Diffusion and Electromigration of Cu in Single Crystal Al Interconnects

1998 ◽  
Vol 516 ◽  
Author(s):  
V. T. Srikar ◽  
C. V. Thompson
Keyword(s):  
Grain Boundary ◽  
Single Crystal ◽  
Concentration Profile ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Effect Of Temperature ◽  
Cu Alloys ◽  
Grain Structures ◽  
Kinetics Of ◽  
Grain Boundary Transport

AbstractThe electromigration-induced transport properties of Cu in Al-Cu alloys, and their effect on electromigration lifetimes in interconnects with bamboo grain structures are not well understood. To isolate and study the mechanisms and kinetics of Cu diffusion and electromigration in interconnects for which grain boundary transport is not dominant, we have developed a test structure consisting of parallel Al single crystal lines, with every alternate line terminating in contact pads. Cu is locally added to the same regions in all the lines, and the effect of temperature and electric field can be simultaneously characterized by analyzing the Cu concentration profile measured using electron-probe microanalysis. Comparison of the calculated values of diffusivities with the diffusivity of Cu through the Al lattice, and through dislocation cores in Al, suggests that the path of diffusion of Cu in Al single crystals is along the Al/AlOx interface.

Ba3YRu0.73(2)Al1.27(2)O8 and Ba5Y2Ru1.52(2)Al1.47(2)O13.5: New Perovskite Ruthenates with Partial Octahedra Replacement

2007 ◽  
Vol 62 (11) ◽  
pp. 1383-1389 ◽  
Author(s):  
Barbara Schüpp-Niewaa ◽  
Larysa Shlyk ◽  
Yurii Prots ◽  
Gernot Krabbes ◽  
Rainer Niewa
Keyword(s):  
Single Crystal ◽  
Single Crystals ◽  
Diffraction Data ◽  
Electron Probe Microanalysis ◽  
Perovskite Structure ◽  
Electron Probe ◽  
X Ray Diffraction ◽  
Powder Mixtures ◽  
X Ray ◽  
Vertex Sharing

Dark red single crystals of the new phases Ba3YRu0.73(2)Al1.27(2)O8 and Ba5Y2Ru1.52(2)Al1.47(2)O13.5 have been grown from powder mixtures of BaCO3, Y2O3, Al2O3, and RuO2 . The compositions given in the formulas result from the refinements of the crystal structures based on single crystal X-ray diffraction data (hexagonal P63/mmc (No. 194), Z = 2, Ba3 YRu0.73(2)Al1.27(2)O8: a = 5.871(1), c = 14.633(3) Å , R1 = 0.035, wR2 = 0.069 and Ba5Y2Ru1.52(2)Al1.47(2)O13.5: a = 5.907(1), c = 24.556(5) Å, R1 = 0.057, wR2 = 0.114). Ba3YRu0.73(2)Al1.27(2)O8 crystallizes in a 6H perovskite structure, Ba5Y2Ru1.52(2)Al1.47(2)O13.5 has been characterized as a 10H Perovskite. Due to similar spatial extensions of (Ru2O9) facesharing pairs of octahedra and (Al2O7) vertex-sharing pairs of tetrahedra, both structures show partial mutual substitution of these units. Consequently, the title compounds may be written as Ba3Y(Ru2O9)1−x(Al2O7)x, x = 0.64(1) and Ba5Y2RuO6(Ru2O9)1−x(Al2O7)x, x = 0.74(1). This interpretation is supported by the results of electron probe microanalysis using wavelength-dispersive X-ray spectroscopy. An oxidation state of Ru close to +5 for the (Ru2O9) units, as can be derived from the distances d(Ru-Ru), additionally leads to similar charges of both the (Ru2O9) and the (Al2O7) units.

