Templating Nanopores Into Poly(MethylSilsesquioxane): New Lowdielectric Coatings Suitable for MicroElectronic Applications

1998 ◽  
Vol 511 ◽  
Author(s):  
Julius F. Remenar ◽  
Craig J. Hawker ◽  
James L. Hedrick ◽  
Sung Mog Kim ◽  
Robert D. Miller ◽  
...  

ABSTRACTThin films of nanoporous poly(methylsilsesquioxane) have been prepared from organic/inorganic polymer hybrids. Low molecular weight 6-arm star poly(caprolactone)s are incorporated into partially pre-condensed methylsilsesquioxane resin. Upon heating, the glass resin cross-links around the organic polymer templates. Thermal decomposition of the orgainc polymer produces nanoporous thin films which show tunable dielectric constants as low as 1.9 and exhibit properties suitable for use in interconnect devices. Experimental data including porosity, morphology, and dielectric constants are presented.

1997 ◽  
Vol 9 (2) ◽  
pp. 135-143 ◽  
Author(s):  
Yasuharu Yamada ◽  
Nobuyuki Furukawa

Silicon-modified polynaphthalimides derived from 1,4,5,8-naphthalenetetracar-boxylic dianhydride, 4,4′-dinaphthalic anhydride and bis(1, 8-dicarboxynaphth-4-yl)dimethyl silane dianhydride and several types of aromatic diamines were prepared and their thermal stability was studied. The monomers of 4, 4′-dinaphthalic anhydride and bis(1, 8-dicarboxynaphth-4-yl)dimethyl silane dianhydride were also synthesized from acenaphthene followed by oxidation. Polyimides obtained were brittle because of the low molecular weight and the rigidity of the polymer structure. Therefore, no good thin films were made from the polyimides (the colour of which was dark brown). The imidization of polynaphthalimide occurred in the temperature range of 100–200 °C which is lower by about 50 °C than that of polypyromellitimide. The polyimides having a naphthalimide structure showed higher thermal decomposition temperature than the polyimides having a pyromellitimide structure derived from pyromellitic dianhydride. However, the decomposition temperature of silicon-modified polynaphthalimides decreased with increasing silicon content in the polyimides.


Author(s):  
S. Kéna-Cohen ◽  
P. N. Stavrinou ◽  
D. D. C. Bradley ◽  
S. A. Maier

2008 ◽  
Vol 41 (18) ◽  
pp. 6800-6808 ◽  
Author(s):  
Siddharth Joshi ◽  
Souren Grigorian ◽  
Ullrich Pietsch ◽  
Patrick Pingel ◽  
Achmad Zen ◽  
...  

1983 ◽  
Vol 1 (5) ◽  
pp. 364-378
Author(s):  
Tokio Morikawa

Low molecular weight fuels, ethanol, n-hexane, acetone etc., which are close to the thermal decomposition products of polymers such as polyethylene, poly styrene, cellulose, etc., were combusted in a tube furnace.


2013 ◽  
Vol 8 (12) ◽  
pp. 3232-3232
Author(s):  
Fangjie Zhu ◽  
Tatsuya Nishimura ◽  
Takeshi Sakamoto ◽  
Hidekazu Tomono ◽  
Hiroki Nada ◽  
...  

2001 ◽  
Vol 50 (4) ◽  
pp. 463-468 ◽  
Author(s):  
Takumi Watanabe ◽  
Yong He ◽  
Naoki Asakawa ◽  
Naoko Yoshie ◽  
Yoshio Inoue

2013 ◽  
Vol 8 (12) ◽  
pp. 3002-3009 ◽  
Author(s):  
Fangjie Zhu ◽  
Tatsuya Nishimura ◽  
Takeshi Sakamoto ◽  
Hidekazu Tomono ◽  
Hiroki Nada ◽  
...  

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