly journals Correlating point defects with mechanical properties in nanocrystalline TiN thin films

2021 ◽  
pp. 109844
Author(s):  
Zaoli Zhang ◽  
Arsham Ghasemi ◽  
Nikola Koutná ◽  
Zhen Xu ◽  
Thomas Grünstäudl ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Point Defects ◽  
Tin Thin Films

Effect of NH3 flow on electrical and mechanical properties of ALD TiN thin films

2021 ◽  
Vol 291 ◽  
pp. 129554
Author(s):  
Hyunchol Cho ◽  
Ben Nie ◽  
Ajit Dhamdhere ◽  
Yifei Meng ◽  
Monica Neuburger ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Tin Thin Films

Methods to improve reliability of bulge test technique to extract mechanical properties of thin films

2010 ◽  
Vol 50 (9-11) ◽  
pp. 1888-1893 ◽  
Author(s):  
H. Youssef ◽  
A. Ferrand ◽  
P. Calmon ◽  
P. Pons ◽  
R. Plana
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Bulge Test ◽  
Test Technique ◽  
Improve Reliability

Investigation of the Mechanical Properties of Thin Films by Bulge Test

2009 ◽  
Vol 156-158 ◽  
pp. 477-482
Author(s):  
Audrey Hémel ◽  
Alain Jacques ◽  
Thomas Schenk ◽  
Tomáš Kruml
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Room Temperature ◽  
Mechanical Tests ◽  
Bulge Test ◽  
Gold Films ◽  
Test Device

A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data.

Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films

1992 ◽  
Vol 7 (6) ◽  
pp. 1553-1563 ◽  
Author(s):  
Martha K. Small ◽  
W.D. Nix
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Finite Element ◽  
Material Properties ◽  
Deformation Behavior ◽  
Initial Conditions ◽  
Standard Technique ◽  
Bulge Test ◽  
The Finite Element Method

Since its first application to thin films in the 1950's the bulge test has become a standard technique for measuring thin film mechanical properties. While the apparatus required for the test is simple, interpretation of the data is not. Failure to recognize this fact has led to inconsistencies in the reported values of properties obtained using the bulge test. For this reason we have used the finite element method to model the deformation behavior of a thin film in a bulge test for a variety of initial conditions and material properties. In this paper we will review several of the existing models for describing the deformation behavior of a circular thin film in a bulge test, and then analyze these models in light of the finite element results. The product of this work is a set of equations and procedures for analyzing bulge test data that will improve the accuracy and reliability of this technique.

Mechanical properties of TiN thin films investigated using biaxial tensile testing

1998 ◽  
Vol 14 (3) ◽  
pp. 240-245 ◽  
Author(s):  
O. R. Shojaei ◽  
T. Kruml ◽  
A. Karimi ◽  
J. L. Martin
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Tensile Testing ◽  
Biaxial Tensile ◽  
Tin Thin Films ◽  
Biaxial Tensile Testing

The Effect of Film Thickness on Mechanical Properties of TiN Thin Films

2011 ◽  
Vol 4 (11) ◽  
pp. 3570-3575 ◽  
Author(s):  
Jao-Hwa Kuang ◽  
Hui-Lung Chien
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Film Thickness ◽  
Tin Thin Films
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