Recent Developments in the Study of Grain Boundary Segregation by Wavelength Dispersive X-Ray Spectroscopy (WDS)

2011 ◽  
Vol 309-310 ◽  
pp. 39-44
Author(s):  
Pawel Nowakowski ◽  
Frédéric Christien ◽  
Marion Allart ◽  
René Le Gall
Keyword(s):  
Electron Beam ◽  
Fracture Surface ◽  
Grain Boundary ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Boundary Segregation ◽  
Normal Incidence ◽  
Grain Boundary Segregation ◽  
X Ray ◽  
Recent Developments

It was recently shown [1] that EMPA-WDS (Electron Probe MicroAnalysis by Wavelength Dispersive X-ray Spectroscopy) can be used to detect and to accurately quantify monolayer surface and grain boundary segregation. This paper presents the last developments of this application. It focuses on the measurement of sulphur grain boundary segregation in nickel on fractured surfaces. A special attention was paid to the quantification of the sulphur coverage, taking into account the non-normal incidence of the electron beam on a fracture surface. Sulphur grain boundary segregation kinetics was measured at 750°C in nickel to document the quantitative possibilities of the technique.

Interfacial Effects in Polycaproamide-Aramide Polymer Systems

1993 ◽  
Vol 318 ◽  
Author(s):  
Vladimir P. Dmitrenko
Keyword(s):  
Phase Equilibrium ◽  
Thermal Treatment ◽  
Phase Diagrams ◽  
Electron Probe ◽  
Effect Of Temperature ◽  
Transitional Layer ◽  
Polymer Systems ◽  
Interfacial Effects ◽  
X Ray ◽  
Kinetics Of

ABSTRACTThe peculiarity of interdiffusion and phase equilibrium has been studied for poly-m-phenyleneisophthalamide and poly-p-amidobenzimidazole systems during formation of a transitional layer in conditions of organoplastics. The investigation of this process has been based on the method of electron-probe X-ray spectral microanalysis. The effect of temperature, pressure and time of thermal treatment on dimensions of diffusional zones and kinetics of their formation was shown. The parameters of solubility and mutual diffusion of components were determined and phase diagrams were obtained.

The influence of solute depleted zones on the stress-corrosion susceptibility of aged Al-7.2 mass % Mg and Al-4.4 mass % Cu alloys

1974 ◽  
Vol 339 (1616) ◽  
pp. 37-47 ◽  
Keyword(s):  
Grain Boundary ◽  
Stress Corrosion ◽  
Corrosion Potential ◽  
Cu Alloys ◽  
Boundary Precipitation ◽  
Corrosion Susceptibility ◽  
Grain Boundary Precipitation ◽  
Electrochemical Model ◽  
Kinetics Of

The influence on stress-corrosion susceptibility of the measured solute de­pleted zone associated with grain boundary precipitation has been studied. The behaviour has been explained in terms of a simple electrochemical model that is consistent with in situ localized grain boundary corrosion potential measurements and explains the kinetics of stress-corrosion crack initiation in these alloys.

Front Tracking Method on a Fixed Grid versus Enthalpy Approach in Modelling of Binary Alloy Solidification

2002 ◽  
Author(s):  
David J. Browne ◽  
Jerzy Banaszek ◽  
John D. Hunt
Keyword(s):  
Convective Heat Transfer Coefficient ◽  
Front Tracking ◽  
Columnar Dendrite ◽  
Front Tracking Method ◽  
Cu Alloys ◽  
Grain Structures ◽  
Tracking Model ◽  
Equiaxed Grain ◽  
Kinetics Of ◽  
Porous Medium Model

A novel front tracking technique on a fixed Cartesian grid, based on the kinetics of dendritic growth, is discussed. It is used to predict the influence of both alloy composition and convective heat transfer coefficient on the size of the undercooled liquid zone in front of columnar dendrite tips during solidification of Al-Cu alloys driven by conduction in a square mould. The model is compared with the enthalpy approach showing its superiority in the detection of the undercooled zone and, thus, in potentially modelling of columnar/equiaxed grain structures. The effect of natural thermal convection on the shape of the mushy zone is demonstrated by use of the enthalpy-porous medium model, and an approach to incorporating convection into the non-equilibrium front-tracking model is outlined.

Effect of Doping, Composite Geometry and Diffusion Annealing Schedules on the Structure of Nb3Sn Layers in Nb/Cu-Sn Wires

2008 ◽  
Vol 273-276 ◽  
pp. 514-519 ◽  
Author(s):  
E.N. Popova ◽  
Vladimir V. Popov ◽  
E.P. Romanov ◽  
S.V. Sudareva ◽  
E.A. Dergunova ◽  
...  
Keyword(s):  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Diffusion Annealing ◽  
Rate Of Growth ◽  
Kinetics Of Formation ◽  
Kinetics Of ◽  
And Diffusion ◽  
Mg Doped ◽  
Effect Of Doping

Kinetics of formation of superconducting Nb3Sn layers and the structure of bronzeprocessed Nb/Cu-Sn composites with Zr, Zn or Mg-doped matrixes or Ti-doped Nb filaments of different geometry have been studied by the methods of TEM, SEM and electron-probe microanalysis. All the doping elements have been found to accelerate the rate of growth of the diffusion Nb3Sn layers and consequently their thickness. Correlation between the diffusion annealing schedules, the geometry of Nb filaments, the structure of the diffusion Nb3Sn layers and the current-carrying characteristics of multifilamentary Nb/Cu-Sn composites has been established.

Electron Probe Microanalysis of Frozen Hydrated Kidneys, Isolated Cells, and Cultured Cells

1982 ◽  
Vol 40 ◽  
pp. 402-403 ◽  
Author(s):  
Claude Lechene
Keyword(s):  
Liquid Nitrogen ◽  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Cultured Cells ◽  
Liquid Nitrogen Temperature ◽  
Elemental Content ◽  
Isolated Cells ◽  
Renal Tubular Cells ◽  
Diamond Saw ◽  
Saw Blade

Electron probe microanalysis of frozen hydrated kidneysThe goal of the method is to measure on the same preparation the chemical elemental content of the renal luminal tubular fluid and of the surrounding renal tubular cells. The following method has been developed. Rat kidneys are quenched in solid nitrogen. They are trimmed under liquid nitrogen and mounted in a copper holder using a conductive medium. Under liquid nitrogen, a flat surface is exposed by sawing with a diamond saw blade at constant speed and constant pressure using a custom-built cryosaw. Transfer into the electron probe column (Cameca, MBX) is made using a simple transfer device maintaining the sample under liquid nitrogen in an interlock chamber mounted on the electron probe column. After the liquid nitrogen is evaporated by creating a vacuum, the sample is pushed into the special stage of the instrument. The sample is maintained at close to liquid nitrogen temperature by circulation of liquid nitrogen in the special stage.

Analysis of completed commercial semiconductors using EPMA

1996 ◽  
Vol 54 ◽  
pp. 502-503
Author(s):  
R. Packwood ◽  
M.W. Phaneuf ◽  
V. Weatherall ◽  
I. Bassignana
Keyword(s):  
Electron Probe Microanalysis ◽  
Electron Probe ◽  
Semiconductor Industry ◽  
Detection Limits ◽  
High Technology ◽  
Depth Resolution ◽  
Analytical Instruments ◽  
Wide Range ◽  
Numerous Element ◽  
Choice Method

The development of specialized analytical instruments such as the SIMS, XPS, ISS etc., all with truly incredible abilities in certain areas, has given rise to the notion that electron probe microanalysis (EPMA) is an old fashioned and rather inadequate technique, and one that is of little or no use in such high technology fields as the semiconductor industry. Whilst it is true that the microprobe does not possess parts-per-billion sensitivity (ppb) or monolayer depth resolution it is also true that many times these extremes of performance are not essential and that a few tens of parts-per-million (ppm) and a few tens of nanometers depth resolution is all that is required. In fact, the microprobe may well be the second choice method for a wide range of analytical problems and even the method of choice for a few.The literature is replete with remarks that suggest the writer is confusing an SEM-EDXS combination with an instrument such as the Cameca SX-50. Even where this confusion does not exist, the literature discusses microprobe detection limits that are seldom stated to be as low as 100 ppm, whereas there are numerous element combinations for which 10-20 ppm is routinely attainable.

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